• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to project page

1995 Fiscal Year Final Research Report Summary

Analysis of Interfacial Phenomena between Plasmas and Solid Surfaces with Microstructure

Research Project

Project/Area Number 06452422
Research Category

Grant-in-Aid for General Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field プラズマ理工学
Research InstitutionKYOTO UNIVERSITY (1995)
Kyoto Institute of Technology (1994)

Principal Investigator

TACHIBANA Kunihide  Kyoto Univ., Graduate School of Engineering, Professor, 工学研究科, 教授 (40027925)

Co-Investigator(Kenkyū-buntansha) HASHIGUCHI Seishiro  Kyoto Inst.Tech., Fac.Eng.& Design, Associate Professor, 工芸学部, 助教授 (90033836)
Project Period (FY) 1994 – 1995
KeywordsPlasma processing / CVD / Etching / Radical diagnostics / Surface diagnostics / Surface reactions / Microstructure
Research Abstract

Firstly, fluxes of radicals transported from plasmas to substrates were measured as the boundary condition for surface reactions. The radicals measured are including atomic species such as H,O and N,and molecular species such as SiH_2 and CF_2. Secondly, a new method named FT-IR phase modulated spectroscopic ellipsometry (PMSE) has been developed for in-situ surface diagnostics By this method chemical bonding states on the surface are detected with a high sensitivity.
By using these method, surface reactions in the etching of Si wafer was investigated as the first example. A thin fluorinated overlayr was detected on a substrate placed on the self-biased RF electrode, which was irradiated by ions bombarding with appreciable energy in addition to neutral radicals. On the other hand, polymer formation was observed on a substrate placed on the grounded electrode with less ion bombardment. These phenomena are suggested to occur at the bottom and the side wall, respectively, of a micro-trench on a patterned substrate. The effect of ion bombardment are going to be investigated in detail by using a mass spectrometer placed at the bottom of a substrate with micro channels of high aspect ratios.
In the other example, roles of SiH_2 and H radicals were studied in the deposition of amorphous and polycrystalline Si films. The characteristics of deposited films were analyzed by in-situ spectroscopic ellipsometry. As an important conclusion, it has been recognized that hydrogen atoms work both in the etching of amorphous tissue and in the chemical annealing of stressed structures for enhancing the crystal growth.
Through these studies some methods have been considered for increasing the spatial resolution in the gas-phase and surface diagnostics. With the improved resolution this project has been continued for better understandings of the interaction of plasmas with micro-structured substrates.

  • Research Products

    (12 results)

All Other

All Publications (12 results)

  • [Publications] K. Tachibana: "Detection of Hatoms in RF-discharge SiH_4, CH_4, H_2 plasmas by two-photonabsorption laser-inducedfluorescence spectroscopy" Japanese Journal of Applied Physics. 33. 4329-4334 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K. Tachibana: "Insituellipsometric monitoring of the growth of polycrystalline silicon thinfilms by RF plasma chemical vapor deposition" Japanese Journal of Applied Physics. 33. 4191-4194 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K. Tachibana: "Spatio-temporal measurement of excited Xe(1^<S4>) atoms in a discharge cell of a plasmadisplay panel by laser spectroscopic microscopy" Applied Physics Letters. 65. 935-937 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K. Tachibana: "Ion impact energy distributions and properties of amorphous hydrogenated carbonthin films preparedinaself-biasedrf discharge" Japanese Journal of Applied Physics. 33. 6341-6349 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K. Tachibana: "Measurement and calculation of SiH_2 radical density in SiH_4 and Si_2H_6 plasma for the deposition of hydrogenated amorphous silicon thin film" Japanese Journal of Applied Physics. 34. 4239-4246 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K. Tachibana: "Construction and performance of a Fourier-transform infrared phase-modulated ellipsometer for in process surface diagnostics" Japanese Journal of Applied Physics. 35(掲載予定). (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Tachibana: "Detection of Hatoms in RF-discharge SiH_4, CH_4, H_2 plasmas by two-photon absorption laser-induced fluorescence spectroscopy" Japanese Journal of Applied Physics. 33-7B. 4329-4334 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Tachibana: "In situ ellipsometric monitoring of the growth of polycrystalline silicon thin films by RF plasma chemical vapor deposition" Japanese Journal of Applied Physics. 33-7B. 4191-4194 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Tachibana: "Spatio-temporal measurement of excited Xe (1s4) atoms in a discharge cell of a plasma display panel by laser spectroscopicmicroscopy" Applied Physics Letters. 65-8. 935-937 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Tachibana: "Ion impact energy distributions and properties of amorphousydrogenated carbon thin films preparedinaself-biased rfdischarge" Japanese Journal of Applied Physics. 33-12. 6341-6349 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Tachibana: "Measurement and calculation of SiH_2 radical density in SiH_4 and Si_2H_6 plasma for the deposition of hydrogenated amorphoussilicontinfilm" Japanese Journal of Applied Physics. 34-8A. 4239-4246 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Tachibana: "Construction and performance of a Fourier-transform infrared phase-modulated ellipsometer for in process surface diagnostics" Japanese Journal of Applied Physics. 35-6 (to be published). (1996)

    • Description
      「研究成果報告書概要(欧文)」より

URL: 

Published: 1997-03-04  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi