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1992 Fiscal Year Final Research Report Summary

Preparation of Epitaxially Growned Multilays Composed of Ferrimagnetic Layers and Ferrodielectric Ones and Their Application for Optical Wave Guide Devices

Research Project

Project/Area Number 03452151
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 電子材料工学
Research InstitutionTokyo Institute of Technology

Principal Investigator

NAOE Masahiko  Fac.of Eng. Tokyo Institute of Technology,Professor, 工学部, 教授 (40016465)

Co-Investigator(Kenkyū-buntansha) MATSUSHITA Nobuhiro  Fac. of Eng. Tokyo Institute of Technology, Research Associate, 工学部, 助手 (90229469)
NAKAGAWA Shigeki  Fac.of Eng. Tokyo Institute of Technology, Research Associate, 工学部, 助手 (60180246)
Project Period (FY) 1991 – 1992
KeywordsFerrimagnetic Thin Film / Ferrodielectric Thin Films / Multilayered Films / Epitaxial Growth / Facing Targets Sputtering Method
Research Abstract

Artificial multilayers composed of ferrimagnetic layers and ferrodielectric ones with periodic structure possesses any characteristics of each layers and moreover, some novel effects, such as momentum one at interfaces and remarkable improvement of kerr and Faraday rotation angle are also expected.
This study aimed at the development of a new type sputtering apparatus for the preparation of oxide multilayers without diffusions at interface and difference of compositions between targets and each layers as well as the establishment of the process for the oxide multilayers. With respect to the development of sputtering apparatus, the purpose was perfectly achieved. Two facing target sputtering units were mounted on the chamber to prepare the oxide multilayers and therefore, periodic alternative deposition of each ultra-thin oxide layers was achieved. The films deposited from BaFe_<12>O_<19>(BaM) targets on SiO_x/Si substrates had excellent c-axis orientation. Two type of underlayers, ZnO a … More nd CoFe_2O_4(CoS), were also prepared to make c-axis orientation of BaM ferrite layer perfect and to increase the perpendicular magnetic anisotropy of it. Some multilayered films composed of BaM, CoS and ZnO layers were prepared changing each parameters such as working gas pressure, partial oxygen pressure and substrate temperature and then, their micro structure and magnetic characteristics were investigated. Consequently, it was achieved to establish excellent process in the preparation of BaM and CoS ferrite films. Although it has been difficult to prepare ultra-thin multilayers for conventional sputtering technologies because the composition difference between targets and films was easy to occur and interfaces between each layers were likely to be disordered, it was achieved by using a new type sputtering method which was developed in this study to prepare oxide multilayers composed of different crystal structures even with ultra-thin layer thickness less than 100 A^^゚.
From there results, it also seemed that the preparation of multilayered films composed BaM and BaTiO_3 layers was possible. Less

  • Research Products

    (30 results)

All Other

All Publications (30 results)

