気体エレクトロニクスー基礎過程とその応用ー

1991 Fiscal Year Annual Research Report

• Project/Area Number: 02302034
• Research Institution: Nagoya Institute of Technology
• Principal Investigator: 林 眞 名古屋工業大学, 工学部, 教授 (40024179)
• Co-Investigator(Kenkyū-buntansha): 生田 信皓 徳島大学, 工学部, 教授 (30035802) ; 真壁 利明 慶応大学, 理工学部, 教授 (60095651) ; 籏野 嘉彦 東京工業大学, 工学部, 教授 (90016121) ; 田頭 博昭 北海道大学, 工学部, 教授 (10001174) ; 橘 邦英 京都工芸繊維大学, 工学部, 教授 (40027925)
• Keywords: 気体エレクトロニクス / プラズマプロセシング / プラズマコ-ティング / 放電 / 地球環境問題 / 放射線科学

Research Abstract

気体エレクトロニクスは,プラズマプロセシング,表面のプラズマコ-ティング,種々の放電現象,地球の環境問題,放射線物理および化学等に関連した,現時点での最重要課題であり,引続き一層の研究が要望されている。
平成3年度では,昨年行った第2回オ-ストラリア・日本気体エレクトロニクスとその応用研究会の記念論文集GASEOUS ELECTRONICS AND ITS APPLICATIONSが発行されたので,これを有効に使っていただける世界各地の研究者に配布した。内容の高水準であることと,美しい本であることにより,多くの方々から高い評価をいただいた。
各研究分担者は,昨年に引続いて,分担者相互の連絡を密にし,他大学を訪問し,またファックス,手紙で討論を行い,研究の進展をはかった。例えば,代表者林は平成3年11月徳島大学へ行き,電子スオ-ムの振舞について生田教授と深い討論を行った。
平成3年8月20日から23日まで4日間,岐阜県吉城郡上宝村中尾の京都大学砂防研究所にて,研究代表者,分担者の外,数名の若手研究者に参会いただいて,研究発表・討論会を開催した。3泊の研究会であったので,1人1時間以上の研究成果の発表を行い,それに続く討論が続出し,非常に有効な研究会であった。個々の討論は夜遅くまで続き,今後の研究の展開に大きく寄与するであろう。
研究成果報告書をまとめるため,各分担者にオリジナルレポ-トを,英文にて執筆していただき,あわせて学会誌等に発表された論文の別刷を送っていただいた。これらは編集されて,254頁の厚い報告書が完成した。これも世界各地の研究者に配布された。

Research Products

• [Publications] M.Hayashi: "Electron collision cross sections of atoms and molecules" Gaseous Electronics and Its Applications,KTK Scientific Publishers. 9-33 (1991)
• [Publications] T.Dote,M.Shimada: "Transport Coefficients of Charged Particles in Weakly Ionized Gas Media" Trans.IEE of Japan. Vol.111‐A,No.3. 159/167 (1991)
• [Publications] 土手 敏彦: "グロ-放電機構に関する最近の研究" 電気学会論文誌. Vol.111‐A,No.5. 363/369 (1991)
• [Publications] T.Dote,M.Shimada(ed.P.W.Crompton et al.,): "Swarm Analysis of Phenomena in Weakly Ionized Gases" Gaseous Electronics and Its Applications KTK Scientific Publishers Tokyo. 294 (1991)
• [Publications] T.Dote,M.Shimada: "A Constant Ratio Approximation Theory of the Positive Column of a Glow Discharge for the Schottky Model" J.Phys.Soc.Jpn.,. Vol.60,No.2. 485/497 (1991)
• [Publications] I.Shimamura,T.Fujimoto: "State densities and ionization equilibrium of atoms in dense plasmas" PHYSICAL REVIEW A. 42. 2346-2353 (1990)
• [Publications] T.Fujimoto,R.W.P.McWhirter: "Validity criteria for local thermodynamic equilibrium in plasma spectroscopy" PHYSICAL REVIEW A. 42. 6588-6601 (1990)
• [Publications] S.Matsumoto,K.Shiozawa,Y.Ishitani,A.Hirabayashi,and T.Fujimoto: "Magnetic‐field dependence of the collisional disalignment of neon 2p^53p‐configuration atoms" PHYSICAL REVIEW A. 44. 4316-4320 (1991)
• [Publications] K.Tacibana,T.Mukai and H.Harima: "Measurement of Absolute Densities and Spatial Distributions of Si and SiH in an RF‐Discharge Silane Plasma for the Chemical Vapor Deposition of a‐Si:H Films" Jpn.J.Appl.Phys.30. 1208-1211 (1991)
• [Publications] K.Yoshizawa,M.Taki,K.Tachibana and S.Moriyama: "Disk‐Shaped Vacuum Ultra Violet Light Source Driven by Microwave Discharge for Photoexcited Processes" Appl.Phys.Lett.59. 1678-1680 (1991)
• [Publications] 結城 昭正,川原 孝昭,松井 安次,橘 邦英: "SiH_4プラズマCVDにおける膜前駆ラジカル組成に関する研究" 化学工学論文集. 17. 758-767 (1991)
• [Publications] 高橋 一夫,橘 邦英: "He‐Xe混合ガスにおける電子衝突電離係数および励起係数の測定と解析" 電気学会論文誌A. 111. 182-191 (1991)
