1996 Fiscal Year Final Research Report Summary
Dynamic Process of Flow and Heat Transfer in Cz Furnace
| Project/Area Number |
07555546
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| Research Category |
Grant-in-Aid for Scientific Research (A)
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| Allocation Type | Single-year Grants |
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| Section | 試験 |
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| Research Field |
化学工学一般
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| Research Institution | KYOTO UNIVERSITY |
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Principal Investigator |
OGINO Fumimaru Kyoto Univ., Chem.Eng., Professor, 工学研究科, 教授 (50026069)
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| Co-Investigator(Kenkyū-buntansha) |
INAMURO Takaji Kyoto Univ., Chem.Eng., Associate Professor, 工学研究科, 助教授 (20263113)
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| Project Period (FY) |
1995 – 1996
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| Keywords | Czochralski Method / Crystal Growth / Rotating Flow / Numerical Simulation |
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| Research Abstract |
Recently, it is required to develop a new control system for the Czochralski crystal growth process based on the accurate knowledge of flow and heat transfer in the Cz furnace. Thus, we investigated experimentally and numerically flow and heat transfer in a cylindrical container with a rotating disk at the surface, and obtained the following results :
1.The effects of the rotating speed of the container and the crystal on heat transfer coefficients at the walls of the container and at the crystal are found.
2.The time variations of the heat transfer coeffficients with the oscillation of the crystal temperature are found.
3.The effects of the amplitude and the frequecny of the oscillation of the crystal temperature on the heat transfer coefficients are obtained.
Using the above results, we presented governing equations for the control system of the Czochralski crystal growth process. We calcultated the practical problems and obtained reasonable results.
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