1993 Fiscal Year Final Research Report Summary
Development of funcitionality ceramics by laser implantation method
| Project/Area Number |
04650027
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| Research Category |
Grant-in-Aid for General Scientific Research (C)
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| Allocation Type | Single-year Grants |
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| Research Field |
Applied materials
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| Research Institution | Kinki University |
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Principal Investigator |
NAKAYAMA Takeyoshi Kinki University. Dep.fo Electrical Eng., Associate Professor, 理工学部・電気工学科, 助教授 (60023313)
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| Co-Investigator(Kenkyū-buntansha) |
HASHISHIN Yuichi Kinki University. Dep.fo Electrical Eng., Research Associate, 理工学部・電気工学科, 助手 (90156266)
KUBO Uichi Kinki University. Dep.fo Electrical Eng., Professor, 理工学部・電気工学科, 教授 (80088335)
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| Project Period (FY) |
1992 – 1993
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| Keywords | Laser implantation / Surface modification / Ceramics / Biocompatible materials / Silica / Alumina / Interconnection |
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| Research Abstract |
The object of this project is a development of functionality matericals by kaser implantation method. Ceramics (SiO_2, Al_2O_3) which surfaces were covered by metal thin films (Cu, Au, Ca, etc.) were irradiated by KrF excimer laser of CO_2 gas laser. Metal atoms were implanted into the substrate by laser irradiation. A surface modification of ceramics by using synchrotron radiation (SR) was also attempted.
The results obtained in this project are as follows.
(1)Cu atoms implanted into SiO_2 by KrF laser irradiation form a chemical bond with O atom in SiO_2.
(2)Drawing of metal lines on SiO_2 was schieved by using a mask pattern and KrF laser irradiation.
(3)Implantation of Ca atoms Al_2O_3 was achieved by CO_2 gas laser irradiation. Development of biocompatible materials was achieved.
(4)A surface modification of ceramics with SR was attempted. The result obtained is extremely different from that obtained with laser light. Further studies are required for this study.
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Research Products
(2 results)