• [Publications] K.Tachibana,A.Yuuki and Y.Matsui: "Radical Kinetics in an RF‐Discharge Silane Plasma for the Chemical Vapor Deposition of a‐Si:H Film" Gaseous Electronics and Its Applications(Kluwe Academic Publishers). 273-293 (1991)
• [Publications] K.Ninomiya,Y.Hirai,A.Momose,S.Aoki,and K.Suzuki: "X‐ray Photoelectron Spectroscopy of Micrometer‐Size Surface Area Using Synchrotron Radiation" Japanese Journal of Applied Physics. 29. 1026-1028 (1990)
• [Publications] K.Yokogawa,Y.Yajima,T.Mizutani,S.Nishimatsu,and K.Suzuki: "Positive Charges and E'Centers Formed by Vacuum Ultraviolet Radiation in SiO_2 Grown on Si" Japanese Journal of Applied Physics. 29. 2265-2268 (1990)
• [Publications] T.Yunogami,T.Mizutani,K.Tsujimoto,and K.Suzuki: "Mechanism of Radiation Damage in SiO_2/Si Induced by VUV Photons" Japanese Journal of Applied Physics. 29. 2269-2272 (1990)
• [Publications] T.Ono,S.Hiraoka,and K.Suzuki: "Anisotropic Etching of Heavily Doped Polysilicon by a Hot Cl_2 Molecular Beam" Materials Research Society Symposium Proceedings. 201. 31-36 (1991)
• [Publications] K.Ninomiya,Y.Hirai,A.Momose,S.Aoki,and K.Suzuki: "Microscopic X‐ray Photoelectron Spectroscopy Using a Focused Soft X‐ray Beam" Journal of Vacuum Science and Technology A. 9. 1244-1247 (1991)
• [Publications] K.Ninomiya,M.Hasegawa,S.Aoki,and K.Suzuki: "Microscopic X‐ray Photoelectron Spectroscopy Using A Wolter Type X‐ray Mirror" Japanese Journal of Applied Physics. 30. 2889-2894 (1991)
• [Publications] N.Sato and H.Tagashira: "Electron Swarm Parameters in SiH_4/H_2 Mixtures." “Gaseous Electronics and Its Applications",KTK Scientific Publishers/Tokyo,Kluwer Academic Publishers.144-159 (1991)
• [Publications] N.Sato and H.Tagashira: "A Hybrid Monte Carlo/Fluid Model of RF Plasmas in a SiH_4/H_2 Mixture." IEEE Trans.on Plasma Science.19. 102-112 (1991)
• [Publications] N.Sato and Y.Kawashima: "Time‐ and Space‐Resolved Spectroscopy of Pulsed RF Plasmas in Nitrogen." Annual Report of Faculty of Education,Iwate University.51. (1992)
• [Publications] Y.Morishima et al.: "Deexcitation of He(2^1P) in a Collision with a Hydrogen Molecule" Journal of Chemical Physics. 94. 2564-2570 (1991)
• [Publications] H.Yoshida et al.: "Cross Sections for Deexcitation of He(2^3S,2^1S and 2^1P)by SiH_4 and GeH_4" Chemical Physics Letters. 176. 173-177 (1991)
• [Publications] K.Kameta et al.: "Absolute Measurements of Photoabsorption Cross Sections Photoionization Cross Sections,and Photoionization Quantum Yields of Silane in the 13ー40 eV Region" Journal of Chemical Physics. 95. 1456-1460 (1991)
• [Publications] M.Ukai et al.: "Ionizing and Nonionizing Decays of Superexcited Acetylene Molecules in the Extreme‐Ultraviolet Region" Journal of Chemical Physics. 95. 4142-4153 (1991)
• [Publications] K.Kameta et al.: "Absolute Measurments of Photoabsorption and Photoionization Cross Sections of Disilane in the 13ー40 eV Region" Journal of Chemical Physics. 95. 6188-6189 (1991)
• [Publications] K.Kameta et al.: "Photoabsorption,Photoionization,and Neutral Fragmentation Cross Sections of Superexcited Dimethylether and Ethylmethylether in the Extreme‐UV Region" Journal of Chemical Physics.
