STUDY ON FLEXIBLE LAPPING AND GRAINDING TOOLS FOR MIRROR SURFACE FINISHING

1994 Fiscal Year Final Research Report Summary

• Project/Area Number: 05650107
• Research Category: Grant-in-Aid for General Scientific Research (C)
• Allocation Type: Single-year Grants
• Research Field: 機械工作・生産工学
• Research Institution: CHIBA UNIVERSITY
• Principal Investigator: MORITA Noboru CHIBA UNIVERSITY,DEPARTMENT OF ENGINEERING,RESEARCH ASSOCIATE, 工学部, 助手 (30239660)
• Co-Investigator(Kenkyū-buntansha): YOSHIDA Yoshitaro CHIBA UNIVERSITY,DEPARTMENT OF ENGINEERING,PROFESSOR, 工学部, 教授 (80174960)
• Project Period (FY): 1993 – 1994
• Keywords: Anodic spark deposition / Lapping / Grinding / Abresive grains / Monocrystalline silicon / Ceramics / Surface integrity / Aluminium substrate

Research Abstract

Anodic spark deposition (ASD) is a relatively new method of forming a ceramic coating film by means of a spark. The ceramic is deposited on the positive electrode in an electrolytic bath, which comprises an aqueous solution and dispersing ceramic fine particles applied as fine abrasive grains. According to this method, various deposition layrs composed of fine abrasives and anodic compounds can be successfully formed on a substrate without a bonding agent.
The prepared fine abrasive layrs have a high potentiality of lapping and grinding tools because they have such advantages as good adhesion to the substrate and comparatively porous structure, which plays an important role of chip pockets. However, the substrates to be deposited on are limited to metal, in particular, Al, Mg, Ti and the like because the initial reaction of ASD process closely resembles that of an anodizing process to form alumite coating.
In this study, the manufacture of new abrasive tools applying ASD and the applicat ion of them to the lapping and grinding process were investigated. The aluminum foil and wire were examined for substrate metal because ASD process was independent of the shape of substrate to be used and aluminum alloy was best metal for good adhesion and quite useful for the application.
The authors have found that ASD process causes fine abrasives rigidly fix in the deposited layr because of the formation of alumite in the same layr. The abrasive sheets were used to estimate the lapping ability of the glass material. It was found that the material removal depth depends on the kind of abrasives and the contact pressure of the wheel, and that the lapping ratio also depends on the contact pressure. The good surface integrity were accomplished under the optimum lapping condition. The authors concluded that the newly developed abrasive tools applying anodic spark discharge deposition had sufficient lapping and grinding ability for brittle materials such as glass, monocrystalline silicon and ceramics to achieve an optically smooth surface.