1996 Fiscal Year Final Research Report Summary
Formation of Functionally Gradient cBN Films Using Ion Beam
| Project/Area Number |
07555521
|
|---|
| Research Category |
Grant-in-Aid for Scientific Research (A)
|
| Allocation Type | Single-year Grants |
|---|
| Section | 試験 |
|---|
| Research Field |
Material processing/treatments
|
|---|
| Research Institution | Osaka University |
|---|
Principal Investigator |
MIYAKE Shoji Osaka University, Joining & Welding Research Institute, Professor, 接合科学研究所, 教授 (40029286)
|
|---|
| Co-Investigator(Kenkyū-buntansha) |
KOHATA Mamoru Toshiba Tungaloy Co., Ltd., Tool Development Dep., Chief Res.Associate, 切削工具事業部, 主任研究員
OGATA Kiyoshi Nissin Electric Co., Ltd., Basic Res.Dep., Chief Res.Associate, 先端技術研究開発部, 主席研究員
SETSUHARA Yuichi Osaka University, Joining & Welding Research Institute, Res.Associate, 接合科学研究所, 助手 (80236108)
|
|---|
| Project Period (FY) |
1995 – 1996
|
| Keywords | Ion Beam / Ion Beam Assisted Deposition / cBN / Intrefacial Control / Adhesion / Functional Gdadient |
|---|
| Research Abstract |
Boron nitride films were prepared by IBAD with N and/or Ar-mixtured ions. The c-BN films with improved tribological properties has been approached by inserting a B-rich buffer layr as a controlled buffer at the interface. Tribological characterization of the buffer layr indicated that the films with higher B/N transport ratio exhibited the simultaneous achievement of the highest adhesion strength tigether with the highest hardness value. The stoicheometric upper layr with high fraction of c-BN phase could be successfully grown on the B-rich layr formed on various substrates including highspeed-tool steel and WC.The insertion of the buffer layr exhibited the significant effect on the reduction of internal stress of the c-BN films and further on the enhancement of the tribological properties to obtain high hardness simultaneously with high adhesion strength. The double-layred BN films exhibited excellent characteristics in anti-corrosion capability, high-temperature phase stability and chemical innertness against various glass at elevated temperatures.
|
-
-
-
[Publications] Y.Setsuhara, T.Suzuki, Y.Tanaka, S.Miyake, M.Suzuki, M.Kumagai, K.Ogata, M.Kohata, K.Higeta, T.Einishi, Y.Suzuki, Y.Shimoitani and Y.Motonami: "INTERFACIAL STRUCTURE CONTROL OF CUBIC BORON NITRIDE FILMS PREPARED BY ION-BEAM ASSISTED DEPOSITION" Nuclear Instruments & Methods in Physics Research B. (掲載予定). (1997)
Description
「研究成果報告書概要(和文)」より
-
[Publications] M.Kumagai, M.Suzuki, T.Suzuki, Y.Tanaka, Y.Setsuhara, S.Miyake, K.Ogata, M.Kohata, K.Higeta, T.Einishi, Y.Suzuki, Y.Shimoitani and Y.Motonami: "PROPERTIES OF DEPTH-PROFILE CONTROLLED BORON NITRIDE FILMS PREPARED BY ION-BEAM ASSISTED DEPOSITION" Nuclear Instruments & Methods in Physics Research B. (掲載予定). (1997)
Description
「研究成果報告書概要(和文)」より
-
-
-
[Publications] Y.Setsuhara, T.Suzuki, Y.Tanaka, S.Miyake, M.Suzuki, M.Kumagai, K.Ogata, M.Kohata, K.Higeta, T.Einishi, Y.Suzuki, Y.Shimoitani and Y.Motonami: "INTERFACIAL STRUCTURE CONTROL OF CUBIC BORON NITRIDE FILMS PREPARED BY ION-BEAM ASSISTED DEPOSITION" Nuclear Instruments & Methods in Physics Research B.
Description
「研究成果報告書概要(欧文)」より
-
[Publications] M.Kumagai, M.Suzuki, T.Suzuki, Y.Tanaka, Y.Setsuhara, S.Miyake, K.Ogata, M.Kohata, K.Higeta, T.Einishi, Y.Suzuki, Y.Shimoitani and Y.Motonami: "PROPERTIES OF DEPTH-PROFILE CONTROLLED BORON NITRIDE FILMS PREPARED BY ION-BEAM ASSISTED DEPOSITION" Nuclear Instruments & Methods in Physics Research B.
Description
「研究成果報告書概要(欧文)」より
