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1996 Fiscal Year Final Research Report Summary

Basic Study on Ultra-Precision Self-Profile-Generation

Research Project

Project/Area Number 07455414
Research Category

Grant-in-Aid for Scientific Research (B)

Allocation TypeSingle-year Grants
Section一般
Research Field 機械工作・生産工学
Research InstitutionTohoku University

Principal Investigator

KIYONO Satoshi  Tohoku University, Department of Mechatronics, Professor, 工学部, 教授 (40005468)

Co-Investigator(Kenkyū-buntansha) GAO Wei  Tohoku University, Department of Mechatronics, Lecturer, 工学部, 講師 (70270816)
KURIYAGAWA Tsunemoto  Tohoku University, Department of Mechatronics, Associate Professor, 工学部, 助教授 (90170092)
Project Period (FY) 1995 – 1996
Keywordsmachining / metrology / autonomous / profile generation / lever / actuator / PZT actuator / lapping pat
Research Abstract

A new ultra-precision self-profile-generation system by applying the technique of software datum has been proposed. In this research, we first developed a new kind of lapping probe that simultaneously acts as a force-controlled displacement probe. This probe, which utilize the principle of AFM,consists of a force sensing lever with a lapping pad attached at the center of the laver and optical detectors to measure the inclination of the lever. Both ends of the lever are held by PZT actuators. The machining force can be controlled by adjusting the inclination of the lever using the PZT actuators. On the other hand, the profile height can also be obtained from the inclination of the lever. Calibration results showed that the developed probe has a displacement resolution of 10nm. Next, we investigated the possibility of using three of the new lapping and measuring probes for scanning measurements of lapped profiles. The method of profile measurements is based on the 3-point method for constructing software datum. Profile measurements can be realized with the accuracy of the probe by canceling the pitching error and the translational error in the scanning motion using the information of the output data of the three probes. Computer simulations showed that abrasion amount of the lapping pad which results in a parabolic error in the evaluated profile with the method of software datum can be detected and compensated by using the proposed technique of absolute profile measurements. The effectiveness of the new system has also been confirmed by profile measurement and machining experiments.

  • Research Products

    (8 results)

All Other

All Publications (8 results)

  • [Publications] 小倉一朗,舟橋順正,清野 慧: "インプロセス計測と組み合わせた圧力転写加工による形状創成の基礎研究" 精密工学会1995年度秋季講演会論文集. 577-578 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 小岩秀貴,小倉一朗,高偉,清野 慧: "力制御型変位計による形状測定に関する研究" 精密工学会東北支部1995年度講演会論文集. 35-36 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Kiyono,I.Ogura,W.Gao,Y.Funahashi: "Basic STudy on Profile Generation without Using any Datum" Proceedings of 2nd International ABTEC Conference. 123-128 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 小倉一朗、高偉、小岩秀貴、厨川常元、清野慧: "インプロセス測定器を用いた形状の自律的創成に関する基礎研究" 精密工学会1996年度秋季講演会論文集. 299-300 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I.Ogura,W.Gao,S.Kiyono and H.Koiwa: "Basic Study on Profile Generation with Using No Datum" Proceedings of the ICPE′96 and 6th SJSUT. 349-352 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] W,Gao,I.Ogura,E.Okuyama and S.Kiyono: "Self-Zero-Adjustment of Probes in the Methods Constructing Software Datum for Large Profile Measurement" International Journal of the JSPE. 30. 337-342 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] "Basic Study on Profile Generation without Using any Datum" Proceedings of 2nd International ABTEC Conference. 123 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] "Basic Study on Profile Generation with Using No Datum Self-Zero-Adjustment of Probes in the Methods Constructing Software Datum for Large Profile Measurement" Proceedings of the ICPE^<**>96 and 6th SJSUT Int.J.of JSPE. 30. 337 (1996)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1999-03-09  

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