1993 Fiscal Year Final Research Report Summary
The development of the system for analyzing thin-film structure by using grazing incidence diffraction technique
| Project/Area Number |
03452293
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| Research Category |
Grant-in-Aid for General Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
結晶学
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| Research Institution | Nagoya Institute of Technology |
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Principal Investigator |
TORAYA Hideo Nagoya Institute of Technology, Associate Professor, 工学部, 助教授 (20143662)
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| Co-Investigator(Kenkyū-buntansha) |
TORAYA Hideo Nagoya Institute of Technology, Associate Professor (20143662)
TORAYA Hideo Nagoya Institute of Technology, Associate Professor (20143662)
TORAYA Hideo Nagoya Institute of Technology, Associate Professor (20143662)
TORAYA Hideo Nagoya Institute of Technology, Associate Professor (20143662)
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| Project Period (FY) |
1991 – 1993
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| Keywords | Grazing Incidence Diffraction / Thin-Film / Asymmetric Diffraction / Surface Structure / Parallel-Beam Optics / Computer Software for Analysis |
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| Research Abstract |
The diffractometer for grazing incidence diffraction (GID) has been developed, which can be used for thin-film structure analysis by using specular reflection technique. High quality of the data was obtained by using this instrument. A new diffractometer for asymmetric diffraction experiment has also been developed by modifying the instrument for GID.
For quantitative analysis of thin-film structures, the use of parallel-beam geometry is essntially important, because the focusing (divergent-beam) geometry induces the degradation of diffraction profiles. Profiles in asymmetric diffraction were examined in both theory and experiment using synchrotron radiation parallel-beam geometry and pseudo-parallel-beam geometry in a laboratory system developed in the present project. It has been demonstrated that the present laboratory system is very useful for the quantitative study of thin-film structure analysis.
A computer software for analyzing grazing incidence diffraction patterns has been developed.
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