• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to project page

1995 Fiscal Year Final Research Report Summary

Application of Wide Bandgap Semiconductor SiC for Power Devices

Research Project

Project/Area Number 06555095
Research Category

Grant-in-Aid for Developmental Scientific Research (B)

Allocation TypeSingle-year Grants
Research Field Electronic materials/Electric materials
Research InstitutionKYOTO UNIVERSITY

Principal Investigator

MATSUNAMI Hiroyuki  Kyoto Univ., Graduate School of Eng., Professor, 工学研究科, 教授 (50026035)

Co-Investigator(Kenkyū-buntansha) KIMOTO Tsuneobu  Kyoto Univ., Graduate School of Eng., Research Associate, 工学研究科, 助手 (80225078)
TOSHIMOTO Masahiro  Kyoto Univ., Graduate School of Eng., Lecturer, 工学研究科, 講師 (20210776)
FUYUKI Takashi  Kyoto Univ., Graduate School of Eng., Associate Professor, 工学研究科, 助教授 (10165459)
Project Period (FY) 1994 – 1995
KeywordsSilicon Carbide / Power Device- / Thermal Oxidation / Ion Implantation / MOSFET / Schottky Barrier Diode / pn Junction Diode
Research Abstract

SiC is a promising semiconductor for advanced power device applications owing to its outstanding properties. Thermal oxidation and fabrication of fundamental SiC devices using high-quality epilayrs were investigated.
Thermal oxides of SiC have very high resistivity of 5x10^<16>OMEGAcm and break-down field of 9.6MV/cm. The interface state density, which was estimated from the capacitance-voltage characteristics of MOS diodes, was 5x10^<10> cm^<-2>eV^<-1> for n-type SiC and 4x10^<11>cm^<-2>eV^<-1> for p-type SiC.
The pn junction diodes formed by N ion implantation and epitaxial growth exhibited high breakdown voltages of 615V and 1720V,respectively. By employing edge termination utilizing B ion implantation, the reverse characteristics of SiC Schottky rectifiers were significantly improved. An excellent SiC Schttky rectifier with a 1750V breakdown voltage and a 5mOMEGAcm^2 on-resistance was realized. Inversion-type n-channel SiC MOSFET showed very good characteristics with a transconductance of 1.0mS/mm.

  • Research Products

    (12 results)

All Other

All Publications (12 results)

  • [Publications] H. Matsunami: "High-performance of high-voltage 4H-SiC Schottky barrier diodes" IEEE Electron Device Lett.16. 280-282 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H. Matsunami: "Nitrogen ion implantation into 6H-SiC and application to high-temperature, radiation-hard diodes" Jpn. J. Appl. Phys.34. 3036-3042 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H. Matsunami: "The effects of N+ dose in implantation into 6H-SiC epilayers" J. Electron. Mat.24. 235-240 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H. Matsunami: "Semiconductor silicon carbide for power electronic application" Ext. Abstr. Int. Conf. Solid State Devices and Materials-1995. 40-42 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H. Matsunami: "Efficient power Schottky rectifiers of 4H-SiC" Proc. 7th Int. Sympo. on Power Semiconductor Devices and IC's. 101-106 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H. Matsunami: "Ion-implantation into α-SiC epilayers and application to high-temperature, high-voltage devices" Proc. 22nd Int. Sympo. on Compound Semiconductors. (印刷中). (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Matsunami: "High-performance of high-voltage 4H-SiC Schottky barrier diodes" IEEE Electron Device Lett.16. 280-282 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Matsunami: "Nitrogen ion implantation into 6H-SiC and application to high-temperature, radiation-hard diodes" Jpn.J.Appl.Phys.34. 3036-3042 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Matsunami: "The effects of N+ dose in implantation into 6H-SiC epilayrs" J.Electron.Mat.24. 235-240 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Matsunami: "Semiconductor silicon carbide for power electronic application" Ext.Abstr.Int.Conf.Solid State Devices and Materials. 40-42 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Matsunami: "Efficient power Schottky rectifiers of 4H-SiC" Proc.7th Int.Sympo.on Power Semiconductor Devices and IC's. 101-106 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Matsunami: "Ion-implantation into alpha-SiC epilayrs and application to high-temperature, high-voltage devices" Proc.22nd Int.Sympo.on Compound Semiconductors. (in press). (1996)

    • Description
      「研究成果報告書概要(欧文)」より

URL: 

Published: 1997-03-04  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi