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1994 Fiscal Year Final Research Report Summary

A New in-situ Optical Probing Method for the Surface Reaction in Heteroepitaxy : Surface Photo-Interference

Research Project

Project/Area Number 05452092
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field Applied materials science/Crystal engineering
Research InstitutionCHIBA UNIVERSITY

Principal Investigator

YOSHIKAWA Akihiko  CHIBA UNIV., FACULTY OF ENG., PROFESSOR, 工学部, 教授 (20016603)

Co-Investigator(Kenkyū-buntansha) KOBAYASHI Masakazu  CHIBA UNIV., FACULTY OF ENG., ASSOC.PROF., 工学部, 助教授 (10241936)
Project Period (FY) 1993 – 1994
Keywordsreal time monitoring / optical probing / suface photo-interference / compound semiconductors / hetero epitaxy / zinc selenide / MOVPE / SPI
Research Abstract

A new in-situ optical probing method for studying surface reactions during heteroepitaxial growth has been proposed. The new method was named surface photo-interference (SPI) , because the concept of the SPI is essentially concerned with a photo-interference in the heteroepilayr. The experimental setup of the method is very similar to another optical probing method called surface photo-absorption (SPA) , but the principle is quite different between the two. Unlike SPA,fairly low energy photons that are transparent for the epilayr can also be used in SPI as a probing light. Reflecting this feature, SPI is especially useful for studying growth kinetics in heteroepitaxial growth of widegap II-VI compounds, because the effect of photocatalytic growth-rate enhancement can be avoided when using such low energy photons as a probing light. A theoretical description of SPI signal was given, and experimental results detected in MOMBE of ZnSe and CdSe were precisely discussed. Further, how SPI differs from SPA has also been discussed.

  • Research Products

    (23 results)

All Other

All Publications (23 results)

  • [Publications] A.Yoshikawa,A.Iguchi,S.Yamaga: "Study of Photocatalytic growth-rate enhancement in MOMBE of GaAs on ZnSe by surface photo-absorption" Thin Solid Films. 225. 78-81 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A.Yoshikawa: "Arion laser-assisted metalorganic vapor phase epitaxy of ZnSe" Physica B. 185. 50-64 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Matsumoto,H.Tosaka,T.Yoshida,M.Kobayashi,A.Yoshikawa: "Nitrogen doping of ZnSe and ZnCdSe with the assistance of thermal energy and photon energy" Japanese Journal of Applied Physics. 32No.2. 731-734 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Matsumoto,H.Tosaka,T.Yoshida,M.Kobayashi,A.Yoshikawa: "Planar doping of molecular beam epitaxy of MBE grown ZnSe with plasma-excited nitrogen" Japanese Journal of Applied Physics,. 32No.2B. L229-L232 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Tosaka,T.Nagatake,T.Yoshida,M.Kobayashi,A.Yoshikawa: "Accepter Concentration Control of p-ZnSe Using Nitrogen and Helium Mixed Gas Plasma" Japanese Journal of Applied Physics,. 32No.2. 1722-1724 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A.Yoshikawa,M.Kobayashi,S.Tokita: "A new in-situ optical monitoring method for the surface reaction in photo-excited heteroepitaxy of compound semiconductors" Applied Surface Science. 79/80. 416-421 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Tokita,M.Kobayashi,A.Yoshikawa: "In-situ probing of the ZnSe metalorganic molecular beam epitaxy growth by surface photo-interference" Journal of Crystal Growth. 136. 376-380 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A.Yoshikawa,M.Kobayashi,S.Tokita: "Surface reaction mechanism in MOMBE-ALE of ZnSe and CdSe as determined by a new in-situ optical probing method" Applied Surface Science. 82/83. 316-321 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Kobayashi,H.Tosaka,T.Nagatake,T.Yoshida,A.Yoshikawa: "Helium gas mixing in the nitrogen plasma for the control of the acceptor concentration in p-ZnSe" Journal of Crystal Growth. 138. 745-749 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A.Yoshikawa,M.Kobayashi,S.Tokita: "Observation of a new in-situ optical monotoring signal with monolayer resolution in metalorganic molecular beam epitaxy and metalorganic vapor phase epitaxy of wide-gap II-VI compounds" Journal of Crystal Growth. 145. 68-73 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 賈岸偉、小林正和、吉川明彦: "GaAsに格子整合する超格子によるZnCdSSe疑似四元混晶の設計" 電気学会論文誌C. 114-C. 1286-1291 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A.W.Jia,M.Kobayashi,A.Yoshikawa: "Design and fabrication of pseudo-quaternary ZnCdSSe mixed layers by strained layer superlattices" J.Electronic Materials. 24. 117-121 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A.Yoshikawa, A.Iguchi, S.Yamaga: ""Study of photocatalytic growth-rate enhancement in MOMBE of GaAs on ZnSe by surface photo-absorption"" Thin Solid Films. vol.225. 78-81 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A.Yoshikawa, M.Kobayashi, S.Tokita: ""A new in-situ optical monitoring method for the surface reaction in photo-excited heteroepitaxy of compound semiconductors"" Applied Surface Science. vol.79/80. 416-421 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Tokita, M.Kobayashi, A.Yoshikawa: ""In-situ probing of the ZnSe metalorganic molecular beam epitaxy growth by surface photo-interference"" Journal of Crystal Growth. vol.136. 376-380 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A.Yoshikawa, M.Kobayashi, S.Tokita: ""Surface reaction mechanism in MOMBE-ALE of ZnSe and CdSe as determined by a new in-situ optical probing method"" Applied Surface Science. vol.82/83. 316-321 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A.Yoshikawa, M.Kobayashi, S.Tokita: ""Observation of a new in-situ optical monotoring signal with monolayr resolution in metalorganic molecular beam epitaxy and metalorganic vapor phase epitaxy of wide-gap II-VI compounds"" Journal of Crystal Growth. vol.145. 68-73 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A.Yoshikawa: ""Ar ion laser-assisted metalorganic vapor phase epitaxy of ZnSe"" Physica B. vol.185. 50-64 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Matsumoto, H.Tosaka, T.Yoshida, M.Kobayashi, A.Yoshikawa: ""Nitrogen doping of ZnSe and ZnCdSe with the assistance of thermal energy and photon energy"" Japanese Journal of Applied Physics. vol.32 No.2. 731-734 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Matsumoto, H.Tosaka, T.Yoshida, M.Kobayashi, A.Yoshikawa: ""Planar doping of molecular beam epitaxy of MBE grown ZnSe with plasma-excited nitrogen"" Japanese Journal of Applied Physics. vol.32 No.2B. L229-L232 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Tosaka, T.Nagatake, T.Yoshida, M.Kobayashi, A.Yoshikawa: ""Acceptor concentration control of p-ZnSe using nitrogen and helium mixed gas plasma"" Japanese Journal of Applied Physics. vol.32. L1772-L1774 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Kobayashi, H.Tosaka, T.Nagatake, T.Yoshida, A.Yoshikawa: ""Helium gas mixing in the nitrogen plasma for the control of the acceptor concentration in p-ZnSe"" Journal of Crystal Growth. vol.138. 745-749 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A.W.Jia, M.Kobayashi and A.Yoshikawa: ""Design and fabrication of pseudo-quaternary ZnCdSSe mixed layrs by strained layr supoerlattices"" Journal of Electronic Materials. vol.24. 117-121 (1995)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1996-04-15  

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