• [Publications] H.Yoshida et al.: "Deexcitation cross sections of Ar( ^3P_2, ^3P_1, ^3Po,and ^1P_1)by CH_4,SiH_4,and GeH_4" Journal of Chemical Physics.
• [Publications] M.Ukai et al.: "Optical Threshold Excitation Functions of Xe 5s,5p Photoionization Satellite Near the 5s^<-1> Cooper Minimum" Physical Review A.
• [Publications] M.Ukai et al.(eds.R.W.Crompton,M.HAYASHI,D.E.BOYD,and T.MAKABE): "Deexcitation of Excited Rare Gas Atoms in Metastable and Resonance States as Studied by the Pulse Radiolysis Method" Gaseous Electronics and Its Applications,Kluwer Academic Publ.51-72 (1991)
• [Publications] N.Kouchi et al.: "Angular‐Momentum Population of Excited H Atoms Produced by Photodissociation of H_2" Chemical Physics Letters.
• [Publications] Y.Hatano(ed.Y.Tabata): "Pulse Radiolysis in the Gas Phase" Pulse Radiolysis,CRC Press. 199-228 (1991)
• [Publications] Y.Hatano et al.(eds.Y.Tabata,Y.Ito,and S.Tagawa): "Fundamental Molecular Parameters in the Gas Phase" Handbook of Radiation Chemistry CRC press. 187-292 (1991)
• [Publications] M.Ukai et al.(eds.,J.D.Chapman,W.c.Dewey,and G.F.Whitmore): "Synchrotron Radiation Studies of the Dissociation Dynamics of Some Simple Molecules in the Superexcited States" Radiation Research,Proc.9th Int.Congr,Radiat.Res.,Tronto,July 7ー12,1991.Academic Press. 1. 420 (1991)
• [Publications] M.Ukai et al.(ed.C.Troyanowski): "The Role of Shape Resonance in Ionizing and Non‐ionizing Decays of Superexcited Acetylene Molecules in the EUV Region" Synchrotron Radiation and Dynamic Phenomena.Proc.of 48th Int.Meeting of Phys.Chem.,Sept.9ー13.1991.Grenoble,AIP.New York.
• [Publications] Y.Morishima et al.: "Optical model calculation of the total Penning ionization cross sections for He(2^1P)‐Ar,Kr,and Xe" Journal of Chemical Physics.
• [Publications] 籏野 嘉彦: "放射光の原理と特徴" 表面科学の基礎と応用、日本表面科学会編、NTS、. 532-535 (1991)
• [Publications] 籏野 嘉彦: "分子の光学的振動子強度とその測定" シンクロトロン放射光、学会出版センタ-. 9-28 (1991)
• [Publications] 籏野 嘉彦: "パルス励起による化学反応ー放射光時間構造とその利用" シンクロトロン放射光、学会出版センタ-. 119-126 (1991)
• [Publications] T.Makabe and F.Tochikubo,N.Nishimura: "Influence of negative ions in RF glow discharges in SiH_4 at 13.56 MHz." Phys.Rev.A. 42. 3674-3677 (1990)
• [Publications] F.Tochikubo,A.Suzuki,S.Kakuta,Y.Terazono and T.Makabe: "Study of the structure in RF glow discharges in SiH_4 by spatiotemporal optical emission spectroscopy." J.Appl.Phys.68. 5532-5539 (1990)
• [Publications] I.Yamanashi,N.Goto and T.Makabe: "Periodic behavior of electron swarm parameters in Ar in an RF field." Trans.IEE of Japan. 111‐A. 168-174 (1991)
• [Publications] F.Tochikubo and T.Makabe: "Absolute measurement of the excitation rate and density of the excited species in an RF discharge from the optical emission spectroscopy." Meas.Sci.Technol.2. 1133-1137 (1991)
• [Publications] T.Makabe and N.Nakano,Y.Yamaguchi: "Modeling and diagnostics of structure in RF glow discharges in Ar at 13.56 MHz." Phys.Rev.A. 45. (1992)
• [Publications] F.Tochikubo,T.Makabe: "Study of the structure in RF glow discharges in CH_4 and H_2 by spatiotemporal optical emission spectroscopy." J.Appl.Phys.71. (1992)
• [Publications] 倉知 正,中村 義春: "Electron Swarm Parameters in SiH4‐Rare Gas Mixtures and Collision Cross Sections for Monosilane Molecules." IEEE Trans.on Plasma Science. 19. 262-269 (1991)
