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1994 Fiscal Year Final Research Report Summary

Characterization and Control of Interaction between Quantized Energy Levels and Surface/Interface States in Compound Semiconductor Quantum Structures.

Research Project

Project/Area Number 05452181
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field Electronic materials/Electric materials
Research InstitutionHokkaido University

Principal Investigator

HASEGAWA Hideki  Hokkaido University, Faculty of Engineering, Professor, 工学部, 教授 (60001781)

Co-Investigator(Kenkyū-buntansha) AKAZAWA Masamichi  Hokkaido University, Faculty of Engineering, Instructor, 工学部, 助手 (30212400)
SAWADA Takayuki  Hokkaido University, Research Center for Interface Quantum Electronics, professo, 量子界面エレクトロニクス研究センター, 教授 (40113568)
Project Period (FY) 1993 – 1994
KeywordsQuantum structure / Compound semiconductor / Surface / interface stete / Interface control / Quantum well / Photoluminescence / Surface passivation
Research Abstract

The purpose of the research is to investigate an interaction between the quantized energy levels and the surface/interface states in compound semiconductor quantum structures, and to investigate the applicability of the novel silicon-intelayr based passivation technique to passivation of compound semiconductor quantum structures. The main results are summarized below.
(1) It has been shown that the photoluminescence (PL) intensity from the near-surface AlGaAs/GaAs quantum wells (QWs) decreases exponentially with decreasing the thickness of the top AlGaAs barrier layr below 10nm, and that this PL reduction is due to the interaction between the quantized QW enegy levels and the surface states.
(2) The novel passivation technique for compound semiconductor surfaces was successfully developed, in which an ultrathin silicon/Si_3N_4 double-layr is utilized as a interface control layr (ICL).
(3) A drastic reduction of interface state density into the 2*10^<10>cm^<-2> was obtained for the InGaAs MIS system by application of the novel passivation technique. This value is the lowest reported so far for the compound semiconductor MIS systems.
(4) The novel passivation process was applied to passivation of Al_<0.3>Ga_<0.7>As/GaAs/Al_<0.3>Ga_<0.7> As near-surface Qs. Complete recovery of the PL intensity was achieved with an observed maximum recovery factor of 1000. The recovery of PL intensity can be explained by reduction of interface state densities by the novel passivation process, resulting in reduction of non-radiative surface recombination via tunneling processes. The present passivation technique can be applicable to surface/inteface control of compound semiconductor quantum structures.

  • Research Products

    (32 results)

All Other

All Publications (32 results)

