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1993 Fiscal Year Final Research Report Summary

Discharge Pumped Rare-Gas Excimer Lasers in Vacuum Ultraviolet Spectral Region

Research Project

Project/Area Number 04805037
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field 電子機器工学
Research InstitutionMiyazaki University

Principal Investigator

SASAKI Wataru  Miyazaki University, Emngineering, Professor, 工学部, 教授 (30081300)

Co-Investigator(Kenkyū-buntansha) OTSUBO Masahisa  Miyazaki University, Emngineering, Associate Professor, 工学部, 助教授 (90041011)
KUROSAWA Kou  Miyazaki University, Emngineering, Professor, 工学部, 教授 (80109892)
Project Period (FY) 1992 – 1993
KeywordsRare gas excimer / rare gas cluster / Vacuum ultraviolet / Discharge pumping / Xe excimer
Research Abstract

Rare gas excimer lasers are atractive vacuum ultraviolet sources with high power tunable output around the center of their spectra. However, their oscillation have been obtained only by electron beam pumping. The electron beam pumped rare gas excimer lasers have difficulties for applications because of their low repitition operation. It, therefore, has been desired the rare gas excimers were considered to produce by three body collisions of an excited rare gas atom with two of ground state atoms. In this case a high pressure operation is favorable, because a formation rate of raer gas excimers is proportional to the square of the gas pressure. It is well known that uniform glow discharges in the high pressure gas are very difficult to establish. We have proposed a new concept of formation of the rare gas excimers in which the rare gas excimers were formed from rare gas clusters in an expanding jet discharge.
In this project it has been experimentary confirmed that Xe excimers were forme … More d from the Xe clusters excited by discharge electrons. Distributions of sizes of the Xe clusters were measured with a TOF spectrometer by three photon ionization of the clusters. Densities of the Xe dimers were measured to be 10^<17>cm^<-3> at 3mm down stream of the expanding jet with 3atm.to 8atm.of staggnation pressures. Densities of Xe excimers were measured to be 10^9cm^<-3>, the densities of the clusters were 10^<17>cm^<-3> though. These very low efficiency of excimer formation from the clusters is considered to be unsuitable discharge conditions.
In DC sischarges radiative transitions from the ^3SIGMA excimer state were predominant, stimulated emissions, therefore, were not observed because the stimulated emission cross section of ^3SIGMA state was three orders smaller than that of ^1SIGMA state. As a result it is considered that fast pulsed discharges should be essential for obtaining a high laser gain.
It is very important to point out that an efficinet vacuum ultraviolet lamp can be produced using the excimer radiation by the ^3SIGMA transitions.
In future electron energy dependences of the excitation cross sections of rare gas excimers from the clusters will be measured in order to conclude efficient discharge conditions. Less

  • Research Products

    (15 results)

All Other

All Publications (15 results)

  • [Publications] Wataru Sasaki: "Discharge=pumped rare gas excimer lasers" CLEO'92 Technical Digest. 12. 112-113 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Kou Kurosawa: "Observation of stimulated emission from electrical excited rare-gas excimers" QELS'92 Technical Digest. 13. 140-141 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 松園 清吾: "新しい希ガスエキシマ生成法による準連続誘導放出光の発生" 宮崎大学工学部研究報告. 38. 175-182 (1992)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Masahito Katto: "Laser beam profiler in the vacuum ultraviolet spectral range using photostimulable phosphor" Rev.Sci.Instrum.62. 319-324 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Kou Kurosawa: "Growth of siliconmicrocrystals in thin surface layers of quartz glass with vacuum ultraviolet laser processing" Appl.Surface Science. 70/71. 712-715 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 小曽根 伸憲: "希ガスエキシマ生成断面積計測システムの検討" 宮崎大学工学部研究報告. 38. 79-86 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] W.Sasaki, K.Kurosawa and S.Matsuzono: "Discharge-pumped rare gas excimer lasers" CLEO'92, Technical digest Series 12. 112-113 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Kurosawa, W.Sasaki and S.Matsuzono: "Ovservation of stimulated emission from electrical excited rare-gas excimers" QELS'92, Technical Digest Series 13. 140-141 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Matsuzono, W.Sasaki, K.Kurosawa: "A new formation method of rare gas excimers that produce stimulated emission by a quasi-cw discharge" Bulletin of the Faculty of Engineering. No.38. 175-182 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] R.Matsumoto, M.Katto, M.Okuda, K.Kurosawa W.Sasaki Y.Takigawa: "Beam profile measurement on an argon excimer laser with imaging plates" The Rev.Laser Engineering. vol.20. 738-745 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Ohmukai, H.Naito, M.Okuda, K.Kurosawa, W.Sasaki Y.Takigawa, T.Matsushita Y.Tsunawaki: "Effects of High-Power argon Excimer Laser Irradiation on Polycrystalline Silicon Carbide Mirrors" The Rev.Laser Engineering. vol.20. 970-979 (1992)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Katto, R.Matsumoto, K.Kurosawa, W.Sasaki Y.Takigawa & M.Okuda: "Laser beam profiler in the vacuum ultraviolet spectral range using photostimulable phosphor" Rev.Sci.Instrum.vol.62. 319-324 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Kurosawa, W.Sasaki, Y.Takigawa, M.Ohmukai M.Katto, and M.Okuda: "Growth of siliconmicrocrystals in thin surface layrs of quartz glass with vacuum ultraviolet laser processing" Appl.Surface Science. vol.70/71. 712-715 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Ohmukai, H.Naito, M.Okuda, K.Kurosawa, W.Sasaki T.Matsushita Y.Tsunawaki, S.Nozawa & T.Igarashi: "Silicon precipitation induced by argon excimer laser in surface layrs of Si_3N_4" Jpn.J.Appl.Phys.vol.32, Part2, #8A. L1062-L1065 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Kosone, W.Sasaki, K.Kurosawa: "A Theoretical Consideration for Measuring Formation Cross Sections of Rare Gas Culsters to the Excimers" Bull.Faculty of Engineering, Miyazaki Univ.No.39. 79-85 (1993)

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      「研究成果報告書概要(欧文)」より

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Published: 1995-03-27  

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