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1993 Fiscal Year Final Research Report Summary

Development of New Fluidized-bed processes for Si-based Materials

Research Project

Project/Area Number 03555174
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 工業物理化学・複合材料
Research InstitutionFaculty of Engineering, Seikei University

Principal Investigator

KOJIMA Toshinori  Faculty of Engineering, Seikei University Associate Professor, 工学部, 助教授 (10150286)

Co-Investigator(Kenkyū-buntansha) UEYAMA Korekazu  Faculty of Engineering Science, Osaka University Associate Professor, 基礎工学部, 助教授 (10092149)
UEMIYA Shigeyuki  Faculty of Engineering, Seikei University Research Associate, 工学部, 助手 (60221800)
Project Period (FY) 1991 – 1993
KeywordsFluidized-bed / CVD / Particle coating / D.C.Plasma / Microwave plasma / Silicon carbide
Research Abstract

For the development of novel particle processing such as particle coating, utilization of fluidizing phenomena of particles under plasmatic conditions is available. Coating of SiC on the surface of particles from SiH_4 and CH_4 was studied using a D.C.plasma jetting fluidized bed reactor, consisting of fluidized bed superimposed on a D.C.plasma generator. SiH_4 and CH_4 were introduced through the ports forming vortex flow around the plasma jet. Two types of gas injection methods, premix and diffusion-mix methods, were compared. The diffusion-mix method gave high conversions of SiH_4 and CH_4, compared with the premix method. Though fine beta-SiC powder was trapped in the filter installed on the way of exit line, deposition of SiC on the bed particles was not confirmed by X-ray diffraction, probably due to the coating of amorphous or very thin SiC.The elemental analysis along the cross section of the coated particles showed that most silicon was deposited inside the particles and not near the surface. It can be speculated that the reaction gases excited in plasma were diffused into the particles and deposition occurred inside the particles.
Fundamental characteristics of a microwave plasma-fluidized bed reactor for particle processing were also investigated. Alumina or polycrystalline silicon was used as a bed material. Fluidizing phenomena and stability of plasma state seem to depend on the kinds of plasma gas and the level of dielectric loss of particles. Optical observation showed that plasma was generated within bubbles in the bed. Methane conversion was carried out as a model reaction. Although the level of methane conversion in the presence of particles was lower than that in the absence of particles, methane was effectively converted to carbon in the microwave plasma-fluidized bed.

  • Research Products

    (31 results)

All Other

All Publications (31 results)