  • [Publications] H.Hasegawa: ":Material and Device Technology towards Quantum LSIs(invited)." IEICE Trans.Electron. E76-C. 92-102 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Z.Sobiesierski: "Photoluminescence Spectroscopy of Near-Surface Quantum Wells;Electronic coupling between quantized energy levels and the sample surface." J.Vac.Sci.Technol.B11 No.4. 1723-1726 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Kodama: "Interface Profile Optimization in Novel Surface Passivation Scheme for InGaAs Nanostructure Using Si Interface Control Layer." J.Electron.Materials. Vol.22. 437-443 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Fujikura: "Fabrication of InGaAs Wires by Preferential Molecular Beam Epitaxy Growth on Corrugated InP Substrate." Jpn.J.Appl.Phys.33 Part1B. 919-924 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Hashizume: "Process-Induced Defects in InP Caused by Chemical Vapor Deposition of Surface Passivation Dielectrics.," Jpn.J.Appl.Phys.33 Part1B. 727-733 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] G.Schweeger: "Fabrication and Characterisation of Direct Schottky Contacts to Two-Dimensional Electron Gas in GaAs/AlGaAs Quantum Wells." Jpn.J.Appl.Phys.33,Part1B. 779-785 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.-J.Wu: "Formation of Oxide-Free Nearly Ideal Pt/GaAs Schottky Barriers by Novel In Situ Photopulse-Assisted Electrochemical Process.," Jpn.J.Appl.Phys.33,Part1B. 936-941 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Hashizume: "A Novel In-Situ Electrochemical Technology for Formation of Oxide-and Defect-Free Contactsto GaAs and Related Low-Dimensional Structures." J.Vacuum Science & Technology B. 12-4. 2660-2666 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Ishikawa: "Macroscopic Electronic Behavior and Atomic Arrangements of GaAs Surfaces Immersed in HCI Solution." Journal of Vacuum Science & Technology B Second Series. 12-4. 2713-2719 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Saitoh: "A Novel In-situ Characterization Method of Quantum Structures by Excitation Power Dependence of Photoluminescence." Inst.Phys.Conf.Ser.136. 795-800 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] R.Notzel: "″Atomic Force Microscopy Study of Strained InGaAs Quantum Disks Self-organizing on GaAs(n11)B Substrates″" Appl.Phys.Lett.65. 2854-2856 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Hasizume: "Depletion Characteristics of Direct Schottky Contacts to Quantum Wells Formed by In Situ Selective Electrochemical Process." Jpn.J.Appl.Phys.34. 1149-1152 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Okada: "Novel Wire Transistor Structure with in-Plane Gate Using Direct Schottky Contacts to 2DEG." Jpn.J.Appl.Phys.34. 1315-1319 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A.Malinin: "Characterization of DEEP Levels in Si-Doped In_xAI_<1-x>As Layers Grown by Molecular Beam Epitaxy." Jpn.J.Appl.Phys.34. 1138-1142 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Kodama: "Novel Surface Passivation Scheme for Compound Semiconductor Using Silicon Interface Control Layer and Its Application to Near-Surface Quantum wells,." Jpn.J.Appl.Phys.34. 1143-1148 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.-J.Wu: "Schottky Contacts on n-InP with High Barrier Hights and Reduced Fermi-Level Pinning by a Novel In Situ Electrochemical Process.," Jpn.J.Appl.Phys.34. 1162-1167 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Hasegawa: "Material and Device Technology towards Quantum LSls (invited)." IEICE Trans.Electron. vol.E76-C. 92-102 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Z.Sobiesierski, D.I.Westwood, D.A.Woolf, T.Fukui and H.Hasegawa: "Photoluminescence Spectroscopy of Near-Surface Quantum Wells ; Electronic coupling between quantized energy levels and the sample surface." J.Vac.Sci.Technol.B11 No.4. 1723-1726 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Kodama, M.Akazawa, H.Fujikura and H.Hasegawa: "Interface Profile Optimization in Novel Surface Passivation Scheme for InGaAs Nanostructure Using Si Interface Control Layr." J.Electron.Materials. vol.22. 437-443 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Fujikura, T.Iwa-ana and H.Hasegawa: "Fabrication of InGaAs Wires by Preferential Molecular Beam Epitaxy Growth on Corrugated InP Substrate." Jpn.J.Appl.Phys.Vol.33, Part 1 B. 919-924 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Hashizume, H.Hasegawa, R.Riemenschneider and H.L.Hartnagel: "Process-Induced Defects in InP Caused by Chemical Vapor Deposition of Surface Passivation Dielectrics." Jpn.J.Appl.Phys.Vol.33, part 1 B. 727-733 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] G.Schweeger, H.Hasegawa and H.L.Hartnagel: "Fabrication and Characterisation of Direct Schottky Contacts to Two-Dimensional Electron Gas in GaAs/AlGaAs Quantum Wells." Jpn.J.Appl.Phys.Vol.33, Part 1 B. 779-785 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.-J.Wu, T.Hashizume and H.Hasegawa: "Formation of Oxide-Free Nearly Ideal Pt/GaAs Schottky Barriers by Novel In Situ Photopulse-Assisted Electrochemical Process." Jpn.J.Appl.Phys.Vol.33, part 1 B. 936-941 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Hashizume, G.Schweeger, N.J.Wu and H.Hasegawa: "A Novel in-situ Electrochemical Technology for Formation of Oxide-and Defect-Free Contactsto GaAs and Related Low-Dimensional Structures." J.Vacuum Science & Technology B 20GD08 : Vol.12-4. 2660-2666 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Ishikawa, H.Ishii, H.Hasegawa and T.Fukui: "Macroscopic Electronic Behavior and Atomic Arrangements of GaAs Surfaces Immersed in HCl Solution" Journal of Vacuum Science & Technology B Second Series. 12-4. 2713-2719 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Saitoh, H.Hasegawa and T.Sawada: "A Novel In-situ Characterization Method of Quantum Structures by Excitation Power Dependence of Photoluminescence." Inst.Phys.Conf.Ser.Vol.136. 795-800 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] R.Notzel, T.Fukui, H.Hasegawa, J.Temmyo and T.Tamamura: "Atomic Force Microscopy Study of Strained InGaAs Quantum Disks Self-organizing on GaAs (n11) B Substrates." Appl.Phys.Lett.65. 2854-2856 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Hasizume, H.Okada, N.-J.Wu and H.Hasegawa: "Depletion Characteristics of Direct Schottky Contacts to Quantum Wells Formed by In Situ Selective Electrochemical Process." Jpn.J.Appl.Phys.34. 1149-1152 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Okada, K.Jinushi, N.-J.Wu, T.Hasizume and H.Hasegawa: "Novel Wire Transistor Structure with In-Plane Gate Using Direct Schottky Contacts to 2DEG." Jpn.J.Appl.Phys.34. 1315-1319 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A.Malinin, H.Tomozawa, T.Hasizume and H.Hasegawa: "Characterization of DEEP Levels in Si-Doped In_xAl_<1-X> As Layrs Grown by Molecular Beam Epitaxy." Jpn.J.Appl.Phys.34. 1138-1142 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Kodama, S.Koyanagi, T.Hasizume and H.Hasegawa: "Novel Surface Passivation Scheme for Compound Semiconductor Using Silicon Interface Control Layr and Its Application to Near-Surface Quantum wells." Jpn.J.Appl.Phys.34. 1143-1148 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.-J.Wu, T.Hasizume, H.Hasegawa and Y.Amemiya: "Schottky Contacts on n-InP with High Barrier Hights and Reduced Fermi-Level Pinning by a Novel In Situ Electrochemical Process." Jpn.J.Appl.Phys.34. 1162-1167 (1995)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1996-04-15  

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