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1996 Fiscal Year Final Research Report Summary

Research on Prototype of Sputtering Apparatus for Spinic Data Storage Media

Research Project

Project/Area Number 07505004
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section試験
Research Field 電子デバイス・機器工学
Research InstitutionTohoku University

Principal Investigator

NAKAMURA Yoshihisa  Res.Inst.Elec.Comm., Tohoku University Professor, 電気通信研究所, 教授 (50006235)

Co-Investigator(Kenkyū-buntansha) HIRATA Toyoaki  Osaka Vacuum, Ltd., Senior Engineer, 堺工場開発課, 主任技師(研究職)
TAN Kenji  Res.Inst.Elec.Comm., Tohoku University Research associate, 電気通信研究所, 助手 (80282010)
SHIMIZU Yukiya  Res.Inst.Elec.Comm., Tohoku University Research associate, 電気通信研究所, 助手 (90282011)
MURAOKA Hiroaki  Res.Inst.Elec.Comm., Tohoku University Associate Prof., 電気通信研究所, 助教授 (20239479)
Project Period (FY) 1995 – 1996
Keywordsspinic data storage / perpendicular magnetic recording / high vacuum sputtering / hard disk / perpendicular double layr media
Research Abstract

The research team is now investigating a new paradigm of magnetic recording, or "Spinic Storage, " for establishment of a new field of engineering, in which each recorded bit is stored in several single-domain crystallites in order to attain ultra-high density magnetic recording. The aim of this project is to initiate research on fabrication technology of recording media for this new strage scheme. It has been focused to provide a design guideline for the media. In particular, to optimize as a medium for high density recording, its micro magnetic structure of the recording layr is aimed to be clarified from physics of sputtering deposition.
In early 1996, high vacuum sputtering apparatus having an aluminum chamber specialized for such high vacuum was built up, and background pressure of 10^<-8> Torr was confirmed. The apparatus was used for preparing high density magnetic recording disks for read/write experiments. The apparatus has been eventually attained much higher vacuum of 10^<-9> … More Torr in late 1996. Evaluation of read/write performance as a high density medium has been performed after optimization of sputtering conditions. The results described below have been obtained : (a) fine grain structure, which is indispensable for low noise magnetic recording media, appeared in recording layr of Co-Cr perpendicular anisotropy film, (b) higher vacuum brought better perpendicular anisotropy, and (c) compositional separation of the Co-Cr film was observed, therefore, (d) magnetic separation among the grains which acts to reduce medium noise was enhanced, however, (e) grain size became rather large, which affects the effect of increase the noise, and (f) in noise measurement its medium noise was smaller than samples by normal vacuum sputtering as a result.
As described, the original requirements for the sputtering apparatus at the start of this project has been almost satisfied, and several knowledge for the high performance perpendicular media was obtained. The media prepared by the sputtering apparatus showed superior read/write characteristics, in particular its high SN ratio, after finishing its optimization of sputtering conditions. These results will be a first step of the ideal Spinic Storage Media, and it will be a basement for realization of ultra-high density recording. Less

  • Research Products

    (42 results)

All Other

All Publications (42 results)

