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1997 Fiscal Year Final Research Report Summary

Development of high frequency soft magnetic thin films consisting of ferromagnetic alloy/ferromagnetic insulator multi-phase granular materials

Research Project

Project/Area Number 07555211
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section展開研究
Research Field Structural/Functional materials
Research InstitutionTohoku University

Principal Investigator

FUJIMORI Hiroyasu  Tohoku Univ., IMR Professor, 金属材料研究所, 教授 (60005866)

Co-Investigator(Kenkyū-buntansha) OHNUMA Shigehiro  The Res.Ins.of Elec.& Mag.Mat.Senior Researcher, 主任研究員 (50142633)
SAWAZAKI Tatsuo  Sumitomo Metal Industry Co.Researcher, 未来技術研究所, 研究員
SHIMA Toshiyuki  Tohoku Univ., IMR Research Associate, 金属材料研究所, 助手 (50261508)
MITANI Seiji  Tohoku Univ., IMR Research Associate, 金属材料研究所, 助手 (20250813)
Project Period (FY) 1995 – 1997
Keywordsmagnetic thin film / nano-granular film / soft magnetic properties / high frequency magnetic materials / high electrical resistivity / eddy current loss / ferrite / sputtering
Research Abstract

As small sizing and high frequency use of magnetic devices are extensively required nowadays, it is an important subject in the research field of magnetic materials to fabricate magnetic thin films with high saturation magnetization and high electrical resistivity. Nanogranular thin films consisting of magnetic metal and nonmagnetic insulator have been investigated so far, and fairly good soft magnetic properties (resistivity rho=100-500 muOMEGAcm, saturation magnetization Bs-10 kG) were achieved. However, further investigation and development of soft magnetic thin films with high electrical resistivity are currently required for applications such as high density magnetic recording heads etc. In this research project, we have investigated soft magnetic properties and electrical resistivity behavior of ferromagnetic alloy/ferromagnetic insulator multi-phase granular thin films.
Granular thin film samples were prepared by a sputtering technique with composite targets of ferromagnetic alloy and ferromagnetic insulator, and microstructure, electrical resistivity and magnetic properties were examined. From a systematic investigation for many kinds of combinations of ferromagnetic alloys and ferromagnetic insulators, we found that it is important to control surface reaction of ferromagnetic insulator on the film surface. Also, we found that Fe-MgFe_2O_4 and Ni-MgFe_2O_4 systems are candidates for very good soft magnetic thin films with high saturation magnetization and high electrical resistivity. For Fe-Mg-O multi-phase granular systems, good results, such as rho=100-400 and Bs=12-16 kG,were obtained in the optimized sputtering condition.
In addition to the results mentioned above, soft magnetic thin films of Co-Fe-Al-O exhibiting very high saturation magnetization (Bs=19 kG) has been achieved although its resistivity is fairly low( rho=100 muOMEGAcm) . It is considered that the Co-Fe-Al-O film can be used for application of high density magnetic recording heads.

  • Research Products

    (44 results)

All Other

All Publications (44 results)

