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1997 Fiscal Year Final Research Report Summary

Study on the fabrication of group III nitride based devices operated in the uncultivated region

Research Project

Project/Area Number 07505012
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Applied materials science/Crystal engineering
Research InstitutionMEIJO UNIVERSITY

Principal Investigator

AKASAKI Isamu  Meijo University, Faculty of Science and Technology, Professor, 理工学部, 教授 (20144115)

Co-Investigator(Kenkyū-buntansha) AMANO Hiroshi  Meijo University, Faculty of Science and Technology, Assistant Professor, 理工学部, 講師 (60202694)
Project Period (FY) 1995 – 1997
KeywordsGroup III nitride semiconductors / Multi quantum well structure / UV laser diode / Bright blue light emitting diode / UV detector / Microwave FET / Two dimensional electron gas
Research Abstract

In this study, properties and fabrication of low dimensional structure based on group III nitride semiconductors and their application to novel devices which can operate in the uncultivated region has been investigated experimentally. The following results have been obtained.
(1) Fabrication and characterization of two dimensional quantum wells and its application to group III nitride based laser diodes
1.High-resolution X-ray diffraction and micro PL mapping study revealed that fluctuation of the thickness and the alloy composition in our GaInN/GaN multi quantum well is much less than 1 molecular layr and 1%, respectively.
2.Intrinsic quantum confined Stark effect caused by piezoelectricity has been observed for the first time.
3.Shortest wavelength semiconductor laser diode has been fabricated.
4.Violet laser diode having FIB etched mirror has been fabricated.
(2) Fabrication of wavelength selective UV detector based on AlGaN/GaN double heterosturcutre
Band pass UV detector based on AlGaN/GaN heterostructure has been fabricated.
(3) Microwave FET based on two dimensional electron gas
High performance FET based on AlGaN/GaN HENT structure has been fabricated. The maximum oscillation frequency was as high as 77GHz.

  • Research Products

    (61 results)

All Other

All Publications (61 results)

