Co-Investigator(Kenkyū-buntansha) |
YAMAMOTO Toshikazu Dept.of Electronic Engineering, Gunma University, Assistant, 工学部, 助手 (40143200)
ISHIKAWA Harunori Dept.of Medical Science Gunma University, Professor, 医学部, 教授 (90010058)
ITO Takefumi Dept.of Electronic Engineering, Gunma University, Professor, 工学部, 教授 (60005907)
SASAKI Yoshisato Dept.of Electronic Engineering, Gunma University, Professor, 工学部, 教授 (30008445)
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Research Abstract |
The purpose of this project is to develop a cotact type soft x-ray microscope for observing fine alive biological samples. The laser produced plasma and the synchrotron orbit radiation have been considered for sources in the soft x-ray microscope. In this project we employed a Z-pinch plasma facility as the soft X-ray source because of its easy handing, high efficiency of the X-ray production, variability of the wave length and low cost in construction. Main results are followings ; (1) A plasma focus facility in which a fast acting valve for additional high Z gas puffing was mounted was developed, and plasmas of various high ion stage such as hydrogen-, helium-and lithium-like of N,C,O,Ne, Ar or Al were produced. The plasma density and temperature were 10^<20>-10^<21>/cm^3 and several keV,respectively. (2) Diagnostic methods such as an imaging spectrometer, a pinhole camera which enabled to evaluate the soft x-ray intensity quantitatively, a new concept x-ray imaging system in framing and in streak mode were developed. (3) Using those diagnostic tools, characterization of the soft x-rays generated by the plasma focus facility was carried out. Reproducibility of the soft x-ray generation was also examined. (4) Characteristics of filters and photoresists for the soft x-rays were surveyed experimentally and theoretically. (5) Based on information obtained with the diagnostics, we constructed a soft x-ray microscope system and examined its performance. (6) The system was examined using a biological samples, a fine whisker grown on the dragonfly's wing and yeast. The transcribed pattern on the photoresist was observed with an atomic force microscope. The spatial resolution of the system is 0.2 mu m Ar K-lines (-4*) as an the x-ray source and PMMA as the photoresist were employed.
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