  • [Publications] S.Ohnuma: "Co-(N or O)based granular thin films and their magnetic properties" Joumal of Alloys and Compounds. 222. 167-172 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Mitani: "High electrical resistivity and Mossbauer effect of soft magnetic Fe-SiO_2 granular alloys" Journal of Magnetism and Magnetic Materials. 140-144. 429-430 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 大石 繁弘: "高抵抗Co基膜の構造と磁気特性に及ぼす磁場中熱処理効果" 日本応用磁気学会誌. 19. 425-428 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Hayakawa: "Microtructure and magnetoresistance of Fe-ltf-o films with high electrical resistivity" Journal of Magnetism and Magnetic Materials. 154. 175-182 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Ohnuma: "High freguency magnitic properties in metal-nonmetal granular films" Jouranl of Applied Physics. 79. 5130-5135 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 早川 康男: "高電気抵抗Fe基ナノ結晶薄膜の磁気特性と磁気抵抗効果" 日本応用磁気学会誌. 20. 425-428 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 大沼 繁弘: "Co-Al-O系グラニュラー構造膜の高周波磁気特性" 日本応用磁気学会誌. 20. 489-492 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Hayakawa: "High resistive nanocrystalline Fe-M-O(M=Hf,Zr,rare earth metal)soft magnetic films for high freguency applications" Journal of Applied Physics. 81. 3747-3752 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 小林 伸聖: "Fe-X-O(X=Y,NdiSm,Gd,Tb,Py)系高電気抵抗膜の軟磁気特性" 日本応用磁気学会誌. 20. 469-472 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 小林 伸聖: "Fe-X-O(X=Y,Nd,Sm,Gd,Tb,Dy)系薄膜の磁気特性に及ぼすNi,Pd,Ptの添加効果" 日本応用磁気学会誌. 20. 473-476 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Shima: "Magnetostriction and magnitic properties of Sm-Fe-Band Tb-Fe-B thin films and multilayers" Journal of Alloys and Compunds. 258. 149-154 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 三谷 誠司: "Fe基金属-酸化物グラニュラー構造薄幕の巨大磁気抵抗とHall効果" 日本応用磁気学会誌. 21. 465-468 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Ohnuma: "Microtructure of Co-Al-O granular alloy thin films" Journal of Applied Physics. 82. 5646-5652 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] K.Asami: "XPS characterization of high electrical resistance soft magnetic thin Co-Al-N films" Proc.of 7th Europian Conf.on Applications of Surface and Interface Analysis. 609-612 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 柳田 康彦: "高電気抵抗軟磁性Co-Al-OをハイブリッドにしたスピンバルブMRセンサ" 日本応用磁気学会誌. 22(in press). (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 大沼 繁弘: "高いBsを有するCo-Fe-Al-O膜の軟磁気特性" 日本応用磁気学会誌. 22(in press). (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 李 希宰: "高電気抵抗Fe-Mg-O薄膜の軟磁気特性" 日本応用磁気学会誌. 22(in press). (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 大沼 繁弘: "高電気抵抗軟磁性膜" 日本応用磁気学会誌. 19. 19-25 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 大沼 繁弘: "Co系グラニュラー構造膜の磁気特性" 第91回日本応用磁気学会応用磁気研究会. 7-14 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 藤森 啓安: "ソフト磁性材料" 日本応用磁気学会誌. 21. 99-106 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 大沼 繁弘: "高電気抵抗軟磁性薄幕の開発の現状" 電気学会マグネティクス研究会資料. MAG-97-2. 3-8 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] 白川 究: "薄膜磁気デバイスの最近の研究" 金属. 67. 379-388 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] S.Ohnuma, H.Fujimori, S.Furukawa, S.Mitani and T.Masumoto: "Co- (N or O) based granular thin films and their magnetic properties" J.Alloys and Compounds. 222. 167-172 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Mitani, H.Fujimori, S.Furukawa and S.Ohnuma: "High electrical resistivity and Mossbauer effect of soft magnetic Fe-SiO2 granular alloys" J.Magn.Magn.Mater.140-144. 429-430 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Ohnuma, S.Mitani, H.Fujimori, T.Masumoto: "Effect of magnetic annealing on the structure and magnetic properties of highly resistive Co-based films" J.Mag.Soc.Jpn. 19. 425-428 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Hayakawa, N.Hasegawa, A.Makino, S.Mitani and H.Fujimori: "Microstructure and magnetoresistance of Fe-Hf-O films with high electrical resistivity" J.Magn.Magn.Mat.154. 175-182 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Ohnuma, H.Fujimori, S.Mitani and T.Masumoto: "High frequency magnetic properties in metal-nonmetal granular films (invited)" J.Appl.Phys. 79. 5130-5135 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Hayakawa, N.Hasegawa, A.Makino, S.Mitani and H.Fujimori: "Magnetic properties and magnetoresistance of nanocrystalline Fe-based films with high electrical resistivity" J.Mag.Soc.Jpn. 20. 425-428 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Ohnuma, S.Mitani, H.Fujimori and T.Masumoto: "Soft magnetic properties at high frequencies of Co-Al-O films with granular structure" J.Mag.Soc.Jpn. 20. 489-492 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Hayakawa, A.Makino, H.Fujimori and A.Inoue: "High resistive nanocrystalline Fe-M-O (M=Hf, Zr, rare-earth metals) soft magnetic films for high-frequency applications" J.Appl.Phys. 81. 3747-3752 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Kobayashi, S.Ohnuma, H.Fujimori and T.Masumoto: "Soft magnetic properties of highly electrically resistive Fe-X-O (X=Y,Nd, Sm, Gd, Tb, Dy) films" J.Mag.Soc.Jpn. 20. 469-472 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Kobayashi, S.Ohnuma, H.Fujimori and T.Masumoto: "Effect of Ni, Pd or Pt addition on the magnetic properties of Fe-X-O (X=Y,Nd, Sm, Gd, Tb, Dy) films" J.Mag.Soc.Jpn. 20. 473-476 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Shima, H.Yokoyama and H.Fujimori: "Magnetostriction and magnetic properties of Sm-Fe-B and Tb-Fe-B thin films and multilayrs" Journal of Alloys and Compounds. 258. 149-154 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Mitani, Y.Shintani and H.Fujimori: "Giant magnetoresistance and Hall effect in Fe-based metal-oxide granular thin films" J.Mag.Soc.Jpn. 21. 465-468 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Ohnuma, E.Abe, K.Hono, H.Onodera, S.Mitani, and H.Fujimori: "Microstructure of Co-Al-O granular alloy thin films" J.Appl.Phys.82. 5646-5652 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Asami, S.Ohnuma and T.Masumoto: "XPS characterization of high electrical resistance soft magnetic thin Co-Al-N films" Proc.of 7th Europian Conference on Applications of Surface and Interface Analysis. 609-612 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Yanagida, K.Saito, S.Miatni, H.Itoh and H.Fujimori: "MR characteristics of spin-valve films coupled with CoAlO soft magnetic layrs" J.Mag.Soc.Jpn. 22 (in press). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.J.Lee, S.Mitani, T.Shima and H.Fujimori: "High electrical resistivity and soft magnetic properties of Fe0Mg-O thin films" J.Mag.Soc.Jpn. 22 (in press). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Ohnuma, N.Kobayashi, T.Masumoto and H.Fujimori: "Soft magnetic properties of Co-Fe-Al-O films with high Bs" J.Mag.Soc.Jpn. 22 (in press). (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Ohnuma and S.Mitani: "Soft magnetic films with high electrical resistivity" J.Mag, Soc.Jpn. 19. 19-25 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Ohnuma and H.Fujimori: "Magnetic properties of Co-based granular films" J.Mag.Soc.Jpn, abstract of 91st meeting. 7-14 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Fujimori: "Soft magnetic materials" J.Mag.Soc.Jpn. 21. 99-106 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] S.Ohnuma and T.Masumoto: "Recent development of soft magnetic films with high electrical resistivity" Elec.Soc. MAG-97-2. 3-8 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] K.Shirakawa, S.Ohnuma, E.Sugawara, M.Mitera and T.Masumoto: "Recent study of magnetic thin film devices" Metal 67. 379-388 (1997)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1999-03-16  

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