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1995 Fiscal Year Final Research Report Summary

Property Control of Diamond-like Carbon Thin Films Synthesized by High Density Plasma

Research Project

Project/Area Number 06650739
Research Category

Grant-in-Aid for General Scientific Research (C)

Allocation TypeSingle-year Grants
Research Field Inorganic materials/Physical properties
Research InstitutionTokyo Institute of Technology

Principal Investigator

TANABE Yasuhiro  Tokyo Institute of Technology, Research Laboratory of Engineering Materials, Associate Professor, 工業材料研究所, 助教授 (70163607)

Co-Investigator(Kenkyū-buntansha) TAMURA Hideki  Tokyo Institute of Technology, Research Laboratory of Engineering Materials, Ass, 工業材料研究所, 助教授 (30188437)
SAWAOKA Akira  Tokyo Institute of Technology, Research Laboratory of Engineering Materials, Pro, 工業材料研究所, 教授 (40029468)
Project Period (FY) 1994 – 1995
KeywordsCarbon thin film / Property / sp^2 / sp^3 bonds / Electron beam / Plasma / Control
Research Abstract

Recently, many types of diamond and diamond-like carbons are synthesized by various methods. However, the properties of the synthesized thin films, the ratio of sp^2/sp^3 bonds and also the relationship between the properties and the synthesis condition are still remained unclear.
In this study, we concerned the effect of synthesis condition on the ratio, physical and chemical properties of the films. MPD Arc-Jet (Magneto Plasma Dynamic Arc-Jet), which was developed for the space thruster, was used for the synthesis, because of the following reasons : (1) It can produce plasma using only pure hydro carbon gases, (2) Equipment for synthesizing copper thin films and producing a pulsed electron beam can be attached to the MPD Arc-Jet easily.
Summarizing the results as follows ; the ratio can be controlled by controlling the substrate temperature, bias potential of the substrate, and also so-called in situ modification using CF_4 gas. By changing the ratio, density, hardness and electrical conductivity can be controlled.
In a research for shock treatment of carbon and for carbon plasma by electrical explosion, transformation of graphite carbon into diamond was realized easily in a case of coexisting with copper. Copper usually act as a heat tank, however, it really seems to act as a substrate for epitaxy growth. Therefore, this hypothesis is applied to this synthesis in MPD Arc-Jet : graphite layr is sandwiched between two copper layrs synthesized by MPD Arc-Jet and a pulsed electron beem is exposed to the sandwiches type films. Particles, in a small area, consisting with only sp^3 bond canbe detected by Raman spectroscopy.
We have to advance this technique and research the role of copper in this transformation.
We all thank Dr.G.BURKHARD for his grate assistance in synthesizing materials, etc.

  • Research Products

    (15 results)

All Other

All Publications (15 results)

  • [Publications] G.BURKHARD 他: "A Modified MPD-Arcjet System for Thin Film Deposition of Carbon and Copper" Report of RLEM TIT. No.19. 245-261 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] G.BURKHARD 他: "Formation of Diamond-like Carbon Bonds by Pulsed Electron Beam Annealing of Microcrystalline Carbon-Copper Bilayer Film System" J.Mate.Sci.Lett.13. 1281-1283 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.TANABE 他: "Characterization and Modification of Amorphous Carbon Films Consisteing of sp^2 and sp^3 Bonds using MPD Arc-Jet" Jpn.J.Appl.Phys.33. 6684-6690 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] G.BURKHARD 他: "Carbon Phase Transition by Dynamic Shock Compression of a Copper/Graphite Powder Mixture" Jpn.J.Appl.Phys.33. L876-L879 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] G.BURKHARD 他: "Formation of Cubic Carbon by Dynamic Shock Compression of a Diamond/Amorphous Carbon Powder Mixture" Jpn.J.Appl.Phys.33. 5875-5885 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.MIYAKAWA 他: "Anisotropic Heating of a Copper and Graphite Powder Mixture during an Electrical Colum Explosion" Jpn.J.Appl.Phys.34. 2004-2005 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] G.Burkhard 他: "Carbon Phase Transitsion by dynamic Shock Compression of a Copper/Graphite Powder Mixture" Jpn.J.Appl.Phys.33. L876-L879 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] G.Burkhard 他: "Formation of Cubic Carbon by Dynamic Shock Compression of a Diamond/Amorphous Carbon Powder Mixture" Jpn.J.Appl.Phys.33. 5875-5885 (1994)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Miyakawa 他: "Anisotropic Heating of a Copper and Graphite Powder Mixture during an Electrical Column Explosion" Jpn.J.Appl.Phys.34. 2004-2005 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] G.Burkhard, H.Tamura, Y.Tanabe, A.B.Sawaoka, K.Uematsu and S.Ohmura: "A Modified MPD-Arcjet System for Thin Film Deposition of Carbon and Copper" Report of RLEM TIT. No.19. 245-261 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] G.Burkhard, H.Tamura, Y.Tanabe, A.B.Sawaoka, K.Uematsu and S.Ohmura: "Formation of Diamond-like Carbon Bonds by Pulsed Electron Beam Annealing of Microcrystalline Carbon-Copper Bilayr Film System" J.Mater.Sci.Lett.13. 1281-1283 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Tanabe, G.Burkhard, T.Ishikura, K.Tsunoda, H.Hasuo, M.Tamaru, H.Tamura, A.Sawaoka and K.Uematsu: "Characterization and Modification of Amorphous Carbon Films Consisting of sp^2 and sp^3 Bonds Using Magneto-Plasma Dynamic Arc-Jet" JJAP. 33. 6684-6690 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] G.Burkhard, K.Dan, Y.Tanabe, A.B.Sawaoka and K.Yamada: "Carbon Phase Transition by Dynamic Shock Compression of a Copper/Graphite Powder Mixture" JJAP. 33. L876-L879 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] G.Burkhard, K.Dan, Y.Tanabe, A.B.Sawaoka and K.Yamada: "Formation of Cubic Carbon by Dynamic Shock Compression of a Diamond/Amorphous Carbon Power Mixture" JJAP. 33. 5875-5885 (1994)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Miyakawa, G.Burkhard, H.Tamura, Y.Tanabe and A.B.Sewaoka: "Anisotropic Heating of a Copper and Graphite Powder Mixture during an Electrical Column Explosion" JJAP. 34. 2004-2005 (1995)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1997-03-04  

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