1993 Fiscal Year Annual Research Report

フォトファブリケーションによるマイクロアクチュエータ

Research Project

Project/Area Number	03102001
Research Institution	Tohoku University
Principal Investigator	江刺正喜東北大学, 工学部, 教授 (20108468)
Co-Investigator(Kenkyū-buntansha)	南和幸東北大学, 工学部, 助手 (00229759) 庄子習一東北大学, 工学部, 助教授 (00171017) 内山勝東北大学, 工学部, 教授 (30125504)
Keywords	マイクロアクチュエータ / フォトファブリケーション / マイクロマシーニング / 静電アクチュエータ / 3次元立体加工 / ビーム加工技術 / 協調制御
Research Abstract	器用で優しい機械システムのため生物の筋肉に匹敵するような高性能マイクロアクチュエータの開発を目指し研究を行っている.本年度は以下の項目について研究を進めた. 1.立体微細加工技術のマイクロアクチュエータへの応用多目的露光装置やECR装置、低温RIEなどサブミクロン加工装置を用いた立体加工技術を系統的に研究し,細くて深い高アスペクト比構造を実現する技術の理論的裏付けを得た.また,エキシマレーザを用いた非平面フォトファブリケーション技術を研究し,マイクロアクチュエータの製作に必要な基礎技術を確立した. 2.分布型マイクロアクチュエータの高性能化前年度に開発したメッキ技術を応用した製作方法を発展させてECR装置や低温RIE装置による高アスペクト比のポリイミドパターンを基にして大きな力の得られる厚さの厚い分布型マイクロアクチュエータの製作方法を確立した. 3.分布型マイクロアクチュエータの応用分布型マイクロアクチュエータを多数組み合わせて,X-Yと回転を制御できるマイクロ微動ステージの試作を行い問題点を明かにした. 4.形状記憶合金(SMA)マイクロアクチュエータ静電型に比べ大きな変位が得られるSMAアクチュエータのマイクロ化を研究し,フォトファブリケーションの応用を検討した.これを用いた多数のアクチュエータが協調動作する超小形能動カテーテルの試作を進めている. 5.多数のマイクロアクチュエータの協調制御マイクロロボットで必要とされる多数のマイクロアクチュエータの協調制御の基礎技術を通常サイズのアクチュエータで構成されるロボットを用いて研究した.

Research Products

(27 results)

All Other

All Publications (27 results)

