1991 Fiscal Year Final Research Report Summary
Developmental research of an analyser for dynamical surface reaction processes having high-sensitive hydrogen detection
| Project/Area Number |
02555005
|
|---|
| Research Category |
Grant-in-Aid for Developmental Scientific Research (B)
|
| Allocation Type | Single-year Grants |
|---|
| Research Field |
Applied materials
|
|---|
| Research Institution | Osaka University |
|---|
Principal Investigator |
UEDA Kazuyuki Department of Applied Physics, Faculty of Engineering, Osaka Univ. Associate professor., 工学部, 助教授 (60029212)
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
SHIMIZU Ryuichi Department of Applied Physics, Faculty of Engineering, Osaka Univ. Professor., 工学部, 教授 (40029046)
|
|---|
| Project Period (FY) |
1990 – 1991
|
| Keywords | Electron Stimulated Desorption / Time-of-flight / Adsorption of Hydrogen / TOF-ESD / Hydrogen Detection / Hydrogen / Hydrogen Termination / ESD |
|---|
| Research Abstract |
A study of interaction between hydrogen and solid surfaces becomes important problem in surface science concerning with constructions of nano-scale devices in VLSI technology. In order to passivate surface bonds for oxidation and to get a hydrogen mediated epitaxy, a surface estabilization and bond termination by atomic hydrogen adsorption are recently used. However, effective surface analyser to detect hydrogen is not commercially available. In the present, study it was a purpose to develop a new surface tool for dynamical analysis of hydrogen. Electron stimulated desorption (ESD) method using a time of flight technique makes a possible to detect hydrogen combining with conventional surface analyzers. We have succeeded to develop a time-of-flight type ESD apparatus adopting, microchannel plates which has allowed not only hydrogen detection with high sensitivity but also surface structure and surface composition analysis in the modes of LEED-AES. The detection limit of this apparatus for adsorbed hydrogen is about 0.01 monolayer.
|
