1993 Fiscal Year Final Research Report Summary
DEVELOPMENT OF MICRO VACUUM PUMP USING A MICROMACHINING TECHNIQUE
| Project/Area Number |
03650220
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| Research Category |
Grant-in-Aid for General Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Research Field |
機械力学・制御工学
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| Research Institution | GIFU NATIONAL COLLEGE OF TECHNOLOGY |
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Principal Investigator |
INABA Seiki GIFU NATIONAL COLLEGE OF TECHNOLOGY ASSOCIATE PROFESSOR, 電気工学科, 助教授 (30110183)
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| Co-Investigator(Kenkyū-buntansha) |
HANE Kazuhiro NAGOYA UNIVERSITY, FACULTY OF ENGINEERING, ASSOCIATE PROFESSOR, 工学部・電子工学科, 助教授 (50164893)
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| Project Period (FY) |
1991 – 1993
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| Keywords | Micromachining / Micro Vacuum Pump / Optical Actuator / Shape-memory Alloy / Laser Diode / Photothermal Effect / Micro Cantilever / Water Flow Pump |
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| Research Abstract |
In order to develop a micro vacuum pump, basic experiment has been carried out from following four standing points of view.
1) In order to measure the pressure in the micro space, an optical vacuum gauge using a photothermal effect has been developed by fabricating a micro cantilever with a micromachining technique. The pressure in the low vacuum region can be determined exactly with measuring the resonance frequency of the canti-lever. The theoretical analysis was also performed.
2) An optical miniature actuator for driving the pump has been developed utilizing a shape-memory alloy. With the irradiation power of 300 mW, the displacement of 3 mm and the generative force of 2.2 N were obtained.
3) The micromachining technique was applied to the fabrication of the micro vacuum gauge. A micro photolithography for etching metals was used for making the miniature pump.
4) The miniature pump for flowing liquid was drived by the optical minature actuator. The flow rate of 140 ul/min was obtained. The pumping up pressure and the pumping out pressure were 1000 and 1500 mmH_2O, respectively.
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