[Publications] K.Minami: "YAG Laser-Assisted Etching of Silicon for Fabricating Sensors and Actuators" Journal of Micromechanics and Microengineering. 3. 81-86 (1993)
[Publications] M.Yamaguchi: "Control of Distributed Electrostatic Microstructures" Journal of Micromechanics and Microengineering. 3. 90-95 (1993)
[Publications] K.Minami: "Fabrication of Distributed Electrostatic Micro Actuator" IEEE Journal of Micromechanical Systems. 2. 121-127 (1993)
[Publications] Y.Matsumoto: "Integrated Silicon Capacitive Accelerometer with PLL Servo Technique" Sensors and Actuators A. 39. 209-217 (1993)
[Publications] T.Matsubara: "Stepping Electrostatic Microactuator" Digest of Technical Papers Transducers'93,Yokohama. 50-53 (1993)
[Publications] H.Henmi: "Vacuum Packaging for Microsensors by Glass-Silicon Anodic Bonding" Digest of Technical Papers Transducers'93,Yokohama. 584-587 (1993)
[Publications] C.Cabuz: "Highly Sensitive Resonant Infrared Sensor" Digest of Technical Papers Transducers'93,Yokohama. 694-697 (1993)
[Publications] T.Nishimoto: "Buried Piezoresistive Sensors by means of MeV Ion Implantation" Digest of Technical Papers Transducers'93,Yokohama. 796-799 (1993)
[Publications] M.Yoshida: "Capacitive Accelerometers without Fracture Risk during Fabrication Processes" Digest of Technical Papers Transducers'93,Yokohama. 814-817 (1993)
[Publications] Y.Matsumoto: "Low Drift Integrated Capacitive Accelerometer with PLL Servo Technique" Digest of Technical Papers Transducers'93,Yokohama. 826-829 (1993)
[Publications] K.Minami: "Distributed Electrostatic Micro Actuator(DEMA)" Abstracts of Late News Papers Transducers'93,Yokohama. 2-3 (1993)
[Publications] S.Maeda: "Three-Dimentional Microfabrication for Small Catheter" Abstracts of Late News Papers Transducers'93,Yokohama. 16-17 (1993)
[Publications] M.Esashi: "Micromachining for Packaged Sensors" Digest of Technical Papers Transducers'93,Yokohama. 260-265 (1993)
[Publications] K.Takashima: "Laser Projection CVD Using Low Temperature Condensation Method" Abstracts of 1st International Conf.on Photo-Excited Processes and Applications,Sendai. 70 (1993)
[Publications] M.Esashi: "Laser Processes for Micro Electromechanical Systems" Abstracts of Workshop on Photo-Excited Processes in Engineering,Sendai. 114 (1993)
[Publications] 江刺正喜: "マイクロマシンのための三次元微細加工技術" 応用物理. 63. 45-48 (1994)
[Publications] S.Maeda: "KrF Excimer Laser Induced Selective Non-Planer Metallization" Proc. of the Micro Electro Mechanical Systems'94,Oiso. 75-80 (1994)
[Publications] M.Esashi: "Silicon micromachining and micromachines" Wear. 168. 181-187 (1993)
[Publications] K.Minami: "Optical in-situ Monitoring of Silicon Diaphragm Thickness During Wet Etching" Proc. of the Micro Electro Mechanical Systems'94,Oiso. 217-222 (1994)
[Publications] C.Cabuz: "Fine Frequency Tuning in Resonant Sensors" Proc. of the Micro Electro Mechanical Systems'94,Oiso. 245-250 (1994)
[Publications] K.Jono: "Electrostatic Servo System for Multi-axis Accelerometers" Proc. of the Micro Electro Mechanical Systems'94,Oiso. 251-256 (1994)
[Publications] 内山勝: "接触状態のシミュレーション" 日本ロボット学会誌. 第11巻第2号. 201-205 (1993)
[Publications] M.Uchiyama: "Symmetric kinematic formulation and non-master/slave coordinated control of two-arm robots,ADVANCED ROBOTICS" The International Journal of the Robotics Society of Japan. 第7巻第4号. 361-383 (1993)
[Publications] A.Konno: "Configuration-Dependent Controllability of Flexible Manipulators" Preprints of the Third International Symposium on Experimental Robotics,Kyoto,Japan. 276-282 (1993)
[Publications] Simeon P.Patarinski: "Position/Orientation Decoupled Parallel Manipulators" Proceedings of '93 International Conference on Advanced Robotics,Tokyo,Japan. 153-158 (1993)
[Publications] L.Cellier: "Reflex Actions: Application to the Collision Avoidance Problem for a Two-Arm Robot" Proceedings of '93 International Conference on Advanced Robotics,Tokyo,Japan. 611-616 (1993)
[Publications] 内山勝: "力覚に基づいたロボットの行動" 日本ロボット学会誌. 第11巻第8号. 1164-1170 (1993)

1993 Fiscal Year Annual Research Report

フォトファブリケーションによるマイクロアクチュエータ

Principal Investigator

江刺 正喜 東北大学, 工学部, 教授 (20108468)

Research Products

[Publications] K.Minami: "YAG Laser-Assisted Etching of Silicon for Fabricating Sensors and Actuators" Journal of Micromechanics and Microengineering. 3. 81-86 (1993)

[Publications] M.Yamaguchi: "Control of Distributed Electrostatic Microstructures" Journal of Micromechanics and Microengineering. 3. 90-95 (1993)

[Publications] K.Minami: "Fabrication of Distributed Electrostatic Micro Actuator" IEEE Journal of Micromechanical Systems. 2. 121-127 (1993)

[Publications] Y.Matsumoto: "Integrated Silicon Capacitive Accelerometer with PLL Servo Technique" Sensors and Actuators A. 39. 209-217 (1993)

[Publications] T.Matsubara: "Stepping Electrostatic Microactuator" Digest of Technical Papers Transducers'93,Yokohama. 50-53 (1993)

