1995 Fiscal Year Final Research Report Summary
Studies on the reaction mechanism of si-CVD and mono-cluster synthesis
| Project/Area Number |
05403020
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| Research Category |
Grant-in-Aid for General Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Research Field |
反応・分離工学
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| Research Institution | University of Tokyo |
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Principal Investigator |
MATSUI Hiroyuki Univ.of Tokyo, Mechanical Engineering, Professor, 大学院・工学系研究科, 教授 (00026098)
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| Co-Investigator(Kenkyū-buntansha) |
MIYOSHI Akira Univ.of Tokyo, Chemical System Eng., Associate Professor, 大学院・工学系研究科, 講師 (60229903)
TESAKI Atsumu Univ.of Tokyo, Mechanical Eng., Research Associate, 大学院・工学系研究科, 助手 (50236965)
KOSHI Mitsuo Univ.of Tokyo, Chemical System Eng., Professor, 大学院・工学系研究科, 教授 (20133085)
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| Project Period (FY) |
1993 – 1995
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| Keywords | Silane / Disilane / Multiphoton ionization / Time-of-flight mas-sspectrometer / Silyl radical / Disilene / Laser Photolysis / Dimerization |
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| Research Abstract |
Radicals or reaction intermediates containing Si atom play an important role in many CVD system and in the formation mechanism of silicon nano-clusters. Although existence of Si_2H_n radicals is demonstrating by quantum mechanical calculations, many important radicals such as disilane have not yet detected in the gas phase. We developed a new time-of flight mass spectrometer combined with a laser multi-photon ionization to detect these Si-containing radicals. Si-containing radicals were produced by the abstraction of H atom from SiH_4 or Si_2H_6 by Cl atom. Cl atom was generated by using two different method : ArF laser photolysis of C_2Cl_4 and the microwave discharge of Cl_2. In these reaction system, Cl, SiH,and SiH_3 could be detected by the resonantly-enhanced multi-photon ionization (REMPI). In addition, many ion signals signals form Si^+, SiH^+, SiH_2, Si_2, and Si_2Hn could be detected, but signal intensities of these ions are almost independent on the ionization wavelength. It is concluded these ions are produced by the non-resonant ionization of some parent molecules.
Experiments to investigate the dimerization processes of SiH_3 radicals were also performed. H_2 and Si_2H_6 produced by the SiH_3+SiH_3 reaction were detected by Q-pole mass spectrometer with elctron-impact ionization. Branching ratio of the product channels was determined.
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