  • [Publications] I.Akasaki, H.Amano, S.Sota, H.Sakai, T.Tanaka, M.Koike: "Stimulated emission by current injection from an AlGaN/GaN/GaInN quantum well devices" Japanese Journal of Applied Physics. 34. L1517-L1519 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Sakai, T.Koidke, H.Suzuki, M.Yamaguchi, S.Yamasaki, M.Koike, H.Amano, I.Akasaki: "GaN/GaInN/GaN double heterostructure light emitting diode fabricated using plasma-assisted molecular beam epitaxy" Japanese Jorunal of Applied Physics. 34. L1429-L1431 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Amano, I.Akasaki: "Fabrication and properties of GaN-based quantum well structure for short wavelength light emitter" Extended Abstract of the 1995 International Conference on SSDM. 683-685 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Koike, S.Yamasaki, S.Nagai, N.Koike, H.Amano, I.Akasaki: "High quality GaInN/GaN multiple quantum wells" Applied Physics Letters. 68. 1403-1405 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 天野 浩、赤さき 勇: "III族窒化物を用いた波長選択型紫外線検出器の試作" 名城大学総合研究所紀要. 創刊号. 1-5 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I.Akasaki, H.Amano: "Current status of III-V nitride research" Proceedings of the International Symposium on Blue Laser and Light Emitting Diodes. 1. 11-17 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Amano, H/Sakai, S.Sota, T.Tanaka, I.Akasaki: "Issues for realizing prectical laser diode based on group III nitrides" Proceedings of the International symposium on Blue Laser and Light Emitting Diodes. 1. 259-262 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] B.Monemar, J.P.Bergman, H.Amano, I.Akasaki, T.Detchprohm, K.Hiramatsu, N.Sawaki: "Optical properties of GaN and related materials" Proceedings of the International Symposium on Blue Laser and Light Emitting Diodes. 1. 135-140 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] P.Thurian, L.Eckey, H.Siegle, J.Holst, P.Maxim, R.A, Hoffmann, C.Thomsen, I.Broser, K.Pressel, I.Akasaki, H.Amano, K.Hiramatsu, T.Detchprohm, D.Schikore, M.Hankeln, K.Lischka: "Defects in cubic and hexagonal GaN epilayers" Proceedings of the International Symposium on Blue Laser and Light Emitting Diodes. 1. 180-184 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I.Akasaki and H.Amano: "Crystal growth of column-III nitride semiconductors and their electrical and optical properties" Journal of Crystal Growth. 163. 86-92 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Ruvimov, Z.I.Weber, T.Suski, J.W.AgerIII, J.Washburn, J.Krueger, C.Kisielowski, E.R.Weber, H.Amano, I.Akasaki: "Effect of Si doping on the dislocation structure of GaN grown on the A-face of sapphire" Applied Physics Letters. 68. 990-991 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I.A.Buyanova, J.P.Bergman, B.Monemar, H.Amano, I.Akasaki: "Intrinsic properties of GaN epilayers grown on SiC substrates Effect of Starin." Applied Physics Letters. 68. 1255-1257 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Siege, P.Thurian, L.Eckey, A.Hoffman, C.Thomsen, K.Meyer, H.Amano, I.Akasaki: "Spacially resolved photoluminescence and Raman scattering experiments on the GaN/sapphire interface" Applied Physics Letters. 68. 1265-1266 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] D.Behr, J.Wagner, J.Schneider, H.Amano and I.Akasaki: "Resonant Raman scattering in hexagonal GaN" Applied Physics Letters. 68. 2404-2406 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] C.Wetzel, E.E.Haller, H.Amano and I.Akasaki: "Infrared reflection on GaN and AlGaN thin film heterostructures with AlN buffer layers" Applied Physics Letters. 68. 2547-2549 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J.Burm, W.Schaff, L.Eastman, H.Amano, I.Akasaki: "75A GaN channel modulation doped field effect transistors" Applied Physics Letters. 68. 2849-2851 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I.Akasaki, S.Sota, H.Sakai, T.Tanaka, M.Koike and H.Amano: "Shortest wavelength semiconductor laser diode" Electronics Letters. 32. 1105-1106 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Amano, S.Sota, M.Nishikawa, M.Yoshida, M.Kawaguchi, M.Ohta, H.Sakai, I.Akasaki: "Fabrication and properties of AlGaN/GaInN double heterostructure grown on 6H-SiC(0001)_<Si>" Materials Research Symposium Proceedings. 395. 869-877 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Koike, N.Shibata, S.Yamasaki, S.Nagai, S.Asami, H.Kato, N.Koide, H.Amano, I.Akasaki: "Light emitting devices based on GaN and related compound semiconductors" Materials Research Symposium Proceedings. 395. 889-895 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] W.Li, P.Bergman, B.Monemar, H.Amano, I.Akasaki: "Photoluminescernce decay dynamics in and InGaN/GaN/AlGaN single quantum well" Journal of Applied Physics. 