[Publications] H.Henmi: "Vacuum Packaging for Microsensors by Glass-Silicon Anodic Bonding" Digest of Technical Papers Transducers'93,Yokohama. 584-587 (1993)

[Publications] C.Cabuz: "Highly Sensitive Resonant Infrared Sensor" Digest of Technical Papers Transducers'93,Yokohama. 694-697 (1993)

[Publications] T.Nishimoto: "Buried Piezoresistive Sensors by means of MeV Ion Implantation" Digest of Technical Papers Transducers'93,Yokohama. 796-799 (1993)

[Publications] M.Yoshida: "Capacitive Accelerometers without Fracture Risk during Fabrication Processes" Digest of Technical Papers Transducers'93,Yokohama. 814-817 (1993)

[Publications] Y.Matsumoto: "Low Drift Integrated Capacitive Accelerometer with PLL Servo Technique" Digest of Technical Papers Transducers'93,Yokohama. 826-829 (1993)

[Publications] K.Minami: "Distributed Electrostatic Micro Actuator(DEMA)" Abstracts of Late News Papers Transducers'93,Yokohama. 2-3 (1993)

[Publications] S.Maeda: "Three-Dimentional Microfabrication for Small Catheter" Abstracts of Late News Papers Transducers'93,Yokohama. 16-17 (1993)

[Publications] M.Esashi: "Micromachining for Packaged Sensors" Digest of Technical Papers Transducers'93,Yokohama. 260-265 (1993)

[Publications] K.Takashima: "Laser Projection CVD Using Low Temperature Condensation Method" Abstracts of 1st International Conf.on Photo-Excited Processes and Applications,Sendai. 70 (1993)

[Publications] M.Esashi: "Laser Processes for Micro Electromechanical Systems" Abstracts of Workshop on Photo-Excited Processes in Engineering,Sendai. 114 (1993)

[Publications] 江刺正喜: "マイクロマシンのための三次元微細加工技術" 応用物理. 63. 45-48 (1994)

[Publications] S.Maeda: "KrF Excimer Laser Induced Selective Non-Planer Metallization" Proc. of the Micro Electro Mechanical Systems'94,Oiso. 75-80 (1994)

[Publications] M.Esashi: "Silicon micromachining and micromachines" Wear. 168. 181-187 (1993)

[Publications] K.Minami: "Optical in-situ Monitoring of Silicon Diaphragm Thickness During Wet Etching" Proc. of the Micro Electro Mechanical Systems'94,Oiso. 217-222 (1994)

[Publications] C.Cabuz: "Fine Frequency Tuning in Resonant Sensors" Proc. of the Micro Electro Mechanical Systems'94,Oiso. 245-250 (1994)

[Publications] K.Jono: "Electrostatic Servo System for Multi-axis Accelerometers" Proc. of the Micro Electro Mechanical Systems'94,Oiso. 251-256 (1994)

[Publications] 内山勝: "接触状態のシミュレーション" 日本ロボット学会誌. 第11巻第2号. 201-205 (1993)

[Publications] M.Uchiyama: "Symmetric kinematic formulation and non-master/slave coordinated control of two-arm robots,ADVANCED ROBOTICS" The International Journal of the Robotics Society of Japan. 第7巻第4号. 361-383 (1993)

[Publications] A.Konno: "Configuration-Dependent Controllability of Flexible Manipulators" Preprints of the Third International Symposium on Experimental Robotics,Kyoto,Japan. 276-282 (1993)

[Publications] Simeon P.Patarinski: "Position/Orientation Decoupled Parallel Manipulators" Proceedings of '93 International Conference on Advanced Robotics,Tokyo,Japan. 153-158 (1993)

[Publications] L.Cellier: "Reflex Actions: Application to the Collision Avoidance Problem for a Two-Arm Robot" Proceedings of '93 International Conference on Advanced Robotics,Tokyo,Japan. 611-616 (1993)

[Publications] 内山勝: "力覚に基づいたロボットの行動" 日本ロボット学会誌. 第11巻第8号. 1164-1170 (1993)

江刺正喜東北大学, 工学部, 教授 (20108468)