DYNAMIC CHARACTERISTICS OF MICROMACHINE COMPONENTS IN BIONIC LIQUID

1996 Fiscal Year Final Research Report Summary

• Project/Area Number: 07650311
• Research Category: Grant-in-Aid for Scientific Research (C)
• Allocation Type: Single-year Grants
• Section: 一般
• Research Field: Intelligent mechanics/Mechanical systems
• Research Institution: OSAKA PREFECTURE UNIVERSITY
• Principal Investigator: TANAKA Yoshio OSAKA PREFECTURE UNIVERSITY,COLLEGE OF ENGINEERING,PROFESSOR, 工学部 (60081246)
• Co-Investigator(Kenkyū-buntansha): KIKUTA Hisahiro OSAKA PREFECTURE UNIVERSITY,COLLEGE OF ENGINEERING,RESERCH ASSOSIATE, 工学部, 助手 (10214743) ; KAWATA Hiroaki OSAKA PREFECTURE UNIVERSITY,COLLEGE OF ENGINEERING,ASSISTANT PROFESSOR, 工学部, 講師 (90186099) ; MURATA Kenji OSAKA PREFECTURE UNIVERSITY,COLLEGE OF ENGINEERING,PROFESSOR, 工学部, 教授 (30029079) ; IWATA Kouichi OSAKA PREFECTURE UNIVERSITY,COLLEGE OF ENGINEERING,PROFESSOR, 工学部, 教授 (20081242)
• Project Period (FY): 1995 – 1996
• Keywords: micro cantilever / large deflection / electric field / drag force / viscous fluid / resonance

Research Abstract

For investigation of dynamic characteristics in bionic liquid, static and dynamic behaviors of micro cantilever are typically studied. The main results were as follows.
(1)Young's modulus of thin Si_3N_4 films are extracted from the resonance characteristics in air. The cantilevers are excited by Laser beams and the amplitudes are measured by optical methods.
(2)To study large deflection of micro cantilever in 3-dimensional static electric field, computer analysis system is developed based on large deflection elastic theory in thin films and electrostatic field theory. Relations between the Young's modulus of the poly-Si cantilever and the applied voltages, which is applied between the cantilever and the substrate, are obtained.
(3)Analytical model is proposed to control the force curve measurement system for AFM (Atomic Force Microscopy) proves based on the force balanced method. Based on this method, PID control system for AFM prove is designed to approach quick measurement period within 1/100 seconds.
(4)Resonance characteristics in water are measured for micro cantilevers by optical lever, which is excited by Laser beam. The resonance frequency in water shows around 1/10 times lower than that of in air. Using the string of beads model for estimating the drag force by viscous fluids, the resonance characteristics are theoretically derived based on the strings of beads model and the results show good agreements with the experimental results.