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1994 Fiscal Year Final Research Report Summary

A Study on Y Oxide High-Temperature Superconducting Thin Film Deposition by Pulsed Arc Plasma Discharges

Research Project

Project/Area Number 04555062
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 電力工学
Research InstitutionSASEBO NATIONAL COLLEGE OF TECHNOLOGY

Principal Investigator

SUDA Yoshiaki  SASEBO NATIONAL COLLEGE OF TECHNOLOGY,ASSOCIATE PROFESSOR, 助教授 (20124141)

Co-Investigator(Kenkyū-buntansha) NAKAMIYA Toshiyuki  KYUSYU TOUKAI UNIVERSITY,ASSOCIATE PROFESSOR, 工学部, 助教授 (90155812)
Project Period (FY) 1992 – 1994
KeywordsHigh-Temperature Superconducting Film / YBaCuO / Pulsed Arc Plasma / Excitation Temperature / Stoichiometric / Pulsed Process
Research Abstract

Since the discovery of high Tc oxide superconductors, there have been enormous interest and efforts to develop superconducting thin films for electronic applications including high sensitive magnetic field detector, switching device and a Josephson device.
A pulsed arc plasma discharge method has the advantage of high deposition rate, chemicall stoichiometry equal to a bulk (target) material and possibility of in situ crystallization and low temperature process. The pulsed arc plasma discharge and the off-axis magnetron sputtering were applied to sputter YBa_2Cu_3O_<7-X> bulktargets and deposit YBaCuO thin films on MgO (100) and SrTiO_3 (100) substrates without heating. The plasma properties and the film characteristics were investigated to prepare the high-quality YBaCuO thin films. The films deposited by the pulsed arc plasma discharge method had almost stoichiometric composition. Optical emission spectroscopy was used to monitor the process plasma state and many spectral lines were i … More dentified. And the excitation temperature were estimated. Our experiments show that the pulsed arc plasma discharge method is simple, inexpensive and effective technique to fabricate YBaCuO superconducting thin films.
A preparation of YBaCuO thin film on a flexible substrate with YSZ buffer layr by KrF pulsed laser deposition (PLD) was also investigated. The c-axis arraignment of the YBaCuO/YSZ/metal films was controlled by the orientation of the YSZ buffer layr. And laser-irradiated superconducting thin films were studied numerically by solving the one-dimensional heat conduction equation by means of the finite element method. Cubic BN films which might be coating films of YBaCuO thin films were prepared by pulsed YAG laser deposition. The electromagnetic noise caused by pulsed arc plasma discharge was also measured.
We will get new good results from the pulsed process including pulsed arc plasma and pulsed laser. It might be very important to study the pulsed process scientifically and industrially. Less

  • Research Products

    (20 results)

All Other

All Publications (20 results)

  • [Publications] Y. Suda: "Development of a Pulsed Arc Plasma Process for Preparation of YBaCuO Thin Films" Proceedings of the 5th ACED-92. 157-160 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 中宮 俊幸: "YBa_2Cu_3O_<7-X>超伝導バルクのパルスレーザアブレーション過程" 電気学会全国大会. No.383- (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T. Nakamiya: "Dynamics During Pulsed Laser Ablation of High Tc Superconductor" IEEE Transactions on Applied Superconductivity. Vol.3,No.1. 1057-1060 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y. Suda: "YBaCuO Thin Film Deposition by Pulsed Plasma Discharges" Proceedings of 28th IEEE Industry Applications Society. 1792-1795 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y. Suda: "Electromagnetic Noise Caused by Pulsed Arc Plasma Discharges" Proceedings of the 6th ACED-93. 55-58 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T. Nakamiya: "Pulsed Laser Melting of GaAs: Computer Simulation" Proceedings of the 6th ACED-93. 151-154 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 須田 義昭: "パルスアーク法による超伝導薄膜作製におけるスペクトル測定" 電気学会全国大会. No.177- (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y. Suda: "Preparation of Boron Nitride Film and Spectroscopic Study of Plasmas by RF Magnetron Sputtering and YAG Laser Ablation" Proceedings of the 7th ACED-94. 150-153 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y. Yamagata: "Orientation Control of YBaCuO Film on Flexible Metallic Substrates with Buffer Layers Using Pulsed Laser Deposition" Proceedings of the 1994 Applied Superconductivity Conf. MUB-2. MUB-2. (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 須田 義昭: "パルスYAGレーザアブレーションによる窒化硼素薄膜作製と分光分析" 電気学会放電,誘電・電気材料合同研究会. ED-95-24. 81-90 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Suda: "Development of a Pulsed Arc Plasma Process for Preparation of YBaCuO Thin Films" Proceedings of the 5th ACED-92. 157-160 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Nakamiya: "Pulsed Laser Ablation Process of YBaCuO bulk Superconductor" National Convention Record I.E.E Japan. No.383 (in japanese). (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Nakamiya: "Dynamics During Pulsed Laser Ablation of High Tc Superconductor" IEEE Transactions on Applied Superconductivity. Vol.3, No.1. 1057-1070 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Suda: "YBaCuO Thin Film Deposition by Pulsed Plasma Discharges" Proceedings of 28th IEEE Industry Applications Society. 1792-1795 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Suda: "Electromagnetic Noise Caused by Pulsed Arc Plasma Discharges" Proceedings of the 6th ACED-93. 55-58 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Nakamiya: "Pulsed Laser Melting of GaAs : Computer Simulation" Proceedings of the 6th ACED-93. 151-154 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Suda: "Spectroscopic Measurement on Preparation of Superconducting Thin Films by Pulsed Arc Method" National Convention Record I.E.E Japan. No.177 (in japanese). (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Suda: "Preparation of Boron Nitride Film and Spectroscopic Study of Plasmas by RF Magnetron Sputtering and YAG Laser Ablation" Proceedings of the 7th ACED-94. 150-153 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Yamagata: "Orientation Control of YBaCuO Film on Flexible Metallic Substrates with Buffer Layrs Using Pulsed Laser Deposition" Proceedings of the 1994 Applied Superconductivity Conf.MUB-2. (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Suda: "Preparation of Boron Nitride Film by Pulsed YAG Laser Ablation and Spectroscopic Study" Electric Discharge Cof.I.E.E Japan. ED-95-24, DEI-95-11 (in japanese). 81-90 (1995)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1996-04-15  

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