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1996 Fiscal Year Final Research Report Summary

DEVELOPMENT OF A HIGH-PRECISION ELECTRON DENSITY MEASUREMENT TECHNIQUE FOR MULTILAYER FILMS

Research Project

Project/Area Number 06555092
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section試験
Research Field Electronic materials/Electric materials
Research InstitutionTOKYO INSTITUTE OF TECHNOLOGY

Principal Investigator

HASHIZUME Hiroo  TOKYO INSTITUTE OF TECHNOLOGY,MATERIALS AND STRUCTURE LABORATORY PROFESSOR, 応用セラミックス研究所, 教授 (10011123)

Co-Investigator(Kenkyū-buntansha) SAKATA Osami  TOKYO INSTITUTE OF TECHNOLOGY,MATERIALS AND STRUCTURE LABORATORY RESEARCH ASSOCI, 応用セラミックス研究所, 助手 (40215629)
Project Period (FY) 1994 – 1996
KeywordsX-RAY FRESNEL REFLECTION / ELECTRON DENSITY PROFILE THROUGH THIN FILMS / INTEFACE ROUGINESS / CORRELATED ROUGHNESS STRUCTURE / SURFACE STEP / SURFACE PROFILE REPLICATION / MAGNETIC MULTILAYER
Research Abstract

An X-ray reflectometer with a crystal monochromator and analyzer has been designed for high-precision determination of electron of density profiles in multilayr films. Use of an asymmetric channel-cut silicon monochromator resulted in an X-ray beam intensity one order of magnetitue greater than in the conventional design. For data analysis a package of computer codes has been prepared using the scattering theory based on the distorted-wave Born approximation, which allows us to determine the interface roughness and its correlations in the in-plane and out-of-plane directions from specular and non-specular diffuse scattering data collected over a large range of scattering angle including the total-external reflection region. The system has bee applied to the determination of layr thicknesses and their variation, interface roughness in semiconductor SiGe/Si superlattices and magnetic multilayrs including Gd Co and Gd layrs, an Al/C nanolayrs. It was found that the replication of surfacestep structure on a vicinal siicon substrate strongly depends on the alloy composition of Ge in the SiGe layr. The system was proved useful in the structure characterization of magnetic multilayrs for X-ray resonant magnetic scattering experiments at synchrotron sources. It was also applied to a model-independent determination of electron density profiles in Al/C films from anomalous dispertion X-ray reflectometry data.

  • Research Products

    (12 results)

All Other

All Publications (12 results)

  • [Publications] A.Nikulin他: "High-resolution triple-crystal X-ray diffraction expcricnents performed at the Anstralian beamline facilitry on a silicon sainpec" J.Applied Crystallopaply. 28. 57-60 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A.Nikulin他: "High-resolution mapping of two-dicnensirial lattice distortions in ion-implanted crystals from X-ray diffraction data" J.Applied Crystallopaply. 28. 803-811 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Ohkawa他: "Anomalous disprsim X-ray reflectometry for Aelc multilayas" Plysica. B221. 416-419 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Ishimatsu他: "X-ray reflectivity at the L edges of Gd" J. Synch. Radiation. 4. (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] P.M.Reimer他: "Interfacial ronyhness of Si_<1-x>Ge_x/Si multilayu Structures" J. Phys. Cond. Matt.(1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Hashizume他: "X-ray ciraular dichroic Bragg reflections from GdCo multilayas" Jpn. J. Appl. Phys.(1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] A.Nikulin et al.: "High-resolution triple crystal diffraction experiments performed at the Australian beamline facility on a silicon crystal" J.Appl.Crystallogr. 28. 57-60 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] A.Nikulin et al.: "High-resolution mapping of two-dimensional lattice distortions in ion-implanted crystals from X-ray diffraction data" J.Appl.Crystallogr.28. 803-811 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Ohkawa et al.: "Anomalous disperison X-ray reflectometry for Al/C multilayrs" Physica. B221. 416-419 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Ishimatsu et al.: "X-ray reflectivity at the L edges of Gd" J.Synch.Rad.4. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] P.M.Reimer et al.: "Interfacial roughness of Si_<1-x>Ge_x/Si multilayr structures" J.Phys.Cond.Matt.(1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Hashizume et al.: "X-ray circular dichroic Bragg reflections from GdCo multilayrs" Jpn.J.Appl.Phys.(1997)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1999-03-09  

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