1995 Fiscal Year Final Research Report Summary
Development of simultaneous in-situ measurements of size, density, and refractive index of particles in rf silane plasmas using a polarization-sensitive laser-light-scattering method
| Project/Area Number |
06555023
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| Research Category |
Grant-in-Aid for Developmental Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
Applied physics, general
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| Research Institution | KYUSHU UNIVERSITY |
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Principal Investigator |
SHIRATANI Masaharu KYUSHU UNIVERSITY,FACULTY OF ENGINEERING,ASSOCIATE PROFESSOR, 工学部, 助教授 (90206293)
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| Co-Investigator(Kenkyū-buntansha) |
KONDOH Kaoru RION INCORPRATION,RESEARCHER, 環測技術部, 主任
KAWASAKI Hiroharu KYUSHU UNIVERSITY,FACULTY OF ENGINEERING,RESEARCH ASSOCIATE, 工学部, 助手 (10253494)
FUKUZAWA Tsuyoshi KYUSHU UNIVERSITY,FACULTY OF ENGINEERING,RESEARCH ASSOCIATE PROFESSOR, 工学部, 助手 (70243904)
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| Project Period (FY) |
1994 – 1995
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| Keywords | laser-light-scattering / two demensional measurement / simultaneous / polarization / particles / plasma CVD / plasma process / silane plasma |
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| Research Abstract |
A polarization-sensitive laser-light-scattering method is developed for simultaneous in-situ measurements of properties (size, size dispersion, density and refractive index), and two dimensional spatial distributions of size and density of particles formed in processing plasmas. The developed system is applied to observe the growth processes of particulates in a range of their size larger than about 10 nm in rf silane plasmas. A size, a size dispersion (logarithm of a standard deviation of size), a density, and a refractive index of particulates in the plasmas are found to be 10-200 nm, about 0.1,10^7-10^9cm^<-3> and about 3-5i, respectively. The developed two demensional system can view the whole discharge area of 50*200mm^3 illuminated by a sheet laser beam with a spatial resolution of 2*2*2mm^3 and a time resolution of 33 ms, and measure particles larger than 50 nm in size and higher than 10^6cm^<-3> in density. The former such values agree fairly well with ones deduced from scanning electron microscopic (SEM) observation. These particles grow through three phases of nucleation and initial growth, rapid growth and growth saturation. Co-existence of two size-groups of particulates with narrow size dispersions during and after the rapid growth phase verified by the SEM observation may be explained by a model taking into account coagulation between oppositely charged particulates.
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