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1991 Fiscal Year Final Research Report Summary

Gaseous Electronics - Fundamental Processes and Its Applications

Research Project

Project/Area Number 02302034
Research Category

Grant-in-Aid for Co-operative Research (A)

Allocation TypeSingle-year Grants
Research Field 応用物理学一般(含航海学)
Research InstitutionNagoya Institute of Technology

Principal Investigator

HAYASHI Makoto  Nagoya Inst. of Tech., Depart. of Eng., Prof., 工学部, 教授 (40024179)

Co-Investigator(Kenkyū-buntansha) IKUTA Nobuaki  Tokushima Univ., Faculty of Eng. Prof., 工学部, 教授 (30035802)
MAKABE Toshiaki  Keio Univ., Faculty of Sci. & Eng., Prof., 理工学部, 教授 (60095651)
HATANO Yoshihiko  Tokyo Inst. Tech., Faculty of Sci., Prof., 工学部, 教授 (90016121)
TAGASHIRA Hiroaki  Hokkaido Univ., Faculty of Eng., Prof., 工学部, 教授 (10001174)
TACHIBANA Kunihide  Kyoto Inst. Tech., Faculty of Eng., Prof., 工学部, 教授 (40027925)
Project Period (FY) 1990 – 1991
Keywordsgaseous electronics / integrated circuit / plasma coating / electrical discharge / environmental problem / radiation physics
Research Abstract

The study on gaseous electronics is important for such diverse fields as plasma processing for the production of integrated circuits, plasma coating of surfaces, electrical discharge phenomena, environmental problems of the earth, radiation physics and chemistry, and many others.
From November 12 to 16 of 1990, we had the international workshop, "2nd Australia-Japan Workshop on Gaseous Electronics and Its Applications" at Gotemba. Main Japanese participants are members of this research project and joined some important scientists and foreign participants are attended from Australia, USA and Italy. Ije had a great success on this workshop. This is one of the most important result of tliis project. We have published the commemorative book "Gaseous Electronics and Its Applications", edited by R. W. Crompton, M. Hayashi, D. E. Boyd and T. Makabe, , KTK Scientific Publishers, Kluwer Academic Publishers, 364 pages, 1991. This is also the excellent work of this project.
From August 20 to 23 of 1991, we had tile effective and interesting discussion meeting at the Laboratory of Kyoto university, Gifu prefecture.
We have published the many papers under the assitance of this project to many famous important magazines. Some selected papers are collected in the report of this project. Some copies are distributed to the main scientists of this field of all over the world.

  • Research Products

    (75 results)

All Other

All Publications (75 results)

  • [Publications] M.Hayashi: "Electron collision cross sections of atoms and molecules" Gaseous Electronics and Its Applications,KTK Scientific Publishers. 9-33 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Dote M.Shimada: "Transport Coefficients of Charged Particles in Weakly Ionized Gas Media" Trans.IEE of Japan. Vol.111-A,No.3,. 159-167 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 土手 敏彦: "グロ-放電機構に関する最近の研究" 電気学会論文誌. Vol.111ーA No.3. 363-369 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Dote,M.Shimada: "Swarm Analysis of Phenomena in Weakly Ionized Gases" Gaseous Electronics and Its Applications P.294,ed.P.W.Crompton et al.,KTK Scientific Publishers Tokyo. (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Dote,M.Shimada: "A Constants Ratio Approximation Theory of the Positive Column of a Glow Discharge for the Schottky Model" J.Phys.Soc.Jpn.,. Vol.60,No.2,. 485-497 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I.Shimamura,T.Fujimoto: "State densities and ionization equilibrium of atoms in dense plasmas" PHYSICAL REVIEW A. 42. 2346-2353 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Fujimoto,R.W.P.McWhirter: "Validity criteria for local thermodynamic equilibrium in plasma spectroscopy" PHYSICAL REVIEW A. 42. 6588-6601 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Matsumoto,K.Shiozawa,Y.Ishitani,A.Hirabayashi,and T.Fujimoto: "Magnetic-field dependence of the collisional disalignment of neon 2p^53P-configuration atoms" PHYSICAL REVIEW A. 44. 4316-4320 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Tachibana,T.Mukai and H.Harima: "Measurement of Absolute Densities and Spatial Distributions of Si and Sill in an RF-Discharge Silane Plasma for the Chemical Vapor Deposition of a-Si:H Films" Jpn.J.Appl.Phys. 30. L1208-L1211 (1991)

