1995 Fiscal Year Final Research Report Summary
Development of a Simple Monitoring Device for Ultra-Trace Silicate lon in Quality Control High-Purity Water Used in Semiconductor Production.
| Project/Area Number |
06555252
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| Research Category |
Grant-in-Aid for Developmental Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Research Field |
工業分析化学
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| Research Institution | Tohoku University |
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Principal Investigator |
HOSHINO Hitoshi Tohoku University, Faculty of Engineering, Associate Professor., 工学部, 助教授 (20124620)
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| Co-Investigator(Kenkyū-buntansha) |
SUGAWARA Katsuyoshi Miyagi Oki Elect. Co. Manager, 係長
KOBAYASHI Setsu Miyagi Prefectural Institute of Technology, Chief Scientist, 総括研究員
KONNO Shinichi Ihara Rinken Ltd. Manager, 係長
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| Project Period (FY) |
1994 – 1995
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| Keywords | Silicate / Silica / High-Purity Water / Quality Control / Monitoring |
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| Research Abstract |
The aim of this project is to develop a simple monitoring device for quantitation of ultra-trace (sub-ppb to ppb) silicate ion in high-purity water using flow preconcentration-spectrophotometric detection system. The basic ideas and the underlying chemistry are :
1.Silicate ion is converted to molybdosilicate blue which has the absorption maximum in near infrared region, at 830nm. Thus, one can devise a cheap detector based on the optosemiconductors, such as LEDs and photodiodes (PD).
2.Anionic molybdosilicate blue is adsorbed on cellulose-type materials as the ion-pair with a large organic cation which is very readily desorbed (eluted) with certain organic solvents. These leads the high-performance flow preconcentration systems.
The optimized system consists of two pump units for sampling and elution, respectively, and a short column (4 cm) packed with ashless pulp. Molybdosilicate blue in 30 ml is concentrated on the ashless pulp column as an ion-pair with octyltrimethyl ammonium ion and the ion-pair is eluted with 80 wt% acetonitrile-water mixture down to the LED-PD detector operated at 830nm.
In order to ensure the practical capability, the prototype equipment is now under field testing in some semiconductor production manufacturers and electric power plants.
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