  • [Publications] (Shigeki NAKAGAWA)Takehiko HAMAGUCHI Masahiko NAOE: "Preparation of Soft magnetic Fe-N Films by Ion Beam Deposition Method with Strict Control of Plasma Potential" IEEE Trans.on Magn.28【5】. 2946-2948 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] (Toyoaki HIRATA)Masahiko Naoe: "Large Kerr Rotation Angle and Magnetic Characteristics of Co-Cr/Al Multilayers Prepared by Plasma-Free Sputtering" IEEE Trans.on Magn.28【5】. 2964-2966 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] (Nobuhiro MATSUSHITA)Kenji NOMA Shigeki NAKAGAWA Masahiko NAOE: "Preparation of Co Ferrite Thin Films with Large Perpendicular and In-Plane Coercivities by Facing Targets Sputtering" IEEE Trans.on Magn.28【5】. 3108-3110 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] (Shigeki NAKAGAWA)Yoichi FURUTO Masahiko NAOE: "Ta and W Additon to Co_<83>Cr_<17> Thin Films Deposited on Co_<79>Cr_<21> Underlayer" J.of Magn.Magn.Mater.104〜107. 1801-1802 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] (Kbong SONG)Masahiko NAOE: "Magneto-optical Characteristics of Tb-Fe-Co/Al Multilayered films on layer thickness" J.of Magn.Magn.Mater.104-107. 1855-1856 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] (Shigeki NAKAGAWA)Kenji HASEGAWA Masahiko NAOE: "Magnetism and Structure of Iron Nitride Thin Films Deposited by Facing Targets Type of lon Source" J.of Magn.Magn.Mater.104-107. 1899-1900 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] (Shigeki NAKAGAWA)Yoichi FURUTO Masahiko NAOE: "Structural and Magnetic Characteristics of Co-Cr Films Sputtered in Mixture of Ar and CH_4 Mixture Gas" J.of.Magn.Magn.Mater.104-107. 2047-2048 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] (Shigeki NAKAGAWA)Takehiko HAMAGUCHI Masahiko NAOE: "High Permeability of Iron-nitride films Prepared by Ion Beam Deposition using NH_3" J.of Magn.Magn.Mater.112. 392-394 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] (Toyoaki HIRATA)Masahiko NAOE: "Improvement in Soft Magnetism of Sendust Sputtered Films for High Performance MIG head" J.of Magn.Magn.Mater.112. 432-434 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] (Masahiko NAOE)Kazuyoshi KUBOTA Shigeki NAKAGAWA: "Preparation of Soft Magnetic Films by Mechanical Alloying of Fe/Al/Si Multilayers under Ar ion bombardment" J.of Magn.Magn.Mater.112. 439-442 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] (Setsuo AKIYAMA)Shigeki NAKAGAWA Masahiko NAOE: "Small d-spacing and and Internal Stress of Co-Cr Films Deposited by Kr Ion Sputtering" Mat.Res.Soc.Symp.Proc.231. 335-338 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] (Kibong SONG)Hiroshi ITO Masahiko MAOE: "Magneto-optical Enhancement of TbFeCo/Al Films at Short Wave length" Mat.Res.Soc.Symp.Proc.231. 491-495 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] (Toyoaki HIRATA)Masahiko NAOE: "Tribological Properties of Carbon Thin Films Prepared by Plasma-Free Sputtering Method" Mat.Res.Soc.Symp.Proc.239. 635-640 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] (Kibong SONG)Masahiko NAOE: "Structual and Magnetic Characteristics of Thin Films of Tb-Fe-Co Alloy Prepared by Plasama-Free Sputtering" Proc.of 7th Int.Symp.on Mag.Anisotropy & Coercivity in RE-TM Alloys. (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] (直江 正彦),中川 茂樹: "磁性薄膜堆積におけるスパッタの物理" 日本応用磁気学会誌. 16巻No.S1. 91-96 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Shigeki NAKAGAWA, Takehiko HAMAGUCHI and Masahiko NAOE: "Preparation of Soft Magnetic Fe-N Films by lon Beam Deposition Method with Strict Control of Plasma Potential" IEEE Trans. on Magn.28 [5]. 2946-2948 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Toyoaki HIRATA and Masahiko Naoe: "Large Kerr Rotation Angle and Magnetic Characteristics of Co-Cr/Al Multilayers Prepared by Plasma-Free Sputtering" IEEE Trans. on Magn.28 [5]. 2964-2966 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Nobuhiro MATSUSHITA, Kenji NOMA, Shigeki NAKAGAWA and Masahiko NAOE: "Preparation of Co Ferrite Thin Films with Large Perpendicular and In-plane Coercivities by Facing Targets Sputtering" IEEE Trans. on Magn.28 [5]. 3108-3110 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Shigeki NAKAGAWA, Yoichi FURUTO and Masahiko NAOE: "Ta and W Addition to Co_<83>Cr_<17> Thin Films Deposited on Co_<79>Cr_<21> Underlayer" J. of Magn. Magn. Mater.104-107. 1801-1802 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Kibong SONG and Masahiko NAOE: "Maggneto-optical Characteristics of Tb-Fe-Co/Al Multilayered films on layer thikness" J. of Magn. Magn. Mater.104-107. 1855-1856 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Shigeki NAKAGAWA, Kenji HASEGAWA and Masahiko NAOE: "Magnetism and Structure of lron Nitride Thin Films Deposited by Facing Targets Type of lon Source" J.of Magn. Magn. Mater.104-107. 1899-1900 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Shigeki NAKAGAWA, Yoichi FURUTO and Masahiko NAOE: "Structural and Magnetic Characteristics of Co-Cr Films Sputtered in Mixture of Ar and CH_4 Mixture Gas" J. of Magn. Magn. Mater.104-107. 2047-2048 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Shigeki NAKAGAWA, Takehiko HAMAGUCHI and Masahiko NAOE: "High Permeability of Iron-nitride Films Prepared by lom Beam Deposition using NH_3;" J. of Magn. Magn. Mater.112. 392-394 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Toyoaki HIRATA and ,Masahiko NAOE: "Improvement in Soft Magnetism of Sendust Sputtered Films for High Performance MIG head;" J. of Magn. Magn. Mater.112. 432-434 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Masahiko NAOE, Kazuyoshi KUBOTA and Shigeki NAKAGAWA: "Preparation of Soft Magnetic Films by Mechanical Alloying of Fe/Al/Si Multilayers under Ar ion Bombardment;" J. of Magn. Magn. Mater.112. 439-442 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Setsuo AKIYAMA. Shigeki NAKAGAWA and Masahiko NAOE: "Small d-spacing and Internal Stress of Co-Cr Films Deposited by Kr Ion Sputtering;" Mat. Res. Soc. Symp. Proc.231. 335-338 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Kibong SONG, Hiroshi ITO and Masahiko NAOE: "Magneto-optical Enhancement of TbFeCo/Al Films at Short Wave length;" Mat. Res. Soc. Symp. Proc.231. 491-495 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Toyoaki HIRATA and Masahiko NAOE: "Tribological Properties of Carbon Thin Films Prepared by Plasma-Free Sputtering Method;" Mat. Res. Soc. Symp. Proc.239. 635-640 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Kibong SONG and Masahiko NAOE: "Structural and Magnetic Characteristics of Thin Films of Tb-Fe-Co Alloy Prepared by Plasma-Free Sputtering;" Proc. of 7th Int. Symp. on Mag. Anisotropy & coercivity in RE-TM Alloys;.

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Masahiko NAOE and Shigeki NAKAGAWA: "Physics of Sputtering in Deposition of Magnetic Thin Films;" Proceedings of Perpendicular Magnetic Recording Symposium supplement. No. S1. 91-96 (1992)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1994-03-24  

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