1996 Fiscal Year Final Research Report Summary
New growth technology of oxide films "Eclipse PLD method"
| Project/Area Number |
07555101
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 試験 |
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| Research Field |
Electronic materials/Electric materials
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| Research Institution | Osaka University |
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Principal Investigator |
KOBAYASHI Takeshi Osaka University, Faculty of Engineering Science Professor, 基礎工学部, 教授 (80153617)
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| Co-Investigator(Kenkyū-buntansha) |
YAMAMOTO Yoshihiro Solar energy conversion lab.Sharp co.Leader, 課長
TOMITA Takashi Solar energy conversion lab.Sharp co.Director, 部長
MAKI Tetsuro Osaka University, Faculty of Engineering Science Assistant, 基礎工学部, 助手 (80273605)
FUJII Tatsuhiko Osaka University, Faculty of Engineering Science Assistant, 基礎工学部, 助手 (40238530)
SAKUTA Ken Osaka University, Faculty of Engineering Science Lecturer, 基礎工学部, 講師 (70221273)
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| Project Period (FY) |
1995 – 1996
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| Keywords | PLD / laser ablation / oxide film / ferroelectric / electrooptic / 光エレクトロニクス |
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| Research Abstract |
In this project work, an Eclipse Laser Ablation Method which was proposed by us has been studied and improved earnestly. This method is characterized by the dominant particle diffusion during transport. As a result, a problem of "droplet" is completely overcome. This new method is now widely used by several domestic and foreign organizations.
Magnetic film, ferroelectric film, electro-optic film, superconducting film were well prepared using this method, and we have further developed more-advanced PLD technique named Eclipse-Angel. After this research period, we will concentrate our study on this advanced technology
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