1995 Fiscal Year Annual Research Report

超並列光エレクトロニクス

Research Project

Project/Area Number	07CE2003
Research Institution	Tokyo Institute of Technology
Principal Investigator	伊賀健一東京工業大学, 精密工学研究所, 教授 (10016785)
Co-Investigator(Kenkyū-buntansha)	馬場俊彦東京工業大学, 精密工学研究所, 助教授 (50202271) 徳光永輔東京工業大学, 精密工学研究所, 助教授 (10197882) 小山二三夫東京工業大学, 精密工学研究所, 助教授 (30178397) 下河辺明東京工業大学, 精密工学研究所, 教授 (40016796) 石原宏東京工業大学, 精密工学研究所, 教授 (60016657)
Keywords	半導体レーザ / 光通信 / 微小光学 / 並列光情報処理 / 光インターコネクト / 光集積回路 / ニューロトランジスタ / マイクロマイン
Research Abstract	本研究プロジェクトは、光デバイス、集積回路工学、超音波工学、マイクロマシーン、金属材料科学、情報工学、光波センシングなど異なる分野の研究者チームからなり、研究分野の枠を越えて相互に連携を図りながら、面発光レーザを中心とした超並列光デバイスの開拓、大規模なフォトニクス集積技術の開拓、光技術を用いた新しいコンピュータシステムの探求とその具現化を進めた。平成7年度は、新規導入設備の整備を完了し、超並列光エレクトロニクスのキイデバイスである面発光レーザの高性能化、近赤外から紫外・青色領域での広い波長領域での実現のための研究を推進した。さらに、超並列光電子融合システムの実現ために、強誘電体材料をゲート材料としたニューロトランジスタの試作を進め、人工ニューロン素子実現のための基礎データを収集した。また、高精度なハイブリッド集積化技術のための周辺技術の開拓を進めた。以下に本年度の研究経過の概要を示す。 1.面発光レーザの高性能化これまで、横方向の共振器微小化によって低しきい値化を進め、減圧MOCVD法によりGaInAs/GaAs系面発光レーザを製作し、直径5μmの素子で最低70μAのしきい値を実現している。この選択酸化構造を用いた低しきい値面発光レーザのモデリングの確立、最適設計、プロセス技術の確立などを行い、マイクロアンペアオーダーの低しきい値デバイス実現のための基礎技術を確立した。また、活性領域に変調ド-ピングを施した量子井戸構造を用いることにより、さらに低しきい値化が可能であることを見い出した。また、傾斜基板を用いることにより、増幅特性に偏波依存性が発現することを実験的に明らかにし、傾斜基板を用いた面発光レーザの偏波面制御技術を開拓した。 2.紫外・青色領域面発光レーザの基礎技術開拓紫外・青色領域面発光レーザの基礎設計を完了し、有機金属気相成長法による面発光レーザウェハの成長条件把握や高反射率反射鏡の形成技術を確立し、可視・紫外面発光レーザ実現の基礎を確立した。ニューロトランジスタの基礎特性実現強誘電体膜の部分分極特性を用いた適応学習型ニューロチップの学習効果を、シュミレータにより確認するとともに、実際に適応学習型ニューロデバイスを実現し、PLZT強誘電体膜の分極反転によるメモリ機能を世界で初めて実現した。 4.大規模集積化のための周辺技術開拓超精密位置決め機構の制御法の開拓や、視覚と触覚の知覚統合したバーチャルラボの基本構成に関する基礎的研究を行い、高精度なハイブリッド集積化技術のための周辺技術の開拓を進めた。次年度以降は、平成7年度の研究成果をさらに発展させ、超並列エレクトロニクスのキイデバイスである面発光レーザの高性能化のための研究をさらに推進する。半導体の超微細加工技術を確立して、光の波長程度までの極限微小化を進め、超低消費電力素子の実現を目指すとともに、高密度光記録などの応用が期待できる紫外・青色域の面発光レーザの実現を目指す。また、面発光レーザを中心とした超並列光デバイスを用いた光通信ネットワークシステム、光電子融合型プロセッサ、及びこれらを統合した超並列光エレクトロニクスのシステムのアーキテクチャ、ソフトウェアを開拓する。

Research Products

(98 results)

All Other

All Publications (98 results)