  • [Publications] Kimura,T.: "Numerical Model of a Fluidized Bed Reactor for Polycrystalline Silicon Production-Estimation of CVD and Fines Formation" J.de Physique. 4(C-2). 103-110 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Kojima,T.: "Development of a Plasma Jetting Fluidized Bed Reactor" J.de Physique. 4(C-2). 429-436 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Kojima,T.: "Optimum Process Conditions for Stable and Effective Operation of a Fluidized Bed CVD Reactor for Polycrystalline Silicon Production" J.de Physique. 4(C-2). 475-482 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Matsukata,M.: "Characterization of Polycrystalline Silicon Particles Produced via CVD from Monosilane in a Fluidized Bed Reactor" J.de Physique. 4(C-2). 483-490 (1991)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 小島紀徳: "モノシランの気相熱分解による、微粒子へのシリコン超微粒子コーティング" 化学工学論文集. 18. 274-280 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Kojima,T.: "Modeling of Jetting Fluidized Bed Grid Zone for a Local Behavior of Gas and Solids" Fluidization. 7. 151-158 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Matsukata,M.: "Vertical Progress of Methane Conversion in a D.C.Plasma Fluidized Bed Reactor" Chem.Eng.Sci.47. 2963-2968 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 小島紀徳: "流動層CVD法によりモノシランから製造した多結晶シリコン粒子中の残留水素" 化学工学論文集. 18. 701-707 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Kojima,T.: "Production of Polycrystalline Silicon from Monosilane in a Fluidized-Bed Clogging,Particle Growth,and Fines Formation in a SiH_4-ArSystem" Intern.Chem.Eng.32. 739-749 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Kojima,T.: "Production of Polycrystalline Silicon from Monosilane in a Fluidized-Bed Effects of the Diluent Gas on the Conversion and the Properties of the Product" Intern.Chem.Eng.32. 767-775 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Matsukata,M.: "Fluidizing Phenomena of Microwave Plasma-Fluidized Bed CVD Reactor" Chem.Eng.Symp.Ser.29. 102-108 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 小島紀徳: "流動層工学の新分野への応用" ケミカルエンジニアリング. 37. 925-930 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 小島紀徳: "CVD法による新素材・材料開発" ケミカルエンジニアリング. 37. 434-438 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Kimura,T.: "Evaluation of the Contribution of the Grid Zone in the Production of Polycrystalline Silicon in Fluidized-bed CVD" Intern.Chem.Eng.33. 273-279 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Matsukata,M.: "Development of Microwave Plasma-Fluidized Bed Reactor for Novel Particle Processing" Intern.Multi.Phase Flow. (in press). (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 小島紀徳(分担執筆): "化学工学の進歩26 流動層(担当II-9 シリコン製造装置)" 槙書店, 269(6) (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Kimura, T.and Kojima T.: "Numerical Model of a Fluidized Bed Reactor for Polycrystalline Silicon Production - Estimation of CVD and Fines Formation" J.de Physique. IV (C-2). 103-110 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Kojima, T., Matsukata, M., Arao, M., Nakamura, M.and Mitsuyosi, Y.: "Development of a Plasma Jetting Fluidized Bed Reactor" J.de Physique. IV (C-2). 429-436 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Kojima, T.and Morisawa, O.: "Optimum Process Conditions for Stable and Effective Operation of a Fluidized Bed CVD Reactor for Polycrystalline Silicon Production" J.de Physique. IV (C-2). 475-482 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Matsukata, M., Odagiri, T.and Kojima, T.: "Characterization of Polycrystalline Silicon Particles Produced via CVD from Monosilane in a Fluidized Bed Reactor" J.de Physique. IV (C-2). 483-490 (1991)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Kojima, T., Wakatsuki, R., Matsukata, M., Ozawa, E.and Jean M.Friedt.: "Coating of Fine Particles with Ultrafine Silicon Powder by Gas-Phase Monosilane Pyrolysis" Kagaku Kogaku Ronbunshu (Japanese). 18. 274-280 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Kojima, T.and Kimura, T.: "Modeling of Jetting Fluidized Bed Grid Zone for a Local Behavior of Gas and Solids" Fluidization. VII. 151-158 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Matsukata, M., Oh-hashi, H., Kojima, T., Mitsuyoshi, Y.and Ueyama, K.: "Vertical Progress of Methane Conversion in a D.C.Plasma Fluidized Bed Reactor" Chem.Eng.Sci.47. 2963-2968 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Kojima, T., Odagiri, T., Matsukata, M.and Yamada, S.: "Residual Hydrogen in Polycrystalline Silicon Produced from Monosilane by Fluidized-Bed CVD Method" Kagaku Kogaku Ronbunshu (Japanese). 18. 701-707 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Kojima, T., Hiroha, H., Iwata, K.and Furusawa, T.: "Production of Polycrystalline Silicon from Monosilane in a Fluidized-Bed Clogging, Particle Growth, and Fines Formation in a SiH_4-Ar System" Intern.Chem.Eng.32. 739-749 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Kojima, T.and Morisawa, O.: "Production of Polycrystalline Silicon from Monosilane in a Fluidized-Bed Effects of the Diluent Gas on the Conversion and the Properties of the Product" Intern.Chem.Eng.32. 767-775 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Matsukata, M., Suzuki, K., Ueyama, K.and Kojima, T.: "Fluidizing Phenomena of Microwave Plasma-Fluidized Bed CVD Reactor" Chem.Eng.Symp.Ser.29. 102-108 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Kojima, T.and Kimura, T.: "Application of Fluidized-bed Thechnology to New Field" Chemical Engineering (Tokyo). 37. 925-930 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Kojima, T.and Uemiya, S.: "Development of New Functional Materials Using CVD Technique" Chemical Engineering (Tokyo). 38. 434-438 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Kimura, T.and Kojima, T.: "Evaluation of the Contribution of the Grid Zone in the Production of Polycrystalline Silicon in Fluidized-bed CVD -SiH_4-Ar System" Intern.Chem.Eng.33. 273-279 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Matsukata, M., Suzuki, K., Ueyama, K.and Kojima, T.: "Development of Microwave Plasma-Fluidized Bed Reactor for Novel Particle Processing" Intern.Multi.Phase Flow. (in press).

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1995-03-27  

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