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1994 Fiscal Year Final Research Report Summary

Construction of Ferroelectic Oxide Superlattices by a Laser Ablation Technique and Their Properties

Research Project

Project/Area Number 05452103
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 表面界面物性
Research InstitutionOsaka University

Principal Investigator

KAWAI Tomoji  Osaka Univ.ISIR-Sanken Professor, 産業科学研究所, 教授 (20092546)

Co-Investigator(Kenkyū-buntansha) KANAI Masaki  Osaka Univ.ISIR-Sanken Technical Staff, 産業科学研究所, 教務職員 (50243267)
KITAHARA Katsuki  Osaka Univ.ISIR-Sanken Research Associalt, 産業科学研究所, 助手 (20029903)
Project Period (FY) 1993 – 1994
KeywordsLaser Ablation / Ferroelectricity / Superlattice / Artificial Lattice / Functional Oxide / Dielectric Constant / Material Design / Layred Growth
Research Abstract

Artificial dielectric superlattices of SrTiO_3/BaTiO_3 (STO/BTO) and CaTiO_3/BaTiO_3 (CTO/BTO) have been formed by a pulsed laser ablation technique with an in situ monitoring of RHEED (reflection high energy electron diffraction) oscillation. The crystal structures can be controlled with atomic order accuracy and a large stress of 400-500 MPa is introduced at the interface between the BTO and STO layrs. The superlattices show higher dielectric constant than that of (Sr_<0.5>Ba_<0.5>) TiO_3 films against the change of temperature or applied freqency. A large dielectric constant of 900 was observed for the superlattices with a stacking periodicity of 2 unit cells/2 unit cells. The superlattices show drastically different electrical behavior from that of the solid solution (Sr, Ba) TiO_3 films, both with changing temperature and applied frequency. Broad maxima of the dielectric constants occur around 40-50? A1C and the valucs remain large even for the temperature above 200? A1C.On the contrary, in the case fo CTO/BTO superlattices, lattice constans and dielectric constant do not change so much compared with STO/BTO cases. Lattice mismatch in the STO/BTO and the CTO/BTO superlattices are 2.5% and 5.5%, respectively. In the case of CTO/BTO,misfit dislocations such as stacking faults may occur at the interface between CTO and BTO layrs owing to large lattice mismatch. Therefore, lattice strain is introduced effectively below the lattice mismatch of about 3 %.

  • Research Products

    (34 results)

All Other

All Publications (34 results)

  • [Publications] 田畑仁: "エキシマレーザアブレーション法を用いた機能性薄膜の作製" 日本真空協会誌. 36. 81-86 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 川合知二: "レーザアブレーション法による強誘電体薄膜の形成" エレクトロニクス・セラミックス. 7. 42-48 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 田畑仁: "ペロブスカイト型酸化物超格子の結晶構造および物性" 第1回メゾ材料シンポジウム.

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 田畑仁: "レーザアブレーション法により作製したPbTiO_3薄膜の電気特性および焦電特性" 第10回強誘電体応用会議.

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Tabata: "Electric and Pyroelectric Behaviours of PbTiO_3 Thin Films Formed by an Excimer Laser Ablation Technique" Jpn.J.Appl.Phys.32. 5611-5614 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Shibata: "Epitaxial Growth of LiNbO_3 Thin Films on Sapphire Substrates by Excimer Laser Ablation Method and Their Surface Acoustic Wave Properites" Jpn.J.Appl.Phys.32. L745-L747 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Shibata: "Epitaxial Growth and Surface Accoustis Wave Properties of Lithium Niobate Films Grown by Pulsed Laser Depositiom" Appl.Phys.Lett.62. 3046-3048 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 川合知二: "レーザーアブレーション" 応用物理. 62. 1244-1245 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Tanaka: "Dominant Factors for Formation of Perovskite PbTiO_3 Films Using Excimer Laser Ablation" Jpn.J.Appl.Phys.33. L451-L454 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 田畑仁: "SrTiO_3/BaTiO_3超格子の結晶構造とその物性" 第11回強誘電体応用会議.

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 田畑仁: "強誘電体超格子におけるメゾ構造と高誘電特性および分子道力学的考察" 第2回メゾ材料シンポジウム.

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Tabata: "C-axis Preferred Orentation of Laser Ablation Epitaxial PbTiO_3 Films and Their Electrical Properties" Appl.Phys.Lett.64. 428-430 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Tomio: "Control of Electrical Conductivity in Laser Deposited SrTiO_3 Thin Films with Nb Doping" J.Appl.Phys.76. 5886-5890 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Tabata: "Formation of Artificial BaTiO_3/SrTiO_3 Superlattices Using Pulsed Laser Deposition and Their Dielectric Properties" Appl.Phys.Lett.65. 1970-1972 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Tabata: "Construction of Strained SrTiO_3/BaTiO_3 Superlattices and Their Dielectric Properties" Mat.Res.Soc.Pro.Invited Paper (1994)Fall Meeing in Boston.

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Tabata: "Film Formation of the Perovskite Type Materials (MTiO_3;M=Ca,Sr.Ba and Pb)by a Pulsed Laser Depositoin" Mat.Res.Soc.Pro.Invited Paper (1994)Fall Meeing in Boston.

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Tabata: "Strained SrTiO_3/BaTiO_3 Superlattices Formed by Laser Ablation Technique and Their High Dielectric Properties" Jpn.J.Appl.Phys.34. 544-547 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Shibata: "Surface Acoustic Wave Properties of Lithium Tantalate Film Grown by Pulsed Laser Deposition" Jpn.J.Appl.Phys.34. 254-258 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Shibata: "Epitaxial Growth and Surface Acoustic Wave Properties of Lithium Niobate Films Grown by Pulsed Laser Ablation" J.Appl.Phys.,Issue on February.

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Shibata: "Formation and Surface Acoustic Wave Properties of LiNbO_3/AiN/Sapphire" Jpn.J.Appl.Phys.,Accepted for Publication.

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 田畑仁: "強誘電体薄膜メモリ" (株)サイエンスフォーラム, 350 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Tabata: "Elctric and Pyroelectric Behaviors of PbTiO_3 Thin Films Formed by an Excimer Laser Ablation Technique" Jpn.J.Appl.Phys.32. 5611-5614 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Shibata: "Epitaxial Growth of LiNbO_3 Thin Films on Sapphire Substrates by Excimer Laser Ablation Method and Their Surface Acoustic Wave Properties" Jpn.J.Appl.Phys.32. L745-L747 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Shibata: "Epitaxial Growth and Surface Accoustic Wave Properties of Lithiium Niobate Films Growth by Pulsed Laser Depositiom" Appl.Phys.Lett.62. 3046-3048 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Tanaka: "Dominant Factors for Formation of Perovskite PbTiO_3 Films Using Excimer Laser Ablation" Jpn.J.Appl.Phys.33. L451-L454 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Tabata: "C-axis Preferred Orientation of Laser Ablation Epitaxial PbTiO_3 Films and Their Electrical Properties" Jpn.J.Appl.Lett.64. 428-430 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Tomio: "Control of Electrical Conductivity in Laser Deposited SrTiO_3 Thin Films with Nb Doping" J.Appl.Phys.76. 5886-5890 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Tabata: "Formation of Artificial BaTiO_3/SrTiO_3 Superlattices Using Pulsed Laser Deposition and Thier Dielectric Properties" Appl.Phys.Lette.65. 1970-1972 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Tabata: "Construction of Strained SrTiO_3/BaTiO_3 Superlattices and Thier Dielectric Properties" Mat.Res.Soc.Proc.Invited Paper (1994) Fall Meeting in Boston.

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Tabata: "Films Formation of the Perovskite Type Materials (MTiO_3 ; M=Ca, Sr, Ba and Pb) by a Pulsed Laser Deposition" Mat.Res.Soc.Proc.Invited Paper (1994) Fall Meeting in Boston.

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Tabata: "Strained SrTiO_3/BaTiO_3 Superlatties Formed by Laser Ablation Technique and Thier High Dielectric Properties" Jpn.J.Appl.Phys.34. 544-547 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Shibata: "Surface Acoustic Wave Properties of Lithium Tantalate Film Grown by Pulsed Laser deposition" Jpn.J.Appl.Phys.34. 254-258 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Shibata: "Epitaxial Growth and Surface Acoustic Wave Properties of Lithium Niobate Films Grown by Pulsed Laser Ablation" J.Appl.Phys., Issue on February. (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Shibata: "Formation and Surface Acoustic Wave Prooerties of LiNbO_3 /AiN/Sapphire" Jpn.J.Appl.Phys., Accepted. Publication. (1995)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1996-04-15  

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