[Publications] F. Koyama, T. Mukaihara, Y. Hayashi, N. Ohnoki, N. Hatori and K. Iga: ""Wavelength control of vertical cavity surface emitting lasers by using nonplanar MOCVD"" IEEE Photon. Tech. Lett.no. 7. 10-12 (1995)
[Publications] T. Mukaihara, N. Ohnoki, Y. Hayashi, N. Hatori, Fumio Koyama and K. Iga: ""Polarization control of vertical-cavity surface-emitting lasers by using a birefringent metal/dielectric polarizer loaded on top distributed Bragg reflector"" IEEE J. Selected Topics in Ouantum Electron.no.1. 667-673 (1995)
[Publications] T. Baba, Y. Yogo, K. Suzuki, T. Kondoh, F. Koyama and K. Iga: ""Vertical cavity surface-emitting laser array for 1.3μm range parallel optical fiber transmissions"" IEICETrans. Electron.vol. E78-C. 201-203 (1995)
[Publications] T. Baba, T. Kondoh, F. Koyama and K. Iga: ""Finite element analysis of thermal characteristics in continuous wave long wavelength surface emitting lasers(I): dielectric cavity structures"" Optical Review. vol. 2,no. 2. 123-127 (1995)
[Publications] T. H. Loh, T. Miyamoto, F. Koyama, K. Iga and K. Furuya: ""Study on inelastic scattering effect in unstrained and strain-compensated GaInAs/GaInP multiquantum barriers"" Jpn. J. Appl. Phys.vol.34. 4511-4514 (1995)
[Publications] Y. Kurita, N. Yokouchi, T. Miyamoto, F. Koyama, and K. Iga: ""Refractive indexvariation in GaInAsP/InP quantum confined structures grown by chemical beam epitaxy"" Jpn. J. Appl. Phys.vol.34. 5626-5627 (1995)
[Publications] A. Matsutani, F. Koyama and K. Iga: ""Surface temperature increase in reactive ion beam etch and improvement of profiles by multistep etching"" Jpn. J. Appl. Phys.vol.34. 2053-2054 (1995)
[Publications] A. Matsutani, F. Koyama and K. Iga: ""Three-dimensional electron probe roughness analysis of InP sidewalls processed by reactive ion beam etching"" Appl. Phys. Lett.vol.66. 64-66 (1995)
[Publications] T. Baba, T. Kondoh, F. Koyama and K. Iga: ""Finite element analysis of thermal characteristics in continuous wave long wavelength surface emitting lasers(II): semiconductor distributed bragg reflectors"" Optical Review. vol.2, no.4. 323-325 (1995)
[Publications] T. Honda, A. Katsube, T. Sakaguchi, F. Koyama and K. Iga: ""Threshold estimation of GaN-based surface emitting lasers operating in ultraviolet spectral region,"" Jpn, J. Appl. Phys. vol.34. 3527-3532 (1995)
[Publications] T. Honda, T. Sakaguchi, F. Koyama, K. Iga, K. Yanashima, K. Inoue, H. Munekata and Kukimoto: ""Optically pumped ZnSe-based vertical cavity surface emitter with SiO_2/TiO_2 multilayer reflector,"" Jpn, J. Appl. Phys. vol.78,no.7. (1995)
[Publications] T. H. Loh, T. Miyamoto, F. Koyama and K. Iga: ""Strain-compensated multi-quantum barriers for reduction of electron leakages in long-wavelength semiconductor lasers"" Jpn, J. Appl. Phys. vol.34. 1504-1505 (1995)
[Publications] K. Iga and F. Koyama: ""Surface normal optical devices and related packaging technologies"" Journal of Japan Institute for Interconnecting and Packaging Electronic Circuits. vol.10,no.5. 351-354 (1995)
[Publications] T. Mukaihara, Y. Hayashi N. Hatori, N. Ohnoki A. Matsutani, F. Koyama and K. Iga: ""Low-threshold mesa etched vertical-cavity InGaAs/GaAs surface-emitting lasers grown by MOCVD"" Electron. Lett.vol.31. 647-648 (1995)
[Publications] Y. Hayashi, T. Mukaihara, N. Hatori, N. Ohnoki, A. Matsutani, F. Koyama and K. Iga: ""Record low-threshold index-guided InGaAs/GaAlAs vertical-cavity surface-emitting laser with a native oxide confinement structure"" Electron. Lett.,. vol.31. 560-562 (1995)
[Publications] Y. Hayashi, T. Mukaihara, N. Hatori, N. Ohnoki, A. Matsutani, F. Koyama and K. Iga: ""Lasing characteristics of low-threshold oxide confinement InGaAs-GaAlAs vertical-cavity surface-emitting lasers"" IEEE Photon. Technol. Lett.vol.7. 1234-1236 (1995)
[Publications] T. Honda, T. Sakaguchi, F. Koyama and K. Iga, K. Inoue, H. Munekata, H. Kukimoto: ""Design and fabrication of ZnSe-based blue/green surface emitting lasers"" Program and Abstracts of 7th International Conference on II-VI Compounds and Devices. no. Tu-13. (1995)
[Publications] T. Honda, A. Katsube, T. Sakaguchi, F. Koyama and K. Iga: ""Design of GaN-based surface emitting laser with low threshold operation"" Technical Digest of International Conference on Silicon Carbide and Related Materials-ICSCRM-95. Tup-14. 279-280 (1995)
[Publications] A. Katsube, T. Honda, T. Sakaguchi, F. Koyama and K. Iga: ""Design of low threshold GaN-based quantum well surface emitting laser"" Topical Workshop on III-V Nitrides. P-8. (1995)
[Publications] T. Sakaguchi, T. Honda, A. Katsube, F. Koyama and K. Iga: ""MgO/SiO_2 dielectric multilayer reflectors formed by electron-beam evaporation for GaN surface emitting lasers"" Topical Workshop on III-V Nitrides. P-10. (1995)
[Publications] T. Baba, M. Hamasaki, N. Watanabe, A. Matsutani, T. Mukaihara, F, Koyama and K. Iga: ""A novel short cavity laser with deep grating DBRs"" The 1995 International Conference of Solid State Devices and Materials. no. PD-5-4. (1995)
[Publications] J. Kato, F. Koyama, A. Matsutani, T. Mukaihara and K. Iga: ""InGaAs/GaAs strained quantum well lasers with micro-corner reflectors"" The 1995 International Conference of Solid State Devices and Materials. no. D-5-3. (1995)
[Publications] N. Hatori, T. Mukaihara, Y. Hayashi, N. Ohnoki, F. Koyama and K. Iga: ""Design and fabrication of quantum wires for vertical-cavity surface-emitting lasers"" The 1995 International Conference of Solid State Devices and Materials. no. S-VI-9. (1995)
[Publications] K. Iga: ""Prospects of surface emitting lasers"" The 22nd International Symposium on Compound Semiconductors. (1995)
[Publications] T. Mukaihara, N. Ohnoki, Y. Hayashi, N. Hatori, F. Koyama and K. Iga: ""Excess intensity noise of vertical-cavity surface-emitting lasers caused by polarization fluctuation"" CLEO/Pacific Rim. no. ThC2. (1995)
[Publications] T. Honda, K. Inoue, H. Munekata, H. Kukimoto, F. Koyama and K. Iga: ""ZnSe-based vertical fabry-perot cavity for blue surface emitting lasers"" Tech. Digest of the Pacific Rim Conf. on Lasers and Electro-Optics,. no. ThI2. pp.134-135 (1995)
[Publications] T. Miyamoto, T. Takada, Y. Kurita, K. Mori, F. Koyama, and K. Iga: ""Design of p-cladding layer for low threshold long-wavelength surface-emitting lasers,"" The Pacific Rim Conference on Lasers and Electro-Optics. paper ThI3. (1995)
[Publications] K. Iga: ""Advance in surface emitting lasers"" CLEO-PR. ThCl. (1995)
[Publications] T. Mukaihara, Y. Hayashi, N. Hatori, N. Ohnoki, A. Matsutani, F. Koyama and K. Iga,: ""0.33 mA threshold InGaAs/GaAs vertical-cavity surface-emitting lasers grown by MOCVD"" CLEO. no. CTuB5. (1995)
[Publications] F. Koyama,K. Suzuki, A. Matsutani, J. Kato, T. Mukaihara and K. Iga: ""Active semiconductor power splitters with sub-micron wide input aperture"" Proc. of 10th International Conference on Integrated Optics and Optical Fibre Communication. ThD2-5. 106-107 (1995)
[Publications] T. Kato, J. R. Mizuno, T. Watanabe and K.Iga: ""Self-aligning optical interconnects using put-in microconnector-II,"" Proc.10th International Conference on Integrated Optics and Optical Fibre Communication. no. FA3-3. (1995)
[Publications] N. Ohnoki, T. Mukaihara, Y. Hayashi, N. Hatori, F. Koyama and K. Iga: ""Optical characteristics of Au/GaAs polarizer for controlling surface-emitting laser polarization"" CLEO/Pacific Rim. no. ThC3. (1995)
[Publications] F. Koyama, T. Mukaihara, Y. Hayashi, N. Ohnoki, N. Hatori and K. Iga: ""Low threshold multi-wavelength VCSEL arrays fabricated by nonplanar MOCVD"" Proc. of SPIE'95,. vol. 2399. 629-635 (1995)
[Publications] T. H. Loh, F. Koyama and K. Iga: ""A study on inelastic scattering effect in unstrained and strain-compensated GaInAs/GaInP multi-quantum barrier"" International Workshop on Mesoscopic Physics and Electronics (MPE'95). no. J4. (1995)
[Publications] Y. Hayashi, T. Mukaihara, N. Hatori, N. Ohnoki, A, Matsutani, F. Koyama and K. Iga: ""A record low threshold InGaAs/GaAlAs vertical-cavity surface-emitting laser"" Quantum Optoelectronics Conference. no. PDP2. (1995)
[Publications] T. H. Loh, T. Miyamoto Y. Kurita, F. Koyama, and K. Iga: ""Reduction of inelastic scattering effect by introducing strain-compensated superlattice into GaInAs/GaInP multi-quantum barriers,"" The 7th Int. Conf. on Indium Phosphide and Related Materials,. paper ThP1. (1995)
[Publications] F. Koyama and K. Iga: ""Design of Ultra-low power optical interconnects using low threshold vertical cavity surface emitting lasers"" OSA Annual Meeting. WO2. (1995)
[Publications] K. Iga: ""2-D parallel microoptics: wide applications in future"" 5th Microoptics Conf. (MOC'95). J3. (1995)
[Publications] E. Acosta, S. Rios, M. Oikawa and K. Iga: ""Chromatic variation of the refractive index profile of PML"" Proc. 5th Micro-Optics Conference. no. G-15. (1995)
[Publications] T. Kato, J. R. Mizuno and K. Iga: ""Excess loss estimation in a put-in microconnector"" Proc. 5th Micro-Optics Conference. no. D-4. (1995)
[Publications] T. Katayama, K. Nakagawa, Y. Munetaka and K. Iga: ""Some characteristics of an optical post-processor for parallel image recognition system using planar microlens array"" The Fifth Microoptics Conference. no. G12. (1995)
[Publications] F. Koyama, A. Matsutani and K. Iga: ""Etched facet semiconductor resonators fabricated by reactive ion beam etching for micro-photonic integrated circuits"" LEOS 1995 Annual Meeting Conference Proceedings. OMP5.3. 114-115 (1995)
[Publications] T. Sakaguchi, T. Honda, A. Katsube, F. Koyama and K. Iga: ""MgO/SiO_2 dielectric multilayer reflectors for GaN-based ultra-violet surface emitting lasers"" LEOS 1995 Annual Meeting Conference Proceedings. vol. 2. 102-103 (1995)
[Publications] A, Matsutani, F. Koyama and K. Iga: ""Suppression of side-etch and smoothing of micro-needle on etched surface by multistep RIBE"" LEOS 1995 Annual Meeting Conference Proceedings. vol. 2. 112-113 (1995)
[Publications] S. Mitsugi, F. Koyama, J. Kato, A. Matsutani, T. Mukaihara, and K. Iga: ""GaInAs/GaAs micro-arc ring semiconductor Laser"" Jpn. J. Appl. Phys.vol. 34,no. 2B. 1265-1269 (1995)
[Publications] T. Katayama, K. Nakagawa and K. Iga: ""Image recognition system using planar microlens array"" O plus E. no. 184. 89-93 (1995)
[Publications] S. Rios, E. Acosta, M. Oikawa and K. Iga: ""Refractive index profile of planar microlenses"" Trends in Optical Fibre Metrology and Standards. 773-780 (1995)
[Publications] T. Mukaihara, N. Hatori, N. Ohnoki,A. Mizutani, M. Abe, A. Matsutani, F. Koyama and K. Iga: ""Fabrication processes for low threshold InGaAs vertical-cavity surface-emitting lasers"" The Third International Symposium on New Phenomena in Mesoscopic Structures. no. P16. (1995)
[Publications] T. Baba and T. Matsuzaki: "Theoretical calculation of photonic gap in semiconductor 2-dimensional photonic band structures with various shapes of optical atoms" Japanese Journal of Applied Physics. 34. 4496-4498 (1995)
[Publications] T. Baba and T. Matsuzaki: "Polarization change in spontaneous emission from GaInAsP/InP 2-dimensional photonic crystals" Electronics Letters. 31. 1776-1778 (1995)
[Publications] T. Baba and T. Matsuzaki: "Polarization controlled spontaneous emission from GaInAsP/InP strained QW 2D photonic crystals" Proc. Int. Conf. Solid State Devices and Physics. 13. 800-802 (1995)
[Publications] T. Baba and T. Matsuzaki: "Gradient-index photonic crystals for the control of photonic band diagrams" Proc. Microoptic Conference. 5. 18-21 (1995)
[Publications] T. Baba, T. Kondo, et. al.: "Finite element analysis of thermal characteristics in continuous wave long wavelength surface emitting lasers(II)" Optical Review. 2. 323-325 (1995)
[Publications] T. Baba, T. Kondo, et. al.: "Finite element analysis of thermal characteristics in GaInAsP/InP surface emitting lasers……dielectric and semiconductor cavities" Proc. Conf. Laser and Electro-Optics Pasific Rim. 1. 259-260 (1995)
[Publications] T. Baba, M. Hamasaki, et. al.: "A novel short cavity laser with deep grating DBRs" Proc. Int. Conf. Solid State Devices and Physics. 13. 989-991 (1995)
[Publications] T. Baba, M. Hamasaki, et. al.: "A novel short cavity laser with deep grating distributed Bragg reflectors" Japanese Journal of Applied Physics. 35. (1996)
[Publications] T. Baba and T. Matsuzaki: "Fabrication and photoluminescence studies of GaInAsP/InP 2-dimensional photonic crystals" Japanese Jounal of Applied Physics. 35. (1996)
[Publications] T. Baba, N. Kamizawa and M. Ikeda: "Nanofabrication process of GaInAsP/InP 2D photonic crystals by a methane-based reactive ion beam etching" Physica B. (1996)
[Publications] T. Baba, R. Watanabe, et. al.: "Theoretical and experimental estimations of photon recycling in light emitting devices with a metal mirror" Japanese Journal of Applied Physics. 35. 97-100 (1996)
[Publications] R. Morikawa, S. Ueha, K. Nakamura: "Error evaluation of the structural intensity measured with a scanning laser doppler vibrometer and a κ-space signal" J. Acoust. Soc. Am.99(To be published). (1996)
[Publications] T. Ishii, S. Ueha, K. Nakamura, K. Ohnishi: "Wear Properties and Life Prediction of Frictional Materials for Ultrasonic Motors" Jpn. J. Appl. Phys. Soc.34. 2765-2770 (1995)
[Publications] J. Satonobu, S. Ueha, K. Nakamura: "A Study of the Mechanism of a Scientific Toy "Girigiri-Garigari"" Jpn. J. Appl. Phys. Soc.34. 2745-2751 (1995)
[Publications] J. Hu, T. Yamazaki, K. Nakamura, S. Ueha: "Analysis of an Ultrasonic Motor Driving Fluid Directly" Jpn. J. Appl. Phys. Soc.34. 2702-2706 (1995)
[Publications] K. Nakamura, M. Maruyama, S. Ueha: "A New Ultrasonic Motor Using Electro-Rheological Fluid and Torsional Vibration" Ultrasonic International'95. (1995)
[Publications] K. Nakamura, S. Ueha: "Structural Intensity Mesurements by an optical Fiber Array Probe" Proc. 1995 International Congress on Noise Control Engineering. 641-646 (1995)
[Publications] R. Morikawa, K. Nakamura, S. Ueha: "Structural Intensity Derication using Normal and In-plane Vibration Displacements Measured by a Laser Doppler Vibrometer" Proc. 1995 International Congress on Noise Control Engineering. 637-640 (1995)
[Publications] S. Ueha, H. Akabori, K. Kitamura, N. Ohtomo, S. Kimura: "Using Ultrasonic Scattering" Proc. 15th international Congress on Acoustics. 451-454 (1995)
[Publications] Kaiji SATO, Akira SHIMOKOHBE, et al.: "Control and Elimination of Lead Screw Backlash for Ultra-precision Positioning" JSME International Journal Series C. 38【1】. 36-41 (1995)
[Publications] 佐藤海二,下河辺明ほか: "バックラッシを有する送りねじ機構の動的挙動" 日本機械学会論文集(C編). 61【584】. 1423-1430 (1995)
[Publications] 進士忠彦,佐藤海二,下河辺明ほか: "高精度磁気軸受の研究(第1報)-磁力による非接触位置決め方法の検討-" 精密工学会誌. 61【11】. 1624-1628 (1995)
[Publications] Kaiji SATO, Akira SHIMOKOHBE: "High Speed Driving and Ultra Precision Positioning by Lead Screw Mechanism" Proceedings of Ninth World Congress on the Theory of Machines and Mechanisms. 4. 3120-3124 (1995)
[Publications] Kaiji SATO, Akira SHIMOKOHBE: "Backlash Control of Lead Screw for High Speed and Ultra Precision Positioning by Piezoelectric Actuator" Proceedings of 4th Japan International SAMPE Symposium & Exhibition. 2. 1076-1081 (1995)
[Publications] Akira SHIMOKOHBE: "The State of the Art of Nano-meter Motion Control in Japan" Proceedings of Trends in Industrial Measurements & Automation-96. 2-8 (1996)
[Publications] Y. Higo, H. Kawabe, Y. Natsume, S. Nunomura: "Nondestructive Evaluation of Micromechanism of Deformation Process During Fatigue Testing on Polymer by ETFuM (Elastic-wave Transfer Function Method)" Nondestructive Characterization of Materials VI; Plenum,. 223-230 (1995)
[Publications] 六本木哲,肥後矢吉: "異種材料組み合わせ試験片の腐食特性に関する実験的研究" 生体材料. 13. 5-12 (1995)
[Publications] Shun-ichiro Ohmi, Eisuke Tokumitsu, Hiroshi Ishiwara: "Contactless Measurement of Electron Mobility in Ferroelectric Gate High-Electron-Mobility Transistor Structures" Jpn. J. Appl. Phys.34. L603-L605 (1995)
[Publications] Shun-ichiro Ohmi, Eisuke Tokumitsu, Hiroshi Ishiwara: "Characterization of ferroelectric BaMgF_4 films grown on AlGaAs/GaAs(100) high-electron-mobility transistor structures" JOURNAL OF CRYSTAL GROWTH. 150. 1104-1107 (1995)
[Publications] S. Ohmi, M. Yoshihara, T. Okamoto, E. Tokumitsu, and H. Ishiwara: "Electrical Properties of Ferroelectric Gate HEMT Structures" Reprinted from Extended Abstrasts of the 1995 Intern. Conf. on Solid State Devices and Materials. 956-958 (1995)
[Publications] E. Tokumitsu, K. Itani, Bum-ki Moon, H. Ishiwara: "Preparation of Films on Si Substrates Using SrTiO_3 Buffer Layers" Mat. Res. Soc. Symp. Proc.361. 427-432 (1995)
[Publications] E. Tokumitsu, R. Nakamura, K. Itani, and H. Ishiwara: "Film Quality Dependence of Adaptive-Learning Processes in Neurodevices Using Ferroelectric PbZr_xTi_<1-x>O_3(PZT) Films" Jpn. J. Appl. Phys.34. 1061-1065 (1995)
[Publications] E. Tokumitsu, K. Itani, Bum-ki Moon, H. Ishiwara: "Crystalline Quality and Electrical Properties of PbZr_xTi_<1-x>O_3 Thin Films Prepared on StTiO_3-Covered Si Substrates" Jpn. J. Appl. Phys.34. 5202-5206 (1995)
[Publications] Kozo IKEGAMI, Hiroshi KAWADA: "Experimental Estimation of Mechanical Properties of Resin for IC Plastic Package" Applications of Experimental Mechanics to Electronic Packaging. 13. 47-51 (1995)
[Publications] 松井広明,池上皓三: "相変化時における熱硬化性樹脂の粘弾性特性と硬化温度による内部応力への影響" 日本機械学会論文集A編. (掲載予定).
[Publications] Masahiro ISHII: "Networked SPIDAR: A Networked Virtual Enviroment with Visual, Auditory, and Haptic Interaction" PRESENCE. 3. 351-359 (1994)
[Publications] 石井雅博: "両手協調作業のための仮想環境の構築について" TIEE JAPAN. 115-C. 230-235 (1995)
[Publications] 王生進: "3次元オブジェクトの高速表示のためのレンジデータ再標本化" テレビジョン学会誌. 49. 1246-1251 (1995)
[Publications] 京屋知行: "力覚生成機能をもつ仮想環境における立体ゲームの構築-仮想ハノイの塔-" テレビジョン学会誌. 49. 1347-1352 (1995)
[Publications] 山本泰秀: "力覚提示機能を有する仮想共同作業空間" 第10回ヒューマン・インタフェース・シンポジウム論文集. 203-206 (1994)
[Publications] 王生進: "計測点群データの再標本化に基づく3次元形状モデリング" グラフィックスとCAD. 73. 9-16 (1995)
[Publications] K. Iga: ""GaInAsP/InP vertical cavity surface emitting lasers in 1.3 and 1.5 mm-wavelength band", in Current Trends in Vertical Cavity Surface Emitting Lasers," World Scientific Pub. Co. Pte. Ltd., Ed. by T. P. Lee, 530-542 (1995)
[Publications] T. Baba and K. Iga: ""Spontaneous emission in microcavity surface emitting lasers", in Spontaneous Emission and Laser Oscillation in Microcavities" CRC Press, Ed. by H. Yokoyama and K. Ujihara,237-273 (1995)
[Publications] K. Iga, Editor: ""Quantum Electronics", in Applied Physics Data Book" Maruzen, (1995)
[Publications] K. Iga and S. Kinoshita: ""Process Technology for Semiconductor Lasers"" Springer-Verlag, Frankfurt, (1995)
[Publications] K. Iga: ""Contemporary Mathmatics for Electronics"" Ohmsha, (May,1995)
[Publications] K. Iga, Editor: ""Handbook of Microoptics"" Asakura-Shoten Pub. Co. Ltd., (1995)
[Publications] K. Iga and F. Koyama: ""Surface emitting laser diodes and 2-D arrayed devices", in Ultrafast and Ultra-parallel Optoelectronics" Ohm-sha/John Wiley, Ed. by T. Sueta and T. Okoshi,361-370 (1995)
[Publications] T. Baba and T. Matsuzaki (分担): "Quantum optics in wavelength scale structures" NATO Book, (1996)
[Publications] 上羽貞行(分担): "静粛工学" 開発社, 8 (1995)

1995 Fiscal Year Annual Research Report

超並列光エレクトロニクス

Principal Investigator

伊賀 健一 東京工業大学, 精密工学研究所, 教授 (10016785)

Research Products

[Publications] F. Koyama, T. Mukaihara, Y. Hayashi, N. Ohnoki, N. Hatori and K. Iga: ""Wavelength control of vertical cavity surface emitting lasers by using nonplanar MOCVD"" IEEE Photon. Tech. Lett.no. 7. 10-12 (1995)

[Publications] T. Baba, Y. Yogo, K. Suzuki, T. Kondoh, F. Koyama and K. Iga: ""Vertical cavity surface-emitting laser array for 1.3μm range parallel optical fiber transmissions"" IEICETrans. Electron.vol. E78-C. 201-203 (1995)

[Publications] T. Baba, T. Kondoh, F. Koyama and K. Iga: ""Finite element analysis of thermal characteristics in continuous wave long wavelength surface emitting lasers(I): dielectric cavity structures"" Optical Review. vol. 2,no. 2. 123-127 (1995)

[Publications] T. H. Loh, T. Miyamoto, F. Koyama, K. Iga and K. Furuya: ""Study on inelastic scattering effect in unstrained and strain-compensated GaInAs/GaInP multiquantum barriers"" Jpn. J. Appl. Phys.vol.34. 4511-4514 (1995)

[Publications] Y. Kurita, N. Yokouchi, T. Miyamoto, F. Koyama, and K. Iga: ""Refractive indexvariation in GaInAsP/InP quantum confined structures grown by chemical beam epitaxy"" Jpn. J. Appl. Phys.vol.34. 5626-5627 (1995)

[Publications] A. Matsutani, F. Koyama and K. Iga: ""Surface temperature increase in reactive ion beam etch and improvement of profiles by multistep etching"" Jpn. J. Appl. Phys.vol.34. 2053-2054 (1995)

[Publications] A. Matsutani, F. Koyama and K. Iga: ""Three-dimensional electron probe roughness analysis of InP sidewalls processed by reactive ion beam etching"" Appl. Phys. Lett.vol.66. 64-66 (1995)

[Publications] T. Baba, T. Kondoh, F. Koyama and K. Iga: ""Finite element analysis of thermal characteristics in continuous wave long wavelength surface emitting lasers(II): semiconductor distributed bragg reflectors"" Optical Review. vol.2, no.4. 323-325 (1995)

[Publications] T. Honda, A. Katsube, T. Sakaguchi, F. Koyama and K. Iga: ""Threshold estimation of GaN-based surface emitting lasers operating in ultraviolet spectral region,"" Jpn, J. Appl. Phys. vol.34. 3527-3532 (1995)

[Publications] T. Honda, T. Sakaguchi, F. Koyama, K. Iga, K. Yanashima, K. Inoue, H. Munekata and Kukimoto: ""Optically pumped ZnSe-based vertical cavity surface emitter with SiO_2/TiO_2 multilayer reflector,"" Jpn, J. Appl. Phys. vol.78,no.7. (1995)

[Publications] T. H. Loh, T. Miyamoto, F. Koyama and K. Iga: ""Strain-compensated multi-quantum barriers for reduction of electron leakages in long-wavelength semiconductor lasers"" Jpn, J. Appl. Phys. vol.34. 1504-1505 (1995)

[Publications] K. Iga and F. Koyama: ""Surface normal optical devices and related packaging technologies"" Journal of Japan Institute for Interconnecting and Packaging Electronic Circuits. vol.10,no.5. 351-354 (1995)