    • Description
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  • [Publications] K.Yoshizawa,M.Taki,K.Tachibana and S.Moriyama: "Disk-Shaped Vacuum Ultra Violet Light Source Driven by Microwave Discharge for Photoexcited Processes" Appl.Phys.Lett.59. 1678-1680 (1991)

    • Description
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  • [Publications] 結城 昭正,川原 孝昭,松井 安次,橘 邦英: "SiH_4プラズマCVDにおける膜前駆ラジカル組成に関する研究" 化学工学論文集. 17. 758-767 (1991)

    • Description
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  • [Publications] 高橋 一夫,橘 邦英: "HeーXe混合ガスにおける電子衝突電離係数および励起係数の測定と解析" 電気学会論文誌A. 111. 182-191 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Tachibana,A.Yuuki and Y.Matsui: "Radical Kinetics in an RF-Discharge Silane Plasma for the Chemical Vapor Deposition of a-Si:H Film" Gaseous Electronics and Its Applications(Kluwe Academic Publishers). 273-293 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Ninomiya,Y.Hirai,A.Momose,S.Aoki,and K.Suzuki: "X-ray Photoelectron Spectroscopy of Micrometer-Size Surface Area Using Synchrotron Radiation" Japanese Journal of Applied Physics. 29. L1026-L1028 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Yokogawa,Y.Yajima,T.Mizutani,S.Nishimatsu,and K.Suzuki: "Positive Charges and E'Centers Formed by Vacuum Ultraviolet Radiation in SiO_2 Grown on Si" Japanese Journal of Applied Physics. 29. 2265-2268 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Yunogami,T.Mizutani,K.Tsujimoto,and K.Suzuki: "Mechanism of Radiation Damage in SiO_2/Si Induced by VUV Photons" Japanese Journal of Applied Physics. 29. 2269-2272 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Ono,S.Hiraoka,and K.Suzuki: "Anisotropic Etching of Heavily Doped Polysilicon by a Hot Cl_2 Molecular Beam" Materials Research Society Symposium Proceedings. 201. 31-36 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Ninomiya,Y.Hirai,A.Momose,S.Aoki.and K.Suzuki: "Microscopic X-ray Photoelectron Spectroscopy Using a Focused Soft X-ray Beam" Journal of Vacuum Science and Technology A. 9. 1244-1247 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Ninomiya,M.Hasegawa,S.Aoki,and K.Suzuki: "Microscopic X-ray Photoelectron Spectroscopy Using A Wolter Type X-ray Mirror" Japanese Journal of Applied Physics. 30. 2889-2894 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Sato and H.Tagashira: "Electron Swarm Parameters in SiH_4/H_2 Mixtures." "Gaseous Electronics and Its Applications",KTK Scientific Publishers/Tokyo,Kluwer Academic Publishers.144-159 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Sato and H.Tagashira: "A Hybrid Monte Carlo/Fluid Model of RF Plasmas in a SiH_4/H_2 Mixture." IEEE Trans.on Plasma Science.19. 102-112 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Sato and Y.Kawashima: "Time- and Space-Resolved Spectroscopy of Pulsed RF Plasmas in Nitrogen." Annual Report of Faculty of Education,Iwate University.51. (1992)

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  • [Publications] Y.Morishima et al.: "Deexcitation of He(2^1P) in a Collision with a Hydrogen Molecule" Journal of Chemical Physics. 94. 2564-2570 (1991)

