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1994 Fiscal Year Final Research Report Summary

Development of Micro Solar Boat Employing Ion Drag Force

Research Project

Project/Area Number 05805008
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field Applied physics, general
Research InstitutionToyota Technological Institute

Principal Investigator

TSUCHIDA Nuio  Toyota Technological Institute Faculty of Engineering, Professor, 工学部, 教授 (40023246)

Co-Investigator(Kenkyū-buntansha) 右高 正俊  豊田工業大学, 工学部, 教授 (90165994)
IMAI Koji  Toyota Technological Institute Faculty of Engineering, Professor, 工学部, 教授 (30231161)
YAMADA Yoji  Toyota Technological Institute Faculty of Engineering, Associate Professor, 工学部, 助教授 (90166744)
OHSAWA Jun  Toyota Technological Institute Faculty of Engineering, Associate Professor, 工学部, 助教授 (20176861)
MASATOSHI Migitaka  Toyota Technological Institute Faculty of Engineering, Professor (90165994)
Project Period (FY) 1993 – 1994
Keywordsion drag force / micromachine / micro-actuator / solar cell / gallium arsenide
Research Abstract

As the power source for a Micro Solar Boat (MSB) to be developed, we have fabricated a new micro solar cell, which consists of four cells made of GaAs connected in series. The size of the micro solar cell is about 700mum*900mum. The open-circuit voltage of 3.8 V was obtained, and the short-circuit current amounted to 19muA when it was illuminated by a laser beam of 2.3 mW.Since the required voltage for a driving electrodes of 20mum spacing is 3 V,the above characteristics of the micro solar cell is enough to be used in the MSB.In a seriesly-connected solar cell module, a short-circuited cell would decrease the total output voltage. To avoid this, the yield of the micro solar cells on a wafer should be high. Inspection by electron beam induced current (EBIC) images was usefully employed in evaluating the solar cells.
On the other hand, as the driving mechanism for the MSB,a pair of interdigital electrodes has been designed to facilitate a uniform flow of fluid, while a barrier layr that … More prevent charge exchange of ions was redesigned to protect most of the electrode, which results in less erosion of the metal electrode. With these considerations micro interdigital electrodes were fabricated on wafer, and fluid flow characteristics as well as current-voltage characteristics were examinedimmersed in liquid. The experiment showed, for example, that application of 3 V resulted in the fluid flow velocity of the order of 1 cm/s and the current of 0.1muA in the liquid of butyl alcohol.
In combining the two elements in an MSB,a whole structure was designed into 0.8mm*1.2mm, and process techiniques needed to complete it were developed : a via-hole techniqued to connect the interdigital electrodes on the rear surface to the micro solar cell on the front surface, and a technique to form electrodes and lead lines on undulated wafers. The completed MSBs were tested floated on water under the light beam of a high-power diode laser. The motion was recorded by a video recorder and then analyzed. Continual straight movements in an expected direction was observed for four minutes, and the average velocity was 0.1mm/s. Thus we have succeeded in developing a novel micromachine named Micro Solar Boat, which employs an ion drag effect as its driving force.
In addition, the same driving principle was applied to a rotary microactuator, where electrohydrodynamic flow by the iron drag force rotated a rotor of 4mm across. A DC motor that has a spped of 3000rpm has been successfully fabricated. Less

  • Research Products

    (20 results)

All Other

All Publications (20 results)

  • [Publications] 安藤史敏: "マイクロソ-ラボ-トの開発" 電気関係6学会東海支部連合大会論文集. 208 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 原田徳寿: "イオンドラグ力を応用したマイクロポンプ" 電気関係6学会東海支部連合大会論文集. 209 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 林信吾: "イオンドラグモータの出カトルクの解析" 電気関係学会東海支部連合大会論文集. 210 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 伊藤伸二: "マイクロソ-ラボードの開発" 電気学会全国大会論文集. 6. 175 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 田中芳和: "マイクロソ-ラボード駆動用太陽電池の開発" 電気関係学会東海支部連合大会論文集. 399 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 浜田 毅: "マイクロソ-ラボード(MSB)の試作" 電気関係学会東海支部連合大会論文集. 400 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 土田縫夫: "イオンドラグ力によるEHD流を応用したDCマイクロモータの研究" 電気学会論文誌 D. 113-D. 1442-1448 (1993)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 浜田 毅: "マイクロソ-ラボード(MSB)の試作" 電気学会全国大会論文集. (発表予定). (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] マイクロマシン研究会編(土田 他): "ミクロをめざすニューアクチュエータ(新原理で次世代を拓く)" 工業調査会, 210 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 電子デバイス活用辞典編集委員会編(右高、今井、大澤 他): "電子デバイス活用辞典" 工業調査会, 348 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] F.Ando: ""Development of a Micro Solar Boat"" 1993 Joint Convention Record ofThe Sixth Institutes Electrical and Related Engineers. 208 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Harada: ""Micro Pump Employing Ion Drag Force"" 1993 Joint Convention Record ofThe Sixth Institutes Electrical and Related Engineers. 209 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Hayashi: ""Analysis of Output Torque of Ion Drag Motor"" 1993 Joint Convention Record ofThe Sixth Institutes Electrical and Related Engineers. 210 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Itoh: ""Development of a Micro Solar Boat"" 1994 National Convention Record I.E.E.Japan. Vol.6. 175 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Tanaka: ""Development of Driving Solar Cells for a Micro Solar Boat"" 1994 Joint Convention Record of The Six Institutes Electrical and Related Engineers. 399 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Hamada: ""Trial Manufacturing of Micro Solar Boat (MSB) "" 1994 Joint Convention Record of The Six Institutes Electrical and Related Engineers. 400 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Hamada: ""Fabrication of a Micro Solar Boat(MSB) "" 1995 National Convention Record I.E.E.Japan. Vol.7 (to be presented.). (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Tsuchida: ""Studies on DC Micro Motor Employing EHD Stream by Ion Drag Force"" Trans.I.E.E.of Japan. Vol.113D. 1442-1448 (1993)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Tsuchida et al.: "New Actuators Aiming at Micronizing". Kogyo Chosakai Publishing Co.LTD., (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Migitaka et al.: "Denshi Debaisu Katsuyou Jiten"26HD02 : 1994. Kogyo Chosakai Publishing Co.LTD.,

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1996-04-15   Modified: 2017-03-29  

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