[Publications] T. Mukaihara, Y. Hayashi N. Hatori, N. Ohnoki A. Matsutani, F. Koyama and K. Iga: ""Low-threshold mesa etched vertical-cavity InGaAs/GaAs surface-emitting lasers grown by MOCVD"" Electron. Lett.vol.31. 647-648 (1995)

[Publications] Y. Hayashi, T. Mukaihara, N. Hatori, N. Ohnoki, A. Matsutani, F. Koyama and K. Iga: ""Record low-threshold index-guided InGaAs/GaAlAs vertical-cavity surface-emitting laser with a native oxide confinement structure"" Electron. Lett.,. vol.31. 560-562 (1995)

[Publications] Y. Hayashi, T. Mukaihara, N. Hatori, N. Ohnoki, A. Matsutani, F. Koyama and K. Iga: ""Lasing characteristics of low-threshold oxide confinement InGaAs-GaAlAs vertical-cavity surface-emitting lasers"" IEEE Photon. Technol. Lett.vol.7. 1234-1236 (1995)

[Publications] T. Honda, T. Sakaguchi, F. Koyama and K. Iga, K. Inoue, H. Munekata, H. Kukimoto: ""Design and fabrication of ZnSe-based blue/green surface emitting lasers"" Program and Abstracts of 7th International Conference on II-VI Compounds and Devices. no. Tu-13. (1995)

[Publications] T. Honda, A. Katsube, T. Sakaguchi, F. Koyama and K. Iga: ""Design of GaN-based surface emitting laser with low threshold operation"" Technical Digest of International Conference on Silicon Carbide and Related Materials-ICSCRM-95. Tup-14. 279-280 (1995)

[Publications] A. Katsube, T. Honda, T. Sakaguchi, F. Koyama and K. Iga: ""Design of low threshold GaN-based quantum well surface emitting laser"" Topical Workshop on III-V Nitrides. P-8. (1995)

[Publications] T. Sakaguchi, T. Honda, A. Katsube, F. Koyama and K. Iga: ""MgO/SiO_2 dielectric multilayer reflectors formed by electron-beam evaporation for GaN surface emitting lasers"" Topical Workshop on III-V Nitrides. P-10. (1995)

[Publications] T. Baba, M. Hamasaki, N. Watanabe, A. Matsutani, T. Mukaihara, F, Koyama and K. Iga: ""A novel short cavity laser with deep grating DBRs"" The 1995 International Conference of Solid State Devices and Materials. no. PD-5-4. (1995)

[Publications] J. Kato, F. Koyama, A. Matsutani, T. Mukaihara and K. Iga: ""InGaAs/GaAs strained quantum well lasers with micro-corner reflectors"" The 1995 International Conference of Solid State Devices and Materials. no. D-5-3. (1995)

[Publications] N. Hatori, T. Mukaihara, Y. Hayashi, N. Ohnoki, F. Koyama and K. Iga: ""Design and fabrication of quantum wires for vertical-cavity surface-emitting lasers"" The 1995 International Conference of Solid State Devices and Materials. no. S-VI-9. (1995)

[Publications] K. Iga: ""Prospects of surface emitting lasers"" The 22nd International Symposium on Compound Semiconductors. (1995)

[Publications] T. Mukaihara, N. Ohnoki, Y. Hayashi, N. Hatori, F. Koyama and K. Iga: ""Excess intensity noise of vertical-cavity surface-emitting lasers caused by polarization fluctuation"" CLEO/Pacific Rim. no. ThC2. (1995)

[Publications] T. Honda, K. Inoue, H. Munekata, H. Kukimoto, F. Koyama and K. Iga: ""ZnSe-based vertical fabry-perot cavity for blue surface emitting lasers"" Tech. Digest of the Pacific Rim Conf. on Lasers and Electro-Optics,. no. ThI2. pp.134-135 (1995)

[Publications] T. Miyamoto, T. Takada, Y. Kurita, K. Mori, F. Koyama, and K. Iga: ""Design of p-cladding layer for low threshold long-wavelength surface-emitting lasers,"" The Pacific Rim Conference on Lasers and Electro-Optics. paper ThI3. (1995)

[Publications] K. Iga: ""Advance in surface emitting lasers"" CLEO-PR. ThCl. (1995)

[Publications] T. Mukaihara, Y. Hayashi, N. Hatori, N. Ohnoki, A. Matsutani, F. Koyama and K. Iga,: ""0.33 mA threshold InGaAs/GaAs vertical-cavity surface-emitting lasers grown by MOCVD"" CLEO. no. CTuB5. (1995)

[Publications] F. Koyama,K. