1996 Fiscal Year Final Research Report Summary
Developmene of micro/nanoscale plasma generator and its application to materialn process
| Project/Area Number |
07555513
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 試験 |
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| Research Field |
Material processing/treatments
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| Research Institution | The University of Tokyo |
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Principal Investigator |
TERASHIMA Kazuo The University of Tokyo Department of Engineering, Assoc. Prof., 大学院・工学系研究科, 助教授 (30176911)
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| Project Period (FY) |
1995 – 1996
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| Keywords | microplasma / nanoplasma / multiprobe / plasma STM / plasma etching |
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| Research Abstract |
(1) Development of micro/manoscale plasma generator
We have developed a microscale/nanoscale discharge plasma generator, which consists of two electrodes with an ultrasmall gap onthe mesosclae/nanoscale controlled by two piezoelectric actuators and Langmuir plasma probe system housed in a high pressurechamber. By means of this apparatus, the measoscale/nanoscale N2 and air plasmas in the range between 10 mu m and 0.8 mu m have been realized. Langmuir probe measurements revealed a n interesting characteristics, namely a non-equilibrium cold nature of the plasma, even in high-pressure environments. Moreover, we succeeded in mesocale etching of HOPG by this apparatus.
(2) Development of trench method and STM in plasma environments.
In order to investigate plasmas on very small regions, such as these micro/nanoscale plasma, we developed trench method and scanning tunneling microscope (STM) in plasma enviuronments.
These achievements have opened up a new field, namely, microscale/nanoscale plasma science and engineering.
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