1992 Fiscal Year Annual Research Report

フェリ磁性体/強誘電体エピタキシャル多層膜の作製と光導波デバイスへの応用

Research Project

Project/Area Number	03452151
Research Institution	Tokyo Institute of Technology
Principal Investigator	直江正彦東京工業大学, 工学部, 教授 (40016465)
Co-Investigator(Kenkyū-buntansha)	松下伸広東京工業大学, 工学部, 助手 (90229469) 中川茂樹東京工業大学, 工学部, 助手 (60180246)
Keywords	フェリ磁性体薄膜 / 強誘電体薄膜 / 多層膜 / エピタキシャル成長 / 対向ターゲット式スパッタ法
Research Abstract	人工的にフェリ磁性体と強誘電体を数nm〜数μmの一定周期で層状に積み重ねた構造を持つ多層膜は、フェリ磁性と強誘電性を兼備した材料となる一方で、層界面での量子効果や異種金属イオン間の相互作用による偏光角の飛躍的増大も期待できる。本研究では二種の酸化物の極薄膜を組成ずれなしに交互堆積して層境界の乱れのない多層膜を作製できるスパッタ装置を開発し、異種酸化物多層膜作製技術を確立することを目的とした。異種酸化物多層膜スパッタ装置については、当初に計画した通り、膜形成用真空槽に新しく複合酸化物極薄膜堆積用に開発したスパッタ源を二対取り付けて、安定に同時グロー放電が維持できるようにし、両方の酸化物極薄層が交互に堆積できることを確認した。この装置で本研究の多層膜の構成酸化物であるBaFe_<12>3_<19>(Bam)一対をターゲットとしてスパッタ膜を熱酸化Siウェファー上に作製したところ、下地にアモルファス構造の酸化物を用いてもBaM結晶子がc軸配向し、良好な結晶成長が行なえることを確認した。この結晶子のc軸配向を完全にして垂直磁気異方性の大幅増大をはかるための下地層としてZnO薄膜やCoFe_20_4(CoS)の薄膜の作製を行った。BaM、CosそしてZnO各層作製時の動作ガス圧力、酸素分圧、基板温度等を変化させた種々の多層膜試料を作り、結晶構造などの微細構造と磁気特性を調べた。その結果、良好なBaM薄膜およびCoS薄膜形成のための技術を確立することができた。従来のスパッタ技術では複合酸化物ターゲットを使用した場合、組成ずれが起こり易く、また層境界が乱れるので極薄層化が難しいが、本研究で開発した方法では異なる結晶系を有する酸化物薄膜でも数100A^^<>の極薄膜領域から結晶成長が良好に行われることが分かった。このことより、BaMとBaTiO_3の異種酸化物薄膜の多層膜においてもそれぞれの晶成長を保ちつつ積層化できる目処がついたとみなしている。

Research Products

(15 results)

All Other

All Publications (15 results)