    • Description
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  • [Publications] H.Yoshida et al.: "Cross Sections for Deexcitation of He(2^3S,2^1S and 2^1P) by SiH_4 and GeH_4" Chemical Physics Letters. 176. 173-177 (1991)

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      「研究成果報告書概要(和文)」より
  • [Publications] K.Kameta et al.: "Absolute Measurements of Photoabsorption Cross Sections,Photoionization Cross Sections,and Photoionization Quantum Yields of Silane in the 13-40 eV Region" Journal of Chemical Physics. 95. 1456-1460 (1991)

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  • [Publications] M.Ukai et al.: "Ionizing and Nonionizing Decays of Superexcited Acetylene Molecules in the Extreme-Ultraviolet Region" Journal of Chemical Physics. 95. 4142-4153 (1991)

    • Description
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  • [Publications] K.Kameta et al.: "Absolute Measurments of Photoabsorption and Photoionization Cross Sections of Disilane in the 13-40 eV Region" Journal of Chemical Physics. 95. 6188-6189 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Kameta et al.: "Photoabsorption,Photoionization,and Neutral Fragmentation Cross Sections of Superexcited Dimethylether and Ethylmethylether in the Extreme-UV Region" Journal of Chemical Physics.

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Yoshida et al.: "Deexcitation cross sections of Ar( ^3P_2, ^3P_1, ^3P_0,and ^1P_1) by CH_4,SiH_4,and GeH_4" Journal of Chemical Physics.

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Ukai et al.: "Optical Threshold Excitation Functions of Xe 5s,5p Photoionization Satellite Near the 5s^<-1> Cooper Minimum" Physical Review A.

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Ukai et al.: "Deexcitation of Excited Rare Gas Atoms in Metastable and Resonance States as Studied by the Pulse Radiolysis Method" Gaseous Electronics and Its Applications (eds.R.W.Crompton,M.HAYASHI,D.E.BOYD,and T.MAKABE) Kluwer Academic Publ.51-72 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Kouchi et al.: "Angular-Momentum Population of Excited H Atoms Produced by Photodissociation of H_2" Chemical Physics Letters.

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Hatano: "Pulse Radiolysis in the Gas Phase" Pulse Radiolysis (ed.Y.Tabata) CRC Press. 199-228 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Hatano et al.: "Fundamental Molecular Parameters in the Gas Phase" Handbook of Radiation Chemistry (eds.Y.Tabata,Y.Ito,and S.Tagawa) CRC press. 187-292 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Ukai et al.: "Synchrotron Radiation Studies of the Dissociation Dynamics of Some Simple Molecules in the Superexcited States" Radiation Research,Proc.9th Int.Congr,Radiat.Res.,Tronto,July 7-12,1991,(eds.,J.D.Chapman,W.c.Dewey,and G.F.Whitmore),Academic Press. 1. 420 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Ukai et al.: "The Role of Shape Resonance in Ionizing and Non-ionizing Decays of Superexcited Acetylene Molecules in the EUV Region" Synchrotron Radiation and Dynamic Phenomena,Proc.of 48th Int.Meeting of Phys.Chem.,Sept.9-13.1991.Grenoble,(ed.C.Troyanowski) AIP.New York.

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Morishima et al.: "Optical model calculation of the total Penning ionization cross sections for He(2^1P)-Ar,Kr,and Xe" Journal of Chemical Physics.