81. 1005-1007 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I.Akasaki and H.Amano: "Crystal growth and conductivity control of group III nitride semiconductors and their application to short wavelength light emitters" Japanese Journal of Applied Physics. 36. 5393-5408 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I.Akasaki and H.Amano: "Progress and prospect of group-III nitride semiconductors" Journal of Crystal Growth. 175/176. 29-36 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Chichibu, T.Azuhata, T.Sota, H.Amano, I.Akasaki: "Optical properties of tensile-strained wurtzite GaN epitazial layers" Applied Physics Letters. 70. 1-3 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Takeuchi, H.Takeuchi, S.Sota, H.Sakai, H.Amano, I.Akasaki: "Quantum-confined Stark effect due to piezoelectric fields in GaInN strained quantum wells" Japanese Journal of Applied Physics. 36. L382-L385 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Takeuchi, S.Sota, M.Katsuragawa, M.Komori, H.Takeuchi, H.Amano, I.Akasaki: "Optical properties of strainded AlGaN and GaInN on GaN" Japanese Journal of Applied Physics. 36. L177-L179 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Amano, T.Takeuchi, S.Sota, H.Sakai, I.Akasaki: "Structural and optical properties of nitride based heterostructure and quantum well structure" Materials Research Symposium Proceedings. 449. 1143-1150 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J.Burm, W.J.Schaff, G.H.Martin, L.F.Eastman, H.Amano, I.Akasaki: "Recessed gate GaN MODFETs" Solid State Electronics. 41. 247-250 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 酒井 浩光、竹内 哲也、天野 浩、赤さき 勇: "GaNの誘導放出機構と混晶効果" レーザー研究. 25. 510-513 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 天野 浩、竹内 哲也、山口 栄雄、Christian Wetzel、赤さき 勇: "サファイア上GaNの成長過程と結晶学的特性およびGaN上AlGaN、GaInNの結晶学的特性" 電子情報通信学会論文誌. C-11. 65-71 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I.Akasaki, H.Amano: "Heterostructure Epitaxy and Devices Crystal growth of column III nitrides by OMVPE" Kluwer Academic Publishers, (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I.Akasaki and H.Amano: "Semiconductors and Semimetals Vol.48 Chapter 7,Organometallic Vapor-Phase Epitaxy of Callium Nitride for High Brightness Blue Light-Emitting Diodes" Academic Press, 469 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I.Akasaki and H.Amano: "Semiconductors and Semimetals Vol.50 Chapter 15, Lasers" Academic Press, 517 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] I.Akasaki, H.Amano, S.Sota, H.Sakai, T.Tanaka, M.Koike: "Stimulated emission by current injection from an AlGaN/GaN/GaInN quantum, well devices" Japanese Journal of Applied Physics. 34. L1517-L1519 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Sakai, T.Koide, H.Suzuki, M.Yamaguchi, S.Yamasaki, M.Koike, H.amano, I.Akasaki: "GaN/GaInN/GaN double heterostructure light emitting diode fabricated using plasma-assisted molecular beam epitaxy" Japanese Journal of Applied Physics. 34. L1429-L1431 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Amano, I.Akasaki: "Fabrication and properties of GaN-based quantum well structure for short wavelength light emitter" Extended Abstract of the 1995 International Conference on SSDM. 683-685 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Koike, S.Yamasaki, S.Nagai, N.Koide, H.amano, I.Akasaki: "High quality GaInN/GaN multiple quantum wells" Applied Physics Letters. 68. 1403-1405 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I.Akasaki, H.Amano: "Current status of III-V nitride research" Proceedings of the International Symposium on Blue Laser and Light Emitting Diodes. 1. 11-17 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Amano, H.Sakai, S.Sota, T.Tanaka, I.Akasaki: "Issues for realizing practical laser diode based on group III nitrides" Proceedings of the International Symposium on Blue Laser and Light Emitting Diodes. 1. 259-262 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] B.Monemar, J.P.Bergman, H.Amano, I.Akasaki, T.Detchprohm, K.Hiramatsu, N.Sawaki: "Optical properties of GaN and related materials" Proceedings of the International Symposium on Blue Laser and Light Emitting Diodes. 1. 135-140 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] P.Thurian, L.Eckey, H.Slegle, J.Holst, P.Maxim, R.A.Hoffmann, C.Thomsen, L.Broser, K.Pressel, I.Akasaki, H.Amano, K.Hiramatsu, T.Detchprohm, D.Schikern, M.Hankoia, K.Lischka: "Defects in cubic and hexagonal GaN epilayrs" Proceedings of the International Symposium on Blue Laser and Light Emitting Diodes. 1. 180-184 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I.Akasaki and H.Amano: "Crystal growth of columun-III nitride semiconductors and their electrical and optical properties" Journal of Crystal Growth. 