1996 Fiscal Year Final Research Report Summary
Ceramic Material Working by UV Light Irradiation in several Atmosphere
| Project/Area Number |
07555361
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 試験 |
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| Research Field |
機械工作・生産工学
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| Research Institution | Tokyo Institute of Technology |
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Principal Investigator |
TOKURA Hitoshi Tokyo Institute of Technology, Faculty of Engineering, Professor, 工学部, 教授 (10016628)
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| Co-Investigator(Kenkyū-buntansha) |
HIRATA Atsushi Tokyo Institute of Technology, Faculty of Engineering, Research Associate, 工学部, 助手 (50242277)
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| Project Period (FY) |
1995 – 1996
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| Keywords | UV-light irradiation / excimer laser / ceramic / surface modification / water / atmosphere / hydro-thermal processing / polishing |
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| Research Abstract |
In this research, Ultra-violet light enhansed surface modification is proposed. In order to realize this, excimer laser beam was irradiated on to the ceramic materials in some atmospheric gases. As the results, small projection appeared on a silicon nitride ceramic. On the other hand, surface became smoother on alumina ceramics as the number of pulse increased. This phenomena can be explained that vapor from alumina by laser irradiation gathered again on the aluminasurface then surface came smoother.
Water can resolve gases in its net structure. There fore water can be recognized as a micro-chamber of gases. Ceramics were irradiated by excimer laser beam in the water of resolved gas concentration controlled. It became clear that the oxidation layr can be changed by controling the concentration. In highly oxygen resolved water, the layr became thicker. And this layr is much easier to remove than non-oxidation layr.
By the way ZnSe reacts with water in high temperature and is transparent for the light longer wave length than 500nm. Then UV light (ArF : 193nm) was irradiated on ZnSe in the pure water. Only the irradiated part reacted with water and it solved away gently. The treated surface became smoother. Then it can be summarize that the laser irradiation can realize hydro-thermal processing. This technique will be available to cubic boron nitride which is expected be a advanced material.
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