[Publications] (Shigeki NAKAGAWA) Takehiko HAMAGUCHI Masahiko NAOE: "Preparation of Soft Magnetic Fe-N Films by lon Beam Deposition Method with Strict Control of Plasma Potential" IEEE Trans.on Magn.28[5]. 2946-2948 (1992)
[Publications] (Toyoaki HIRATA) Masahiko Naoe: "Large Kerr Rotation Angle and Magnetic Characteristics of Co-Cr/AlMultilayers Prepared by Plasma-Free Sputtering" IEEE Trans.on Magn.28[5]. 2964-2966 (1992)
[Publications] (Nobuhiro MATSUSHITA) Kenji NOMA Shigeki NAKAGAWA Masahiko NAOE: "Preparation of Co Ferrite Thin Films with Large Perpendicular and ln-plane Coercivities by Facing Targets Sputtering" IEEE Trans.on Magn.28[5]. 3108-3110 (1992)
[Publications] (Shigeki NAKAGAWA) Yoichi FURUTO Masahiko NAOE: "Ta and W Addition to Co_<17> Thin Films Deposited on Co_<79>Cr_<21> Underlayer" J.of Magn.Magn.Mater.104〜107. 1801-1802 (1992)
[Publications] (Kibong SONG) Masahiko NAOE: "Magneto-optical Characteristics of Tb-Fe-Co/Al Multilayered films on layer thickness" J.of Magn.Magn.Mater.104-107. 1855-1856 (1992)
[Publications] (Shigeki NAKAGAWA) Kenji HASEGAWA Masahiko NAOE: "Magnerism and Structure of Iron Nitride Thin Films Deposited by Facing Targets Type of Ion Source" J.of Magn.Magn.Mater.104-107. 1899-1900 (1992)
[Publications] (Shigeki NAKAGAWA) Yoichi FURUTO Masahiko NAOE: "Structural and Magnetic Characteristics of Co-Cr Films Sputtered in Mixture of Ar and CH_4 Mixture Gas" J.of Magn.Magn.Mater.104-107. 2047-2048 (1992)
[Publications] (Shigeki NAKAGAWA) Takehiko HAMAGUCHI Masahiko NAOE: "High Permeabillity of Iron-nitride Films Prepared by Ion Beam Deposition using NH_3" J.of Magn.Magn.Mater.112. 392-394 (1992)
[Publications] (Toyoaki HIRATA) Masahiko NAOE: "Improvement in Soft Magnetism of Sendust Sputtered Films for High Performance MIG head" J.of Magn.Magn.Mater.112. 432-434 (1992)
[Publications] (Masahiko NAOE) Kazuyoshi KUBOTA Shigeki NAKAGAWA: "Preparation of Soft Magnetic Films by Mechanical Alloying of Fe/Al/Si Multilayers under Ar ion Bombardment" J.of Magn.Magn.Mater.112. 439-442 (1992)
[Publications] (Setsuo AKIYAMA) Shigeki NAKAGAWA Masahiko NAOE: "Small d-spacing and Internal Stress of Co-Cr Films Deposited by Kr Ion Sputtering" Mat.Res.Soc.Symp.Proc.231. 335-338 (1992)
[Publications] (Kibong SONG) Hiroshi ITO Masahiko NAOE: "Magneto-optical Enhancement of TbFeCo/Al Films at Short Wavelength" Mat.Res.Soc.Symp.Proc.231. 491-495 (1992)
[Publications] (Toyoaki HIRATA) Masahiko NAOE: "Tribological Properties of Carbon Thin Films Prepared by Plasma-Free Sputtering Method" Mat.Res.Soc.Symp.Proc.239. 635-640 (1992)
[Publications] (Kibong SONG) Masahiko NAOE: "Structual and Magnetic Characteristics of Thin Films of Tb-Co Alloy Prepared by Plasama-Free Sputtering" Proc.of 7th Int.Symp.on Mag.Anisotropy & Coercivity in RE-TM Alloys. (1992)
[Publications] (直江正彦) 中川茂樹: "磁性薄膜堆積におけるスパッタの物理" 日本応用磁気学会誌. 16巻No.S1. 91-96 (1992)

1992 Fiscal Year Annual Research Report

フェリ磁性体/強誘電体エピタキシャル多層膜の作製と光導波デバイスへの応用

Principal Investigator

直江 正彦 東京工業大学, 工学部, 教授 (40016465)

Research Products

[Publications] (Shigeki NAKAGAWA) Takehiko HAMAGUCHI Masahiko NAOE: "Preparation of Soft Magnetic Fe-N Films by lon Beam Deposition Method with Strict Control of Plasma Potential" IEEE Trans.on Magn.28[5]. 2946-2948 (1992)

[Publications] (Toyoaki HIRATA) Masahiko Naoe: "Large Kerr Rotation Angle and Magnetic Characteristics of Co-Cr/AlMultilayers Prepared by Plasma-Free Sputtering" IEEE Trans.on Magn.28[5]. 2964-2966 (1992)