163. 86-92 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Ruvimov, Z.L.Weber, T.Suski, J.W.AgerIII,J.Washburn, J.Krueger, C.Kisielowski, E.R.Weber, H.Amano, I.Akasaki: "Effect of Si doping on the dislocation structure of GaN grown on the A-face of sapphire" Applied Physics Letters. 68. 990-991 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I.A.Buyanova, J.P.Bergman, B.Monemar, H.amano, I.Akasaki: "Intrinsic properties of GaN epilayrs grown on SiC substrates Effect of Starin" Applied Physics Letters. 68. 1255-1257 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Siege, P.Thurian, L.Eckey, A.Hoffman, C.Thomsen, K.Meyer, H.Amano, I.Akasaki: "Spacially resolved photoluminescence and Raman scattering experiments on the GaN/sapphire interface" Applied Physics Letters. 68. 1265-1266 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] D.Behr, J.Wagner, J.Schneider, H.Amano and I.Akasaki: "Resonant Raman scattering in hexagonal GaN" Applied Physics Letters. 68. 2404-2406 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] C.Wetzel, E.E.Haller, H.Amano and I.Akasaki: "Infrared reflection on GaN and AlGaN thin film heterostructures with AlN buffer layrs" Applied Physics Letters. 68. 2547-2549 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.Burm, W.Schaff, L.Eastman, H.Amano, I.Akasaki: "75A GaN channel modulation doped field effect transistors" Applied Physics Letters. 68. 2849-2851 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I.Akasaki, S.Sota, H.Sakai, T.Tanaka, M.Koike and H.Amano: "Shortest wavelength semiconductor laser diode" Electronics Letters. 32. 1105-1106 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Amano, S.Sota, M.Nishikawa, M.Yoshida, M.Kawaguchi, M.Ohta, H.Sakai, I.Akasaki: "Fabrication and properties of AlGaN/GaInN double heterostructure grown on 6H-SiC (0001)_<Si>" Materials Research Symposium Proceedings. 395. 869-877 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Koike, N.Shibata, S.Yamasaki, S.Nagai, S.Asami, H.Kato, N.Koide, H.Amano, I.Akasaki: "Light emitting devices based on GaN and related compound semiconductors" Materials Research Symposium Proceedings. 395. 889-895 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] W.Li, P.Bergman, B.Monemar, H.Amano, I.Akasaki: "Photoluminescence decay dynamics in and InGaN/GaN/AlGaN single quantum well" Journal of Applied Physics. 81. 1005-1007 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I.Akasaki and H.Amano: "Crystal growth and conductivity control of group III nitride semiconductors and their application to short wavelength light emitters" Japanese Journal of Applied Physics. 36. 5393-5408 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I.Akasaki and H.Amano: "Progress and prospect of group-III nitride semiconductors" Journal of Crystal Growth. 175/176. 29-36 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Chichibu, T.Azuhata, T.Sota, H.Amano, I.Akasaki: "Optical properties of tensile-strained wurtzite GaN epitaxial layrs" Applied Physics Letters. 70. 1-3 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Takeuchi, H.Takeuchi, S.Sota, H.Sakai, H.Amano, I.Akasaki: "Quantum-confined Stark effect due to piezoelectric fields in GaInN strained quantum wells" Japanese Journal of Applied Physics. 36. L382-L385 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Takeuchi, S.Sota, M.Katsuragawa, M.Komori, H.Takeuchi, H.Amano, I.Akasaki: "Optical properties of strained AlGaN and GaInN on GaN" Japanese Journal of Applied Physics. 36. L177-L179 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Amano, T.Takeuchi, S.Sota, H.Sakai, I.Akasaki: "Structural and optical properties of nitride based heterostructure and quantum well structure" Materials Research Symposium Proceedings. 449. 1143-1150 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.Burm, W.J.Schaff, G.H.Martin, L.F.Eastman, H.Amano, I.Akasaki: "Recessed gate GaN MODFETs" Solid State Electronics. 41. 247-250 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I.Akasaki, H.Amano: Heterostructure Epitaxy and Devices Crystal growth of column III nitrides by OMVPE. Kluwer Academic Publishers, (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I.Akasaki and H.Amano: Semiconductors and Semimetals Vol.48 Chapter 7, Organomettallic Vapor-Phase Epitaxy of Gallium Nitride for High Brightness Blue Light-Emitting Diodes. Academic Press, 469 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] I.Akasaki and H.Amano: Semiconductors and Semimetals Vol.50 Chapter 15, Lasers. Academic Press, 517 (1998)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1999-03-16  

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