1996 Fiscal Year Final Research Report Summary
Fabrication of thin film like an education of an embryo by using the surface acoustic waves.
| Project/Area Number |
07455136
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| Research Category |
Grant-in-Aid for Scientific Research (B)
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| Allocation Type | Single-year Grants |
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| Section | 一般 |
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| Research Field |
Electronic materials/Electric materials
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| Research Institution | YAMANASHI UNIVERSITY |
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Principal Investigator |
NAKAGAWA Yasuhiko Faculty of Engineering, YAMANASHI UNIVERSITY Professor, 工学部, 教授 (50006277)
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| Co-Investigator(Kenkyū-buntansha) |
KAKIO Shouzi Faculty of Engineering, YAMANASHI UNIVERSITY Assistant Researcher, 工学部, 助手 (70242617)
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| Project Period (FY) |
1995 – 1996
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| Keywords | Surface Acoustic Waves / Thin Film / Phase Grating / Thin Film Fabrication like an Education of An Embryo |
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| Research Abstract |
By depositing a thin film on a substrate in which a surface acoustic wave is excited, we can fabricate the thin film which shows a large refractive index and the photo elastic constants compared with the film which was deposited without the surface acoustic waves. This phenomenon is like an education of an embryo in mankind.
As a results, we found a method of controlling the photo elastic constants of Nb205 thin film using a surface acoustic waves, which had not been reported until now. It was confirmed theoretically and experimentally that the photo elastic constants of Nb205 thin film increase 3.0 to 6.0 times when the surface acoustic wave is excited on the thin film during the sputtering process.
We found more that a phase grating can be constructed by exciting the standing surface acoustic waves on a substrate during deposition of a Ta205 thin film by RF sputtering. The phase grating was formed with variations in film thickness of 1.78% and refractive index of 12.5% with a period of half the wavelength of surface acoustic waves. We can applied to the two dimensional phase grating using this phenomenon.
These results are very interesting and applicable to the optical devices as a new application of surface acoustic waves.
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