• Search Research Projects
  • Search Researchers
  • How to Use
  1. Back to project page

1996 Fiscal Year Final Research Report Summary

Crystal Growth of InGaAsSb Compound Semiconductors for Infrared Devices

Research Project

Project/Area Number 07650010
Research Category

Grant-in-Aid for Scientific Research (C)

Allocation TypeSingle-year Grants
Section一般
Research Field Applied materials science/Crystal engineering
Research InstitutionShizuoka University

Principal Investigator

KUMAGAWA Masashi  Research Institute of Electronics, Shizuoka University, Professor, 電子工学研究所, 教授 (30022130)

Co-Investigator(Kenkyū-buntansha) HAYAKAWA Yasuhiro  Research Institute of Electronics, Shizuoka University, Associate Professor, 電子工学研究所, 助教授 (00115453)
YAMAGUCHI Tomuo  Research Institute of Electronics, Shizuoka University, Professor, 電子工学研究所, 教授 (40010938)
Project Period (FY) 1995 – 1996
KeywordsInfrared Material / Compound Semiconductor / Crystal Growth
Research Abstract

It is very important to understand the crystal growth of ternary compound semiconductors in order to grow InGaAsSb crystals used as infrared materials. First, the control of compositional ratio, segregation, and crystal quality were investigated in Cz-grown InGaSb and GaAlSb, and also in InGaAs grown by both the temperature difference method and the rotary Bridgman method. Further, the model of crystal growth was simulated compared with the experimental results. Concerning the hetero growth of InGaAs on GaAs, crystal layrs of low defect density (10^4/cm^2) was obtained on the SiN_x thin layr by the lateral over growth technique. The crystal quality was not changed even if the compositional ratio of In in InGaAs was increased from 0.06 to 0.1. Next, in the growth of multi-layrs with different compositional ratios, the optical properties of InAsSb on InAs were studied ; The cutoff wavelength shifted to the longer wavelength with the number of epi-layrs. The cutoff one of 4 epi-layrs was 8mum though the absorption edge was not so sharp. Finally, in study of InGaAsSb/(100) InAs, the addition of Gd component into the In-Ga-As-Sb source solution made the electrical properties of grown epi-layrs raise. From the SIMS measurement, it was understood that Gd in the solution reacted with S component and as a result the segregation of S into the epi-layr was reduced. The mobility of grown InGaAsSb was 3.0*10^4 and 8.2*10^4cm^2/Vs at 300K and 77K,respectively. The carrier density was 5.7*10^<15> at 300K and 4.0*10^<15>cm^<-3> at 77K.These values were relatively superior to those of the InAs substrate. Experimental facts were expected to contribute to the fabrication of infrared materials.

  • Research Products

    (12 results)

All Other

All Publications (12 results)

  • [Publications] Y.Hayakawa,他: "Crystal Growth of AlGaSb Bulk Crystal" Proc. of 15th Canadian Congress of Applied Mechanics. 2. 760-761 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] X. Y. Gong,他: "High Quality InAs^<1-y>Sb^y/InAs Multilayers for Mid-IR Detectors" Cryst. Res. Technol.30. 603-612 (1995)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Hayakawa,他: "Rapid diffusion of Ga into InSb and Precipitation of In" J. Cryst.Growth. 163. 220-225 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Hayakawa,他: "Effect of Ampoule Rotation on Growth of InGaAs Ternary Bulk Crystals from Solution" Cryst. Res. Technol.31. 567-575 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Hayakawa,他: "Epitaxial Lateral Overgrowth of InGaAs on Patterned GaAs Substrates by Liquid Phase Epitaxy" J. Cryst. Growth. 169. 613-620 (1996)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] X.Y.Gong,他: "Mid-Infrared Photoluminescence from Liquid Phase epitaxial InAs_<1-y>Sb_y/InAs Multilayers" Jpn. J. Appl. Phys.36. 250-254 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Hayakawa, et al.: "Crystal Growth of AlGaSb Bulk Crystal" Proc.of 15th Canadian Congress of Applied Mechanics. Vol.2. 760-761 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] X.Y.Gong, et al.: "High Quality InAs_<1-y> Sb_y/InAs Multilayrs for Mid-IR Detectors" Cryst.Res.Technol.Vol.30, No.5. 603-612 (1995)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Hayakawa, et al.: "Rapid diffusion of Ga into InSb and Precipitation of In" J.Cryst.Growth. Vol.163 No.3. 220-225 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Hayakawa, et al.: "Effect of Ampoule Rotation on Growth of InGaAs Ternary Bulk Crystals from Solution" Cryst.Res.Technol.Vol.31, No.5. 567-575 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] Y.Hayakawa, et al.: "Epitaxial Lateral Overgrowth of InGaAs on Patterned GaAs Substrates by Liquid Phase Epitaxy" J.Cryst.Growth. Vol.169. 613-620 (1996)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] X.Y.Gong, et al.: "Mid-Infrared Photoluminescence from Liquid Phase epitaxial InAs_<1-y>Sb_y/InAs Multilayrs" Jpn.J.Appl.Phys.Vol.36 Part I,No.2.(1997.1). 250-254 (1997)

    • Description
      「研究成果報告書概要(欧文)」より

URL: 

Published: 1999-03-09  

Information User Guide FAQ News Terms of Use Attribution of KAKENHI

Powered by NII kakenhi