  • [Publications] 中塩 栄治: "液体窒素シュラウドが軟磁性膜に与える効果" 日本応用磁気学会誌. 19,supple.S2. 83-86 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Nakamura: "Extremely High-Density Magnetic Information Storage -Outlook Based on Analyses of Magnetic Recording Mechanisms-" IEICE Transactoins on Electronics. E78-C. 1477-1492 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 渡辺 功: "垂直磁気記録媒体作成用アルミニウムチャンバーの検討" 電子情報通信学会技術研究報告. MR95-12. 1-6 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 村岡 裕明: "液体窒素シュラウドとアルミニウムチャンバを用いたスパッタ装置より成膜した二層膜記録媒体" 電子情報通信学会技術研究報告. MR95-50. 43-48 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 中塩 栄治: "軟磁性膜の成膜における液体窒素シュラウドの効果" 平成7年度電気関係学会東北支部連大会講演論文集. 2B15. 77- (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 坂口 武: "垂直二層膜媒体におけるCr下地層の影響" 平成7年度電気関係学会東北支部連合大会講演論文集. 2B13. 75- (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 清水 幸也: "サブミクロントラック記録におけるスペーシング損失" 日本応用磁気学会誌. 20. 89-92 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 高野 研一: "垂直磁気記録用MRヘッドの再生特性" 日本応用磁気学会誌. 20. 145-148 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 江 年華: "サブミクロントラック幅単磁極ヘッドの多トラック化" 日本応用磁気学会誌. 20. 149-152 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Takano: "Contact magneloresistive head for perpendicular magnetic recording" J.App.Phy. 79. 5002-5004 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 中村 慶久: "磁気記録の超高密度化-3次元シミュレーションによる予測-" 電子情報通信学会論文誌C-1. J79-C-1. 152-164 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Muraoka: "MR Head Reading Characteristics in Perpendicular Magnetic Recording" IEEE Trans.Magn.32. 3482-3484 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Jiang: "Submicronwidth Multitrack Single Pole Head for Ultra High Density Perpendicular Magnetic Recording" IEEE Trans.Magn.32. 3554-3556 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Sano: "Effects of nitrogen addition to the CoCr recordinglayer of a double layered perpendicular rigid disk" J.Magn.Magn.Mat.155. 212-215 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I.Tagawa: "Numerical analysis of noise and interparticle interaction in perpendicular magnetic recording media" J.Magn.Magn.Mat.155. 341-344 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 清水 幸也: "三次元シミュレータによる垂直記録媒体のノズル解析" 日本応用磁気学会誌. 21(印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 山田 洋: "垂直磁気記録におけるMRヘッド再生の高分解能化" 日本応用磁気学会誌. 21(印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 姜 文紅: "垂直磁気記録メディアにおける熱磁気緩和の記録密度依存性" 日本応用磁気学会誌. 21(印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 中塩 栄治: "Co-Cr垂直磁気異方性膜成膜における背圧改善効果" 日本応用磁気学会誌. 21(印刷中). (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 渡辺 功: "垂直磁気記録媒体作成用アルミニウムチャンバーの検討" 電子情報通信学会技術研究報告. MR95-12. 1-6 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 清水 幸也: "3次元シミュレータによる垂直記録媒体のノイズ解析" 第20回日本応用磁気学会学術講演概要集. 20pA-12. 22- (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 山田 洋: "垂直磁気記録におけるMRヘッドの高分解能再生" 第20回日本応用磁気学会学術講演概要集. 22pA-1. 221- (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 姜 文紅: "垂直磁気メディアにおける熱磁気緩和の記録密度依存性" 第20回日本応用磁気学会学術講演概要集. 22pA-4. 224- (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 中塩 栄治: "Co-Cr垂直膜成膜時の背圧改善効果" 第20回日本応用磁気学会学術講演概要集. 22pA-5. 225- (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Shimizu, I.Tagawa and Y.Nakamura: ""Spacing loss in submicron trackwidth recording" (in Japanese)" J.Magn.Soc.Jpn.20. 89-92 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Takano, H.Muraoka and Y.Nakamura: ""Reading characteristics of an MR head for perpendicular magnetic recording" (in Japanese)" J.Magn.Soc.Jpn.20. 145-148 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Jiang, H.Muraoka and Y.Nakamura: ""Multi-track head for submicron trackwidth single pole head" (in Japanese)" J.Magn.Soc.Jpn.20. 149-152 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Takano, H.Muraoka and Y.Nakamura: ""Contact magnetoresistive head for perpendicular magnetic recording"" J.App.Phy.79. 5002-5004 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Nakamura, I.Tagawa and Y.Shimizu: ""ultra-high density magnetic recording-Prediction by three-dimentional simulation-" (in Japanese)" IEICE Tans.C-I.J79-C-I. 152-164 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Muraoka, H.Yamada and Y.Nakamura: ""MR Head Reading Characteristics in Perpendicular Magnetic Recording"" IEEE Trans.Magn.32. 3482-3484 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Jiang, H.Muraoka and Y.Nakamura: ""Submicron-width Multitrack Single Pole Head for Ultra High Density Perpendicular Magnetic Recoeding"" IEEE Trans.Magn.32. 3554-3556 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Sano, H.Muraoka, I.Watanabe and Y.Nakamura: ""Effects of nitrogen addition to the CoCr recording layr of a double layred perpendicular rigid disk"" J.Magn.Magn.Mat.155. 212-215 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I.Tagawa, A.Takeo and Y.Nakamura: ""Numerical analysis of noise and interparticle interaction in perpendicular recording media"" J.Magn.Magn.Mat.155. 341-344 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Shimizu and Y.Nakamura: ""Analysis on noise of perpendicular magnetic recording medium by 3-dimentional simulation" (in Japanese, in printing)" J.Magn.Soc.Jpn.21. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Yamada, H.Muraoka, Y.Nakamura, I.Abe and K.Yazawa: ""High resolution read out with an MR head in perpendicular magnetic recording" (in Japanese, in printing)" J.Magn.Soc.Jpn.21. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] W.H.Jiang, H.Muraoka, I.Tagawa and Y.Nakamura: ""Bit density dependence of magnetic relaxation in perpendicular magnetic media" (in Japanese, in printing)" J.Magn.Soc.Jpn.21. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] E.Nakasio, T.Sakaguchi, I.Watanabe, H.Muraoka and Y.Nakamura: ""Effect of background pressure for sputtering of Co-Cr film" (in Japanese, in printing)" J.Magn.Soc.Jpn.21. (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I.Watanabe, E.Nakasio, H.Muraoka and Y.Nakamura: ""Evaluation of aluminum chamber for perpendicular magnetic media fabrication" (in Japanese)" IEICE Tech.Rep.MR95-12. 1-6 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Shimizu and Y.Nakamura: ""Analysis on noise perpendicular magnetic recording medium by 3-dimentional simulation" (in Japanese)" Digests 20th Ann.Conf.Magn.Jpn. 20pA-12. 22 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Yamada, H.Muraoka, Y.Nakamura, I.Abe and K.Yazawa: ""High resolution read out with an MR head in perpendicular magnetic rcording" (in Japanese)" Digests 20th Ann.Conf.Magn.Jpn. 20pA-1. 221 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] W.H.Jiang, H.Muraoka, I.Tagawa and Y.Nakamura: ""But density dependence of magnetic relaxation in perpendicular magnetic media" (in Japanese)" Digests 20th Ann.Conf.Magn.Jpn. 22pA-4. 224 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] E.Nakasio, T.Sakaguchi, I.Watanabe, H.Muraoka and Y.Nakamura: ""Effect of background pressure for sputtering of Co-Cr film" (in Japanese)" Digests 20th Ann.Conf.Magn.Jpn. 22pA-5. 225 (1996)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1999-03-09  

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