1990 Fiscal Year Annual Research Report

電気化学的微細加工技術の開発とマイクロ化電極の応用に関する研究

Research Project

Project/Area Number	01850175
Research Category	Grant-in-Aid for Developmental Scientific Research (B)
Research Institution	Tohoku University
Principal Investigator	内田勇東北大学, 工学部, 教授 (50005302)
Co-Investigator(Kenkyū-buntansha)	赤星晴夫日本製作所, 日立研究所, 主任研究員仁科辰夫東北大学, 工学部, 助手 (60172673) 大澤雅俊東北大学, 工学部, 助教授 (00108466) 末永智一東北大学, 工学部, 助教授 (70173797)
Keywords	湿式微細加工 / ウルトラマイクロ電極 / 表面増強ラマン散乱 / inーsitu 薄膜X線回析 / マイクロアレ-電極 / 酵素スイッチ
Research Abstract	<1.レ-ザ-強調効果と湿式微細加工技術の研究>___ー (1)レ-ザ-光照射による選択メッキをマイクロパタ-ニングに応用する技術確立の為に,レ-ザ-光を照射した微小領域における電析反応を検討した.現在のところ,熱的効果以外に有効な強調効果は見られず,エッチング技術への展開を検討している.(2)電解及び無電解メッキにおける添加剤の吸着挙動をインピ-ダンスと表面増強ラマンスペクトルの測定により検討し成果を挙げている.また,inーsitu薄膜X線回析による電析の初期過程を確析し,添加剤効果と,結晶粒径との相関について興味ある成果を得ている.これらの成果はプリント基板の微細加工技術の進展に有用である.(3)電析初期過程における単原子層以下の金属原子の配列構造と,その表面特性を赤外スペクトルで検討した.(4)Ag,Au,Cuなどの微粒子表面に吸着した分子の赤外吸収が著しく増大することを明らかにし,そのメカニズムを解明した. <2.マイクロ化電極の作製と分子素子への応用>___ー (1)電解質溶液中で安定に動作するAu,PtあるいはITOのマイクロアレ-電極(電極幅,ギャップ幅;4〜20μm)の作製技術を確立し,それらの分子デバイスへの展開を行った.電極間を導道性高分子超薄膜で接合する手法を開発し,興味ある化学増幅及び応答を確認した.(2)電気化学デジタルデバイスの1つとして各種酵素をマイクロアレ-電極上に固定して,酵素反応によりonーoffできる酵素スイッチの開発を行った.

Research Products
(22 results)

All Other

All Publications (22 results)

[Publications] 内田勇: "Intercellular Voltammetry in a Single Protoplast with an Ultramicroelectrode" Chemistry Letters. 1227-1230 (1990)
[Publications] 末永智一: "Determination of Catecholamines by an Electrochemical FlowーThrough Detector with IndiumーTin Oxide Microelectrode Arrays Coated with Nafion" Chemistry Letters. 133-136 (1989)
[Publications] 大澤雅俊: "In situ Characterization of Platinum Particies Desperses in Nafion Films on Gold Electrodes by Infered Spectroscopy" J.Electroanalytical Chemistry. 270. 459-464 (1989)
[Publications] 大澤雅俊: "Electrochemical Reduction of Hypthiviologen at Platinum Studies by TimeーResalved Resonance Raman Spectroscopy" J.Electroanalytical Chemistry. 270. 261-272 (1989)
[Publications] 阿部孝之: "ウルトラマイクロ電極の作製とその挙動" 表面技術. 40. 76-78 (1989)
[Publications] 阿部孝之: "Microvoltammetric Measurements in a Single Microcapsule" Chemistry Letters. 301-304 (1989)
[Publications] 阿部孝之: "Chloride Ion Selective Microelectrodes" Bioelectrochemistry and Bioenergetics. 22. 411-415 (1990)
[Publications] 末永智一: "Multichannel Electrochemical Detection System for Flow Analysis" Analytical Chemistry. 62. 407-409 (1990)
[Publications] 末永智一: "Electron Transferase Activity of Diaphorase(NADH:Acceptor Oxidoreductase)from Bacillus Stearoーthermophilus" Biochimica et Biophysica Acta. 1038. 29-38 (1990)
[Publications] 末永智一: "Electrooxidation of NADH with Co(phen)^<3+>_3 Catalyzed by NADH Dehydrogenase Purified from Bacillus Stearothermophilus" Bioelectrochemistry and Bioenergetics. 24. 347-354 (1990)
[Publications] 大澤雅俊: "An Infrared Study of Carbon Monoxide Adsorbed on Platinum Electrode Modified with Bismath Submonolayer" Chemistry Letters. 839-842 (1990)
[Publications] 張憲彰: "Enzyme Sensors for LーAmino Acid Based on Electrochemical Detection of NADH" Denki Kagaku. 58. 1211-1212 (1990)
[Publications] 青木純: "Electrochemical Response at Microarray Electrodes in Flowing Streams and Application to Determination of Catecholamines" Analytical Chemistry. 62. 2206-2210 (1990)
[Publications] 末永智一: "ElectronーTransfer from NADH to Polypyrrole and its Applicability to Electrochemical Oxidation of NADH" J.Electroanalytical Chemistry.
[Publications] 青木純: "Multichannel Electrochmical Detection with Microelectrode Array in Flowing Streams" Analytical Chemistry.
[Publications] 末永智一: "An Enzyme Switch Sensitive to NADH" Chemical Communications.
[Publications] 大澤雅俊: "Surface Enhanced Infrared Absorption of pーNitrobenzoic Acid Deposited on Silver Island Films:Contributions of Electromagnetic and Chemical Mechanisms" J.Physical Chemistry.
[Publications] 大澤雅俊: "Surface Enhanced Raman Scattering at Mechanically Polished Rough Silver Electrodes" Applied Surfaces Science.
[Publications] 大澤雅俊: "Electrochemistry at Polymer Modified Electrode Studied by IR and Raman Spectroscopies"
[Publications] 張憲彰: "A Novel Polyviologen Electrode Fabricated by Electrochemical Crosslinking" Chemical Communications.
[Publications] 松田直樹: "ラマン分光法によるメッキ添加剤の吸着挙動の研究"
[Publications] 末永智一: "Ultramicroelectrodes as Sensing Devices for Biological Molecules,Chemical Sensor Technology Vol.3" Kodansha/Elsevier, 17 (1991)