[Publications] (Nobuhiro MATSUSHITA) Kenji NOMA Shigeki NAKAGAWA Masahiko NAOE: "Preparation of Co Ferrite Thin Films with Large Perpendicular and ln-plane Coercivities by Facing Targets Sputtering" IEEE Trans.on Magn.28[5]. 3108-3110 (1992)

[Publications] (Shigeki NAKAGAWA) Yoichi FURUTO Masahiko NAOE: "Ta and W Addition to Co_<17> Thin Films Deposited on Co_<79>Cr_<21> Underlayer" J.of Magn.Magn.Mater.104〜107. 1801-1802 (1992)

[Publications] (Kibong SONG) Masahiko NAOE: "Magneto-optical Characteristics of Tb-Fe-Co/Al Multilayered films on layer thickness" J.of Magn.Magn.Mater.104-107. 1855-1856 (1992)

[Publications] (Shigeki NAKAGAWA) Kenji HASEGAWA Masahiko NAOE: "Magnerism and Structure of Iron Nitride Thin Films Deposited by Facing Targets Type of Ion Source" J.of Magn.Magn.Mater.104-107. 1899-1900 (1992)

[Publications] (Shigeki NAKAGAWA) Yoichi FURUTO Masahiko NAOE: "Structural and Magnetic Characteristics of Co-Cr Films Sputtered in Mixture of Ar and CH_4 Mixture Gas" J.of Magn.Magn.Mater.104-107. 2047-2048 (1992)

[Publications] (Shigeki NAKAGAWA) Takehiko HAMAGUCHI Masahiko NAOE: "High Permeabillity of Iron-nitride Films Prepared by Ion Beam Deposition using NH_3" J.of Magn.Magn.Mater.112. 392-394 (1992)

[Publications] (Toyoaki HIRATA) Masahiko NAOE: "Improvement in Soft Magnetism of Sendust Sputtered Films for High Performance MIG head" J.of Magn.Magn.Mater.112. 432-434 (1992)

[Publications] (Masahiko NAOE) Kazuyoshi KUBOTA Shigeki NAKAGAWA: "Preparation of Soft Magnetic Films by Mechanical Alloying of Fe/Al/Si Multilayers under Ar ion Bombardment" J.of Magn.Magn.Mater.112. 439-442 (1992)

[Publications] (Setsuo AKIYAMA) Shigeki NAKAGAWA Masahiko NAOE: "Small d-spacing and Internal Stress of Co-Cr Films Deposited by Kr Ion Sputtering" Mat.Res.Soc.Symp.Proc.231. 335-338 (1992)

[Publications] (Kibong SONG) Hiroshi ITO Masahiko NAOE: "Magneto-optical Enhancement of TbFeCo/Al Films at Short Wavelength" Mat.Res.Soc.Symp.Proc.231. 491-495 (1992)

[Publications] (Toyoaki HIRATA) Masahiko NAOE: "Tribological Properties of Carbon Thin Films Prepared by Plasma-Free Sputtering Method" Mat.Res.Soc.Symp.Proc.239. 635-640 (1992)

[Publications] (Kibong SONG) Masahiko NAOE: "Structual and Magnetic Characteristics of Thin Films of Tb-Co Alloy Prepared by Plasama-Free Sputtering" Proc.of 7th Int.Symp.on Mag.Anisotropy & Coercivity in RE-TM Alloys. (1992)

[Publications] (直江 正彦) 中川 茂樹: "磁性薄膜堆積におけるスパッタの物理" 日本応用磁気学会誌. 16巻No.S1. 91-96 (1992)

直江正彦東京工業大学, 工学部, 教授 (40016465)

[Publications] (直江正彦) 中川茂樹: "磁性薄膜堆積におけるスパッタの物理" 日本応用磁気学会誌. 16巻No.S1. 91-96 (1992)