1994 Fiscal Year Final Research Report Summary
Analysis of epilayr structures by high-resolution X-ray methods
| Project/Area Number |
04044066
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| Research Category |
Grant-in-Aid for international Scientific Research
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| Allocation Type | Single-year Grants |
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| Section | Joint Research |
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
HASHIZUME Hiroo Tokyo Institute of Technology, Res.Lab.Eng.Mater., 工業材料研究所, 教授 (10011123)
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| Co-Investigator(Kenkyū-buntansha) |
NIKULIN A.Yu メルボルン大学, 物理学科, 研究員
DAVIS T.R. オーストラリア国立科学産業研究機構, 研究員
STEVENSON Andrew CSIRO,Div.of Mater. Sci.& Tech., 主任研究員
WILLEINS S.W オーストラリア国立科学産業研究機構, 主任研究員
SAKATA Osami Tokyo Institute of Technology, Res.Lab.Eng.Mater., 工業材料研究所, 助手 (40215629)
OHSUMI Kazumaso National Lab.for High-Energy Physics, Photon Factory, 高エネルギー物理学研究所, 教授 (70011715)
WILKINS Steve CSIRO,Div.of Mater. Sci.& Tech.
NIKULIN Andrei University of Melbourne, School of Physics
DAVIS Timothy CSIRO,Div.of Mater. Sci.& Tech.
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| Project Period (FY) |
1992 – 1994
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| Keywords | Synchrotron radiation / X-ray diffractometry / phase retrieval / lattice distortion / ion implantation / multilayr / X-ray imaging / 位相コントラスト |
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| Research Abstract |
Two-dimensional lattice distortions in ion-implanted silicon crystals have been mapped out with spatial resolutions of 0.016 and 0.265 mum in the depth and lateral directions respectively using synchrotron X-ray diffractometry data. Intensity profiles along the crystal-truncation-rods associated with the fundamental 111 Bragg reflections and satellite reflections were measured and phase information was retrieved using the Petrashen-Chukhovskii algorithm for each reflection. Two equally plausible maps have been obtained by determining the relative phases of the satellite reflections with a sequential trial method and a local energy-minimum method.
X-ray phase-contrast images of voids and glass fibers in a polymer matrix has been obtained using both a monolithic 3-reflection asymmetric channel-cut monochromator and analyzer with 1.54-* X-rays. The mechanism of contrast formation in the images of voids and glass fibers are discussed in detail and numerical simulations of the images are found to agree with the experiments.
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