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1997 Fiscal Year Final Research Report Summary

Development of an apparatus for the analysis of chemical reactions on surfaces equipped with a Helium beam apparatus.

Research Project

Project/Area Number 07504008
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section展開研究
Research Field 物質変換
Research InstitutionTohoku University

Principal Investigator

KUSUNOKI Isao  Tohoku Univ., Research institute for scientific measurement, professor, 化学計測研究所, 教授 (30025390)

Co-Investigator(Kenkyū-buntansha) RANGE Heiko  Tohoku Univ., Research institute for scientific measurement, assistant researche, 化学計測研究所, 助手
TAKAOKA Tsuyoshi  Tohoku Univ., Research institute for scientific measurement, assistant researche, 化学計測研究所, 助手 (90261479)
Project Period (FY) 1995 – 1997
Keywordsmolecular beam / He scattering / surface / chemical reaction / FTIR / LiF / differential pumping / stepping motor
Research Abstract

The purpose of this project is to develop an apparatus with which surface reactions and surface structures can be observed, by applying the techniques of supersonic molecular beam. With the apparatus, we want to control the surface reaction by varying the translational energy of molecules impinging on the surface, and observe the property of the reaction using the Helium beam scattering technique.
The apparatus is composed of a molecular beam apparatus, a manipulator with which the position of the sample is controlled, a rotatable mass spectrometer, a vacuum chamber and a pumping system.The molecular beam apparatus is working well in point of the triply differential pumping and the control of the translational energy of molecules. As to the manipulator, by the use of stepping motors for use in UHV,the sample can be controlled with high precision which is needed for the experiment of He beam scattering. The rotatable mass spectrometer and a double differential pumping system constructed to reduce the background gas are rotated around the sample.
By performing the experiments described below, we ascertained the enough performance of the apparatus.
1.We performed He diffraction experiment. We observed the diffraction pattern corresponding to LiF (100) surface structure in the angular distribution of He atoms scattered from the surface when He beam is directed to the sample. We confirmed that the surface structure is measured by the use of He beam.
2.We observed that the intensity of specular reflection of He beam from Ni (100) surface decrease with increasing the amount of the adsorbate.
3.We observed spectra of submonolayr CO and NH_3 adsorbed on Ni (100) surface.

  • Research Products

    (12 results)

All Other

All Publications (12 results)

  • [Publications] I.Kusunoki: "Nitridation processes of Si,Ti,Fe with a low enegy N_2^+ionbeam." Scanning Microscopy. (印刷中).

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I.Kusunoki: "Comparison between the Reaction Mechanisms of Nitridation of Si(100) by a NH_3 Molecular Beam and by a N_2^+ Ion Beam." Surface Review and Letters. 5. 81- (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Takaoka: "Initial stage of SiC grown on Si(100)surface." Journal of Crystal growth. 183. 175-182 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Ishidzuka: "Nitridation of Si(100)surface with NH_3." Applied Surface Science. (印刷中).

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 高見 知秀: "走査型オージェ電子分光法による亜鉛ドープNdFeCoB磁石の観察." 東北大学科学計測研究所報告. 46. 59-68 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Takaoka: "Study of initial stage of SiC growth on Si(100)surface by XPS,RHEED,and SEM." Silicon Carbide and Related Materials. (印刷中).

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I.Kusunoki: "Nitridation processes of Si, Ti, Fe with a low energy N_2^+ ion beam." Scanning Microscopy. (in press.).

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I.Kusunoki: "Comparison between the Reaction Mechanisms of Nitridation of Si (100) by a NH_3 Molecular Beam and by a N_2^+ Ion Beam." Surface Review and Letters. 5. 81 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Takaoka: "Initial stage of SiC grown on Si (100) surface" J.Crystal growth. 183. 175-182 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Ishidzuka: "Nitridation of Si (100) surface with NH_3." Appl.Surf.Sci.(in press.).

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Takami: "Observation of NdFeB Magnet by Auger Electron Spectroscopy, X-ray Photoelectron Spectroscopy, Secondary Ion Mass Spectroscopy, and Atomic Force Microscopy" Bulletin of RISM,Tohoku Univ.46. 59-68 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Takaoka: "Study of initial stage of SiC growth on Si (100) surface by XPS,RHEED,and SEM." Silicon Carbide and Related Materials. (in press).

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1999-03-16  

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