1990 Fiscal Year Annual Research Report

電気化学的微細加工技術の開発とマイクロ化電極の応用に関する研究

Principal Investigator

内田 勇 東北大学, 工学部, 教授 (50005302)

Research Products

[Publications] 内田 勇: "Intercellular Voltammetry in a Single Protoplast with an Ultramicroelectrode" Chemistry Letters. 1227-1230 (1990)

[Publications] 末永 智一: "Determination of Catecholamines by an Electrochemical FlowーThrough Detector with IndiumーTin Oxide Microelectrode Arrays Coated with Nafion" Chemistry Letters. 133-136 (1989)

[Publications] 大澤 雅俊: "In situ Characterization of Platinum Particies Desperses in Nafion Films on Gold Electrodes by Infered Spectroscopy" J.Electroanalytical Chemistry. 270. 459-464 (1989)

[Publications] 大澤 雅俊: "Electrochemical Reduction of Hypthiviologen at Platinum Studies by TimeーResalved Resonance Raman Spectroscopy" J.Electroanalytical Chemistry. 270. 261-272 (1989)

[Publications] 阿部 孝之: "ウルトラマイクロ電極の作製とその挙動" 表面技術. 40. 76-78 (1989)

[Publications] 阿部 孝之: "Microvoltammetric Measurements in a Single Microcapsule" Chemistry Letters. 301-304 (1989)

[Publications] 阿部 孝之: "Chloride Ion Selective Microelectrodes" Bioelectrochemistry and Bioenergetics. 22. 411-415 (1990)

[Publications] 末永 智一: "Multichannel Electrochemical Detection System for Flow Analysis" Analytical Chemistry. 62. 407-409 (1990)

[Publications] 末永 智一: "Electron Transferase Activity of Diaphorase(NADH:Acceptor Oxidoreductase)from Bacillus Stearoーthermophilus" Biochimica et Biophysica Acta. 1038. 29-38 (1990)

[Publications] 末永 智一: "Electrooxidation of NADH with Co(phen)^<3+>_3 Catalyzed by NADH Dehydrogenase Purified from Bacillus Stearothermophilus" Bioelectrochemistry and Bioenergetics. 24. 347-354 (1990)

[Publications] 大澤 雅俊: "An Infrared Study of Carbon Monoxide Adsorbed on Platinum Electrode Modified with Bismath Submonolayer" Chemistry Letters. 839-842 (1990)

[Publications] 張 憲彰: "Enzyme Sensors for LーAmino Acid Based on Electrochemical Detection of NADH" Denki Kagaku. 58. 1211-1212 (1990)

[Publications] 青木 純: "Electrochemical Response at Microarray Electrodes in Flowing Streams and Application to Determination of Catecholamines" Analytical Chemistry. 62. 2206-2210 (1990)

[Publications] 末永 智一: "ElectronーTransfer from NADH to Polypyrrole and its Applicability to Electrochemical Oxidation of NADH" J.Electroanalytical Chemistry.

[Publications] 青木 純: "Multichannel Electrochmical Detection with Microelectrode Array in Flowing Streams" Analytical Chemistry.

[Publications] 末永 智一: "An Enzyme Switch Sensitive to NADH" Chemical Communications.

