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1995 Fiscal Year Final Research Report Summary

Manufacturing of Microstructures Produced by UV Sensitive Photopolymer Using Laser Beam Writing

Research Project

Project/Area Number 06452159
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field 機械工作・生産工学
Research InstitutionNagoya University

Principal Investigator

YAMAUCHI Katsumi  Nagoya University, School of Engineering, Professor, 工学部, 教授 (40023056)

Co-Investigator(Kenkyū-buntansha) NAKAMOTO Takeshi  Nagoya University, School of Engineering, Associate Professor, 工学部, 講師 (30198262)
Project Period (FY) 1994 – 1995
KeywordsMicro Part / UV Photopolymer / Focused Laser Beam / High Aspect Ratio / Three Dimensional Part / Beam Writing / Absorption of Light
Research Abstract

This research work deals with the development of a simple and practical method for manufacturing micro mechanical parts. In this method, high aspect ratio (height/width) polymer structures and stacked three dimensional polymer structures are produced using a direct focused UV laser beam writing on the surface of liquid photopolymer. The irradiated portion of the photopolymer is solidified and it becomes a polymer structure. At first, the solidified shapes of the polymer are examined both theoretically and experimentally. Next, the optimum conditions to produce high aspect ratio and stacked three dimensional micro polymer structures are verified. At last, examples of structures are produced by using these conditions such as micro gear and micro bent pipe.

  • Research Products

    (24 results)

All Other

All Publications (24 results)

  • [Publications] K.Yamaguchi: "The Accuracy of Micro-molds Produced by a UV Laser Induced Polymerization" Trans.of ASME,J.of Engineering for Industry. 116. 370-376 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 中本 剛: "紫外線感光性樹脂を使ったマイクロストラクチュアの製造(第2報)" 日本機械学会論文集C編. 60. 2407-2414 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] P.Abraha: "The Effect of Physical Parameters on the Fabrication of Microstructures by Photo Polymerization" Advancement of Intelligent Production. 564-569 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Yamaguchi: "Consideration on the Accuracy of Fabricating Microstructures Using UV Laser Induced Polymerization" 5th International Symposium on Micro Machine and Human Science Proceedings. 171-176 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Nakamoto: "The Solidified Shape Produced by UV Laser Induced Polymerization in a Direct Writing Method" Proc.of 1994 Winter Annual Meeting of the ASME. PED.68. 433-441 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 山口 勝美: "紫外線感光性樹脂を使ったマイクロストラクチュアの製造(第3報)" 日本機械学会論文集C編. 61. 304-310 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Yamaguchi: "Micromachining Using UV Laser Induced Polymerization" Proc.of 2th Int.Symposium on Microstructures and Mechanical Properties of New Engineering Material. 535-542 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Yamaguchi: "Consideration on the Optimum Conditions to produce Micromechanical Parts by Photo Polymerization Using Direct Focused Beam Writing" Proc.of 6th International Symposium on Micro Machine and Human Science. 71-76 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 山口 勝美: "光造形による形状創成" 精密工学会誌. 61. 1385-1388 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Yamaguchi: "Manufacturing of Micromechanical Structures Produced by UV Laser Induced Polymerization Using Direct Focused Beam Writing" Proc.of 1995 Winter Annual Meeting of the ASME. MED-2. 55-67 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 中本 剛: "紫外線感光性樹脂を使ったマイクロストラクチュアの製造(第4報)" 日本機械学会論文集C編. 62. 677-682 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 中本 剛: "紫外線感光性樹脂を使ったマスクパターン転写法とビーム描画法によるマイクロ部品の製作" 高分子論文集. 53. 209-217 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Yamaguchi, T.Nakamoto, P.A.Abraha and S.Mibu: "The Accuracy of Micro-molds Produced by a UV Laser Induced Polymerization." Transactions of the ASME,Journal of Engineering for Industry. Vol.116, No.3. 370-376 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Nakamoto, K.Yamaguchi, P.A.Abraha, Y.Matsuda and Karyawan: "Manufacturing of Micro Structures Using UV Sensitive Photopolymer (2nd Report, Writing with Various Beam Shapes) (in Japanese)." Transactions of the Japan Society of Merchanical Engineers (C Series). Vol.160, No.575. 2407-2414 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] P.A.Abraha, T.Nakamoto, K.Yamaguchi, and Karyawan: "The Effect of Physical Parameters on the Fabrication of Microstructures by Photo Polymerization" Advancement of Intelligent Production. 564-569 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Yamaguchi, T.Nakamoto, and P.A.Abraha: "Consideration on the Accuracy of Fabricating Microstructures Using UV Laser Induced Polymerization." 5th International Symposium on Micro Machine and Human Science Proceedings. 171-176 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Nakamoto, K.Yamaguchi, P.A.Abraha, Y.Matsuda and Karyawan: "The Solidified Shape Produced by UV Laser Induced Polymerization in a Direct Writing Method." Proc.of 1994 Winter Annual Meeting of the ASME. Vol.PED-68. 433-441 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Yamaguchi, T.Nakamoto, P.A.Abraha, Karyawan and A.Ito: "Manufacturing of microstructures Using UV Sensitive Photopolymer (3rd Report, Writing with a Focused Beam) (in Japanese)." Transaction of the Japan Society of Mechanical Engineers (C Series). Vol.61, No.581. 304-310 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Yamaguchi and T.Nakamoto: "Micromachining Using UV Laser Induced Polymerization." Proc.of 2nd Int.Symposium on Microstructures and Micromechanical Properties of New Engineering Material. 535-542 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Yamaguchi, T.Nakamoto and P.A.Abraha: "Consideration on the Optimin Conditions to Produce Micromechanical Parts by Photopolymerization Using Direct Focused Beam Writing." Proc.of 6th International Symposium on Micro Machine and Human Science. 171-176 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Yamaguchi and T.Nakamoto: "Microforming by Photopolymerization (in Japanese)." Journal of the Japan Society for Precision Engineering. Vol.61, No.10. 1385-1388 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Yamaguchi, T.Nakamoto, P.A.Abraha, Karyawan and A.Ito: "Manufacturing of Micromechanical Structures Produced by UV Laser Induced Polymerization Using Direct Focused Beam Writing." Proc.of 1995 Winter Annual Meeting of the ASME. Vol.MED-2. 55-67 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Nakamoto, K.Yamaguchi, P.A.Abraha, A.Ito and K,Mishima: "Manufacturing of Microstructures Using UV Sensitive Photopolymer (4th Report, Manufacturing of 3-Dimensional Microstructures by Writing with a Focused Beam) (in Japanese)." Transaction of the Japan Society of Mechanical Engineers (C Series). Vol.162, No.594. 667-682 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Nakamoto, K.Yamaguchi and P.A.Abraha: "Manufacturing of Micromechanical Parts Produced by UV Laser Induced Polymerization Using Mask-based Method and Direct Focused Bean Writing Method (in Japanese)." Japanese Journal of Polymer Science and Technology. Vol.53, No.4. 209-217 (1996)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1997-03-04  

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