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1996 Fiscal Year Final Research Report Summary

Developmet of Wide Range Tribo-Tester Using Scanning Probe Technique

Research Project

Project/Area Number 07455171
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 計測・制御工学
Research InstitutionNagoya University

Principal Investigator

MITSUYA Yasunaga  Nagoya University Micro System Engineering Professor, 工学部, 教授 (10200065)

Co-Investigator(Kenkyū-buntansha) NOMURA Yoshihiko  Nagoya University Micro System Engineering Associate Professor, 工学部, 助教授 (00228371)
Project Period (FY) 1995 – 1996
KeywordsScanning probe microscopy / Friction force microscopy / Cantilever / Diamond chip / Silicon cantilever / Michelson interferometry / Phase difference interferometry / Fringe pattern image processing
Research Abstract

To evaluate tribological characteristics of surface using the scanning probe method, wide range of applying forces to the probe, clear separation in measured vertical and horizontal forces and high durability of tip against sliding motion are essential. For this purpose, a cantilever with a diamond tip glued onto it was selected.
First, a novel cantilever structure having a function for measuring vertical and horizontal forces separately was proposed. Special feature of this structure was twin levers extended from a base lever and bridged with a top lateral bar having a diamond tip. This structure was confirmed to permit torsional and vertical displacements to be measured separately using differential signal from the twin levers and direct signal form the base lever.
Second, the Michelson laser interferometry was applied for measuring three-dimensional displacement of the cantilever. Fringe pattern formed over the cantilever surface was captured using a ultra-high speed VTR,then the image data were analyzed to provide vertical and horizontal forces, simultaneously.
Finally, a silicon cantilever doped with N-type atoms was fabricated for directly measuring the force from the cantilever strain. Linearity and sensitivity were experimentally clarified, and mechanical characteristics, such as, stiffness and effective mass were identified using resonance of the cantilever.

  • Research Products

    (8 results)

All Other

All Publications (8 results)

  • [Publications] 大島 康司, 三矢 保永: "FFM用ツインカンチレバ-の歪み差動出力による垂直力と水平力の同時計測" 第73期通常総会講演論文集(IV). 96-1. 516-517 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 三矢 保永, 戸谷 広志, 大島 康司: "マイケルソン顕微鏡干渉法によるSPM用カンチレバ-の3次元変位計測" 第73期通常総会講演論文集(IV). 96-1. 518-519 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Mitsuya, Y.Ohshima, T.Nonogaki: "Coupling and Nonlinear Effects of Cantilever Deflection and Torsion Encountered When Simultaneously Measuring Vertical and Lateral Forces Using the Scanning Probe Method" Wear to be published.

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Ohshima, Y.Mitsuya: "Simultaneous Measurement of Vertical and Lateral Forces With Scanning Micro-Probe Using Differential Output From Strain Gauges Attached on Dual-Cantilevers" Proc.of the Third Int.Conf.on Motion and Vibration Control. Vol.2. 148-153 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Ohshima & Y.Mitsuya: "Simultaneous Measurement of Adhesion and Friction Forces with Scanning Micre-Probe Using Differential Output from Stain Gauges Attached on Twin Cantilevers" Prepr.of Jpn.Soc.Mech.Eng. 96-1. 516-517 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Mitsuya, H.Toya & Y.Ohshima: "Three Dimensional Measurement of Cantilever Deformation for SPM Probe Applying Michelson Laser Interferometry" Prepr.of Jpn.Soc.Mech.Eng. 96-1. 518-519 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Mitsuya, Y.Ohshima & T.Nonogaki: "Coupling and Nonlinear Effects of Cantilever Deflection and Torsion Encountered when Simultaneously Measuring Vertical and Lateral Forces Using the Scanning Probe Method" Wear. (to be published).

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Ohshima & Y.Mitsuya: "Simultaneous Measurement of Vertical and Lateral Forces With Scanning Micro-Probe Using Differential Output From Strain Gauges Attached on Dual-Cantilevers" Proc.of the Third Int.Conf.on Motion and Vibration Control. Vol.2. 148-153 (1996)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1999-03-16  

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