• [Publications] 中村 義春: "Recent Electron Swarm Studies Using Rare Gas/Molecular Gas Mixtures." In “Gaseous Electronics and Its Applications",Eds.,R.W.Crompton et.al.,KTK Scientific Publications,Tokyo. 178-200 (1991)
• [Publications] H.Sakai and Y.Ichikawa: "Process Technology for a‐Si/a‐Si Double Stacked Tandem Solar Cells with Stabilized 10% Efficiency" Journal of Non‐Crystalline Solids. 137&138. 1155-1160 (1991)
• [Publications] Y.Inoue,K.Uchida,H.Hori and T.Sakurai: "Collision Broadening and Shift of D_2 Resonance Line Perturbed by Every Race Gas" J.Phys.Soc.Japan. 59. 516-521 (1990)
• [Publications] T.Sakurai and H.Hori: "Measurement of the Mobility of Excited State Ions in a Discharge Plasma by using a Tunable Diode Laser" Gaseous Electronics and its Applications,R.W.Crompton etal ed.(Kluwer Academic Publishers). 201-212 (1991)
• [Publications] 桜井 彪,辰巳 扶二子,堀 裕和,井上 行夫: "エキシマレ-ザ-用容量移行型パルス放電の絶縁破壊" レ-ザ-研究. 19. 1145-1152 (1991)
• [Publications] H.Hori,Y.Ono,A.Watanabe,N.Nakamura,Y.Inoue,and T.Sakurai: "State‐specific Mobility of Excited Calcium and Cadmium Ions in a Discharge Plasma Measured by a Tunable Diode Laser" Phys.Rev.A. (1992)
• [Publications] S.Nakajima,Y.Seki and N.Ikuta:"Boltzmann equation analysis of electrons in weakly ionized SiH_4 gas under RF electric field." Bulletin of Fuculty of Engineering,The Uiversity of Tokushima.27. 49-63 (1990)
• [Publications] S.Nakajima,T.Okamoto and N.Ikuta:"Boltzmann equation analysis of position and time dependent velocity distribution of an electron swarm." Trans.IEE Jpn,. 111‐A. 139-146 (1991)
• [Publications] N.Ikuta,S.Nakajima,Y.Seki and T.Okamoto: "Boltzmann equation analysis of position and time dependent velocity distribution of electrons." Gaseous Electronics and Its Applications.Edited by R.W.Crompton,M.Hayashi,D.E.Boyd and T.Makabe,KTK Seientific publishers/Tokyo,Kluwer Academic Publlshers. 102-126 (1991)
• [Publications] 伊藤 晴雄,生田 信皓: "N_2ガス中における電離電流(V.正特性タウンゼント放電の形成機構)" 電気学会論文誌. 111‐A. 498-499 (1991)
• [Publications] 伊藤 晴雄,山梨 浩樹,生田 信皓: "光電子源としての金蒸着膜陰極の膜厚に関する検討" 電気学会論文誌. 111‐A. 498-499 (1991)
• [Publications] K.Kondo and N.Ikuta: "Spatio‐temporal gas temperature rise in repetitive positive streamer corona in air." Journal of Physical Society of Japan. Vol.59. 3203-3216 (1990)
• [Publications] K.Kondo and H.Tagashira: "Evolution equation and transport coefficients defined by arrival time spectra of swarms." Journal of Physics D:Applied Physics. Vol.23. 1175-1183 (1990)
• [Publications] H.Date,K.Kondo H.Tagashira: "Transport coefficients defined by arrival time spectra of electron swarms in Krypton gas." Journal of Physics D:Applied Physics.Vol.23. 1384-1389 (1990)
• [Publications] K.Kondo and H.Tagashira: "The two complementary expressions for the evolution of electron and ion swarms in the gas in an electric field" Second Japan‐Australia Workshop on Gaseous Electronics and its Application. 101-104 (1990)
• [Publications] M.Hayashi (Editor): "Second Australia‐Japan Workshop on Gaseous Electronics and Its Applications" 119 (1990)
• [Publications] R.W.Crompton,M.Hayashi,D.E.Boyd and T.Makabe(Editor): "Gaseous Electronics and Its Applications" KTK Scientific Publishers, 364 (1991)
• [Publications] 橘 邦英(分担執筆) 難波 進編著: "マイクロプロセスハンドブック" 工業調査会, 869 (1991)