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1992 Fiscal Year Final Research Report Summary

Effects of liquid organic compounds on health used in semiconductor manufacturing processes

Research Project

Project/Area Number 02404035
Research Category

Grant-in-Aid for General Scientific Research (A)

Allocation TypeSingle-year Grants
Research Field Hygiene
Research InstitutionKeio University

Principal Investigator

SAKURAI Haruhiko  Keio University School of Medicine Department of Preventive Medicine and Public Health, Professor, 医学部, 教授 (70051357)

Co-Investigator(Kenkyū-buntansha) SAKAI Tohru  Keio University School of Medicine Department of Preventive Medicine and Public, 医学部, 助手 (50153846)
OMAE Kazuyuki  Keio University School of Medicine Department of Preventive Medicine and Public, 医学部, 助教授 (60118924)
Project Period (FY) 1990 – 1992
KeywordsSemiconductor / Toxicity / Animal / Liquid organic compounds / Tetraethoxysilane
Research Abstract

Because amount of consumption was the largest and information of toxicity was poor, toxicity of tetraethoxysilane [TEOS,Si(OC_2H_5)_4] on ICR male mice was firstly investigated.
TEOS intraperitoneal administration study showed that LD_<50> was around 500mg/kg, and the target organ was the kidney characterized by developing acute tubular necrosis (ATN) and tubulointerstitial nephritis (TIN).
Acute inhalation study (1000 ppm TEOS for 1, 2, 4 or 8 hours) indicated that LD_<50> (4 hours) was greater than 1000 ppm and that the kidney and nasal mucosa were the target organs. Subacute inhalation studies (200, 100, or 50 ppm TEOS for 6 hours/day, 5 day/week, for 2 or 4 weeks) indicated that no-effect level of TEOS inhalation on the kidney was 50 ppm and that on the nasal cavity was less than 50 ppm. From these results, exposure level should be strictly controlled below 10 ppm, the current recommended exposure limit, and that renal tubular function should be assessed and monitored long-term TEOS-exposed workers.
Time course study of TEOS effect on the kidney suggested that the kidney developed renal tubular injury until 12 hours after TEOS i.p., started to recover 3 days after TEOS i.p., and developed TIN by 2 weeks.

  • Research Products

    (12 results)

All Other

All Publications (12 results)

  • [Publications] 酒井 徹、大前 和幸、桜井 治彦、等。: "Tetraethoxysilane(TEOS)腹腔内科与後のマウス臓器の病理組織学的検討。" 産業医学. 33. 256-257 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 大前 和幸: "半導体特殊材料の毒性評価" 慶応医学. 68. 729-735 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Omae K.: "Toxicity of silicon compounds used in semiconductor manufacturing processes." Proceeding of 15th workshop on ULSI ultra clean technology. 101-110 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Omae K,Sakurai H,et al.: "Acute renal injury by tetraethyl orthosilicate in mice:ultrastructure,histochemistry and X-ray microanalysis." J Submicrosc Cytol Pathol. 24. 257-268 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Omae K,Sakai T,Sakurai H,et al.: "Acute and subacute inhalation toxicity of silane 1,000ppm in mice." Arch Texicol. 66. 750-753 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 大前 和幸、等。: "特殊材料ガスの毒性" 安全工学(J Jap Society Safety Engineering). 31. 336-342 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Nakashima H, Sadai T, Yamazaki K, Omae K,Sakurai H: "A histopathological study of tetraethoxysilane (TEOS) intra-peritoneally administrated to ICR mice." Jap J Ind Health. 33. 256-257 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Omae K: "Evaluation of toxicity of fine chemicals used in semiconductor manufacturing industries" Keio Igaku. 68. 729-735 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Omae K: "Toxicity of silicon compounds used in semiconductor manufacturing processes" Proceedings of 15th workshop on ULSI ultra clean technology. 101-110 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Yamazaki K,Nakashima H,Eyden BP, Omae K: "Sakurai H, Acute renal injury by tetraethyl orthosilicate in mice: ultrastructure, histochemistry, and microanalysis." J Submicrosc Cytol Pathol. 24. 257-268 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Omae K,Sakai T,Sakurai H, et al: "Acute and subacute inhalation toxicity of silane 1000 ppm in mice" Arch Toxicol. 66. 750-753 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Omae K, Ishizuka C, Nakashima H, Takabayashi T: "Toxicity of specialty gases for IC manufacturing." J Jap Soc Safety Engineering. 31. 336-342 (1992)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1994-03-24  

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