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 籏野 嘉彦: "放射光の原理と特徴" 表面科学の基礎と応用、日本表面科学会編、NTS、. 532-535 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 籏野 嘉彦: "分子の光学的振動子強度とその測定" シンクロトロン放射光、学会出版センタ-. 9-28 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 籏野 嘉彦: "パルス励起による化学反応ー放射光時間構造とその利用" シンクロトロン放射光、学会出版センタ-. 119-126 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Makabe and F.Tochikubo N.Nishimura: "Influence of negative ions in RF glow discharges in SiH_4 at 13,56 MHz." Phys.Rev.A. 42. 3674-3677 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] F.Tochikubo,A.Suzuki,S.Kakuta,Y.Terazono and T.Makabe: "Study of the structure in RF glow discharges in SiH_4 by spatiotemporal optical emission spectroscopy." J.Appl.Phys.68. 5532-5539 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I.Yamanashi,N.Goto and T.Makabe: "Periodic behavior of electron swarm parameters in Ar in an RF field." Trans.IEE of Japan. 111-A. 168-174 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] F.Tochikubo and T.Makabe: "Absolute measurement of the excitation rate and density of the excited species in an RF discharge from the optical emission spectroscopy." Meas.Sci.Technol.2. 1133-1137 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Makabe and N.Nakano,Y.Yamaguchi: "Modeling and diagnostics of structure in RF glow discharges in Ar at 13.56 MHz." Phys.Rev.A. 45. (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] F.Tochikubo,T.Makabe: "Study of the structure in RF glow discharges in CH_4 and H_2 by spatiotemporal optical emission spectroscopy." J.Appl.Phys.71. (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 倉知 正,中村 義春: "Electron Swarm Parameters in SiH4ーRare Gas Mixtures and Collision Cross Sections for Monosilane Molecules." IEEE Trans.on Plasma Science. 19. 262-269 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 中村 義春: "Recent Electron Swarm Studies Using Rare Gas/Molecular Gas Mixtures." In "Gaseous Electronics and Its Applications",Eds.,R.W.Crompton et.al.,KTK Scientific Publications,Tokyo. 178-200 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Sakai and Y.Ichikawa: "Process Technology for a-Si/a-Si Double Stacked Tandem Solar Cells with Stabilized 10% Efficiency" Journal of Non-Crystalline Solids. 137&138. 1155-1160 (1991)

    • Description
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  • [Publications] Y.Inoue,K.Uchida,H.Hori and T.Sakurai: "Collision Broadening and Shift of D_2 Resonance Line Perturbed by Every Race Gas" J.Phys.Soc.Japan. 59. 516-521 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Sakurai and H.Hori: "Measurement of the Mobility of Excited State Ions in a Discharge Plasma by using a Tunable Diode Laser" Gaseous Electronics and its Applications,R.W.Crompton etal ed.(Kluwer Academic Publishers). 201-212 (1991)

    • Description
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  • [Publications] 桜井 彪,辰巳 扶二子,堀 裕和,井上 行夫: "エキシマレ-ザ-用容量移行型パルス放電の絶縁破壊" レ-ザ-研究. 19. 1145-1152 (1991)

    • Description
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  • [Publications] H.Hori,Y.Ono,A.Watanabe,N.Nakamura,Y.Inoue,and T.Sakurai: "State-specific Mobility of Excited Calcium and Cadmium Ions in a Discharge Plasma Measured by a Tunable Diode Laser" Pyhs.Rev.A. (1992)

    • Description
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  • [Publications] S.Nakajima,Y.Seki and N.Ikuta:"Boltzmann Equation analysis of electrons in weakly ionized SiH_4 gas under RF electric field." Bulletin of Fuculty of Engineering,The university of Tokushima.27. 49-63 (1990)

    • Description
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  • [Publications] S.Nakajima,T.Okamoto and N.Ikuta:"Boltzmann equation analysis of position and time dependent velocity distribution of an electron swarm." Trans.IEE Jpn,. 111-A. 139-146 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Ikuta,S.Nakajima,Y.Seki and T.Okamoto: "Boltzmann equation analysis of position and time dependent velocity distribution of electrons." Gaseous Electronics and Its Applications.Edited by R.W.Crompton,M.Hayashi,D.E.Boyd and T.Makabe,KTK Selentifie publishers/Tokyo,Kluwer Academle Publishers. 102-126 (1991)

    • Description
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  • [Publications] 伊藤 晴雄,生田 信皓: "N_2ガス中における電離電流(V.正特性タウンゼント放電の形成機構)" 電気学会論文誌. 111ーA. 498-499 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 伊藤 晴雄,山梨 浩樹,生田 信皓: "光電子源としての金蒸着膜陰極の膜厚に関する検討" 電気学会論文誌. 111ーA. 498-499 (1991)

    • Description
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  • [Publications] K.Kondo and N.Ikuta: "Spatio-temporal gas temperature rise in repetitive positive streamer corona in air." Journal of Physical Society of Japan. Vol.59. 3203-3216 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Kondo and H.Tagashira: "Evolution equation and transport coefficients defined by arrival time spectra of swarms." Journal of Physics D:Applied Physics. Vol.23. 1175-1183 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Date,K.Kondo,H.Tagashira: "Transport coefficients defined by arrival time spectra of electron swarms in Krypton gas." Journal of Physics D:Applied Physics. Vol.23. 1384-1389 (1990)

    • Description
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  • [Publications] K.Kondo and H.Tagashira: "The two complementary expressions for the evolution of electron and ion swarms in the gas in an electric field" Second Japan-Australia Workshop on Gaseous Electronics and its Application. 101-104 (1990)

    • Description
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  • [Publications] M.Hayashi (editor): "Second Australia-Japan Workshop on Gaseous Electronics and Its Applications" 119 (1990)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] R.W.Crompton,M.Hayashi,D.E.Boyd and T.Makabe(editor): "Gaseous Electronics and Its Applications" KTK Scientific Publishers, 364 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 橘 邦英(分担執筆)難波 進 編著: "マイクロプロセスハンドブック" 工業調査会, 809 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S. Matsumoto, K. Shiozawa, Y. Ishitani, A. Hirabayashi, and T. Fujimoto: "Magnetic field dependence of the collisional disalignment of neon 2p^53p-configuration atoms" Physical Review A. 44. 4316-4320 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K. Tachibana, T. Mukai and H. Harima: "Measurement of absolute densities and spatial distributions of Si and SiH in a RF-discharge silane plasma for the chemical vapor deposition of a-Si : H films" Japanese Journal of Applied Physics. 30. L1208-L1211 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K. Ninomiya, Y. Hirai, A. Momose, S. Aoki, and K. Suzuki: "Microscopic X-ray photoelectron spectroscopy using a focused soft X-ray beam" Journal of Vacuum Science and Technology. A9. 1244-1247 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N. Sato and H. Tagashira: "A hybrid Monte Carlo/fluid model of RF plasmas in a SiH_4/H_2 mixture" IEEE Trans. on Plasma Science. 19. 102-112 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H. Yoshida, Y. Morishima, M. Ukai, K. Shinsaka, N. Kouchi and Y. Hatano: "Cross sections for deexcitation of He(2^3S, 2^1S and 2^1P) by SiH_4 and GeH_4" Chemical Physics Letters. 176(2). 173-177 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I. Yamanashi, N. Goto and T. Makabe: "Periodic behavior of electron swarm parameters in Ar in an RF field" Trans. IEE of Japan. 111-A. 168-174 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M. Kurachi and Y. Nakamura: "Electron swarm parameters in SiH_4-rare gas mixtures and collision cross sections for monosilane molecules" IEEE Trans. on Plasma Science. 19. 262-269 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H. Sakai and Y. Ichikawa: "Process technology for a-Si/a-Si double stacked tandem solar cells with stabilized 10 % efficiency" Journal of Non-Crystalline Solids. 137&138. 1155-1160 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S. Nakajima, Y. Seki and N. Ikuta: "Boltzmann equation analysis of position and time dependent velocity distribution of an electron swarm" Trans. IEE Japan. 111-A. 139-146 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K. Kondo and H. Tagashira: "Evolution equation and transport coefficients defined by arrival time spectra of swarms" Journal of Physics D : Applied Physics. 23. 1175-1183 (1990)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1993-03-16  

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