[Publications] 大澤 雅俊: "Surface Enhanced Infrared Absorption of pーNitrobenzoic Acid Deposited on Silver Island Films:Contributions of Electromagnetic and Chemical Mechanisms" J.Physical Chemistry.

[Publications] 大澤 雅俊: "Surface Enhanced Raman Scattering at Mechanically Polished Rough Silver Electrodes" Applied Surfaces Science.

[Publications] 大澤 雅俊: "Electrochemistry at Polymer Modified Electrode Studied by IR and Raman Spectroscopies"

[Publications] 張 憲彰: "A Novel Polyviologen Electrode Fabricated by Electrochemical Crosslinking" Chemical Communications.

[Publications] 松田 直樹: "ラマン分光法によるメッキ添加剤の吸着挙動の研究"

[Publications] 末永 智一: "Ultramicroelectrodes as Sensing Devices for Biological Molecules,Chemical Sensor Technology Vol.3" Kodansha/Elsevier, 17 (1991)

内田勇東北大学, 工学部, 教授 (50005302)

[Publications] 内田勇: "Intercellular Voltammetry in a Single Protoplast with an Ultramicroelectrode" Chemistry Letters. 1227-1230 (1990)

[Publications] 末永智一: "Determination of Catecholamines by an Electrochemical FlowーThrough Detector with IndiumーTin Oxide Microelectrode Arrays Coated with Nafion" Chemistry Letters. 133-136 (1989)

[Publications] 大澤雅俊: "In situ Characterization of Platinum Particies Desperses in Nafion Films on Gold Electrodes by Infered Spectroscopy" J.Electroanalytical Chemistry. 270. 459-464 (1989)

[Publications] 大澤雅俊: "Electrochemical Reduction of Hypthiviologen at Platinum Studies by TimeーResalved Resonance Raman Spectroscopy" J.Electroanalytical Chemistry. 270. 261-272 (1989)

[Publications] 阿部孝之: "ウルトラマイクロ電極の作製とその挙動" 表面技術. 40. 76-78 (1989)

[Publications] 阿部孝之: "Microvoltammetric Measurements in a Single Microcapsule" Chemistry Letters. 301-304 (1989)

[Publications] 阿部孝之: "Chloride Ion Selective Microelectrodes" Bioelectrochemistry and Bioenergetics. 22. 411-415 (1990)

[Publications] 末永智一: "Multichannel Electrochemical Detection System for Flow Analysis" Analytical Chemistry. 62. 407-409 (1990)

[Publications] 末永智一: "Electron Transferase Activity of Diaphorase(NADH:Acceptor Oxidoreductase)from Bacillus Stearoーthermophilus" Biochimica et Biophysica Acta. 1038. 29-38 (1990)

[Publications] 末永智一: "Electrooxidation of NADH with Co(phen)^<3+>_3 Catalyzed by NADH Dehydrogenase Purified from Bacillus Stearothermophilus" Bioelectrochemistry and Bioenergetics. 24. 347-354 (1990)

[Publications] 大澤雅俊: "An Infrared Study of Carbon Monoxide Adsorbed on Platinum Electrode Modified with Bismath Submonolayer" Chemistry Letters. 839-842 (1990)

[Publications] 張憲彰: "Enzyme Sensors for LーAmino Acid Based on Electrochemical Detection of NADH" Denki Kagaku. 58. 1211-1212 (1990)

[Publications] 青木純: "Electrochemical Response at Microarray Electrodes in Flowing Streams and Application to Determination of Catecholamines" Analytical Chemistry. 62. 2206-2210 (1990)

[Publications] 末永智一: "ElectronーTransfer from NADH to Polypyrrole and its Applicability to Electrochemical Oxidation of NADH" J.Electroanalytical Chemistry.

[Publications] 青木純: "Multichannel Electrochmical Detection with Microelectrode Array in Flowing Streams" Analytical Chemistry.

[Publications] 末永智一: "An Enzyme Switch Sensitive to NADH" Chemical Communications.

[Publications] 大澤雅俊: "Surface Enhanced Infrared Absorption of pーNitrobenzoic Acid Deposited on Silver Island Films:Contributions of Electromagnetic and Chemical Mechanisms" J.Physical Chemistry.

[Publications] 大澤雅俊: "Surface Enhanced Raman Scattering at Mechanically Polished Rough Silver Electrodes" Applied Surfaces Science.

[Publications] 大澤雅俊: "Electrochemistry at Polymer Modified Electrode Studied by IR and Raman Spectroscopies"

[Publications] 張憲彰: "A Novel Polyviologen Electrode Fabricated by Electrochemical Crosslinking" Chemical Communications.

[Publications] 松田直樹: "ラマン分光法によるメッキ添加剤の吸着挙動の研究"

[Publications] 末永智一: "Ultramicroelectrodes as Sensing Devices for Biological Molecules,Chemical Sensor Technology Vol.3" Kodansha/Elsevier, 17 (1991)