1996 Fiscal Year Final Research Report Summary
Development of High Persistente Microparts modified by Ion Beam Mixing Process
| Project/Area Number |
07555362
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 試験 |
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| Research Field |
機械工作・生産工学
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| Research Institution | Nagoya University |
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Principal Investigator |
MATSUMURO Akihito Nagoya University, Engineering, Associate Professor, 工学部, 助教授 (80173889)
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| Co-Investigator(Kenkyū-buntansha) |
NAKAMOTO Takeshi Nagoya University, Engineering, Associate Professor, 工学部, 助教授 (30198262)
MORI Toshihiko Nagoya University, Engineering, Associate Professor, 工学部, 助教授 (90023340)
SATO Kazuo Nagoya University, Engineering, Professor, 工学部, 教授 (30262851)
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| Project Period (FY) |
1995 – 1996
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| Keywords | Ion Beam Mixing Process / T_i-N Thin film / Carbon Nitride Film / Gradient Coating / Mechnaical Properties / Micro-parts / UV Laser Induced Polymer / High Pressure Technique |
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| Research Abstract |
In order to dedelop high pesistente microparts, we investigated the subject under the following three heads : (1) surface modification of micropatrs consisted of silicon wafer by ion beam mixing technique ; (2) development of new precise fabricating techniques ; and (3) development of new functional material by a high pressure technique.
The following results were obtained :
1. We clarified that the formation condition of T_i-N thin film on a silicon substrate by ion beam mixing technique and their mechanical properities.
2. We clarified that the formation condition of C-N thin film on a silcon substrate by ion beam mixing technique and their mechanical properities.
3. We revealed the mechanism of grdient coating on a silicon substrate by means fo RF magnetron sputtering.
4. We could syntehsize new materials of polymerized fullerenes, M_g-A_l-Z_n qusicrystals and A_l-L_i alloys by a high pressure technique up to 5.4 GP_a. These materials was excellent in the tribological perties and the strength properties.
5. We could develop electrostatic s-shaped film and micro tensile-test system fabricated on a single crystal silicon chip.
6. We could manufacture three-dimensional micro-parts by UV laser induced polymerization.
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Research Products
(43 results)
