1995 Fiscal Year Final Research Report Summary
Development of Simultaneous 3-axis control ultraprecision machine tool based on principle of Walking Drive
| Project/Area Number |
06555039
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| Research Category |
Grant-in-Aid for Developmental Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
機械工作・生産工学
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| Research Institution | Kobe University |
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Principal Investigator |
MORIWAKI T Kobe University, Mechanid Engineering, Professor, 工学部, 教授 (00031104)
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| Co-Investigator(Kenkyū-buntansha) |
和田 龍児 豊田工機, 研究員
SHAMOTO T Kobe University, Mechanical Engineering, Associate Professor, 工学部, 助教授 (20216146)
WADA R Toyoda Machine Works, Research & Developmen, Director
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| Project Period (FY) |
1994 – 1995
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| Keywords | Walking drive / Ultraprecision machine tool / Piezoelectric actuator / Precision feed device / Ultraprecision positioning / Nano technology / Motion acuracy |
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| Research Abstract |
A simultaneous 3-axis control ultraprecision XYrheta table has been developed based on the principle of Walking Drive, and its fundamental characteristics are investigated. The major research results are summarized as follows ;
1. Development of high stiffness ultraprecision XYrheta table
Three-axis control XYrheta table was newly developed, which is based on the principal of Walking Drive proposed by the investigators. The device consists of a flat plate table and three sets of driving units, each of which is equipped with two pairs of driving blocks. One driving block has three piezoelectric (PZT) actuators to clamp and feed the table in two directions so that the table can be driven in X,Y and rheta directions by simultaneously controlling the motion of the actuators. Since the table is supported by PZT actuator directly, it has high stiffness of 25kgf/um in both X and Y directions. Although the stroke of the PZT actuator itself is 3.5 mum/35V, the table can be driven for the storkes of <plus-minus>50mm, <plus-minus>20mm and <plus-minus>10ﾟ in X,Y and rheta directions respect
2. Development of realtime motion controller for XYrheta table
A realtime motion controleer was developed to control complicated motion of PZT actuators. The controller is so designed that the motion command of feed rates of X,Y and rheta axs is automatically processed to control the motion of PZT actuators. High motion accurcy of nm order was achived by applying the repetitive learning control scheme.
3. Development of ultraprecision turning machine with XYrheta control
An ultraprecision turning machine was developed, which basically consists of an ultraprecision air spindle and the XYrheta table developed. Some diamond turning tests were carried out to finish the mirror surfaces of oxygeon free copper.
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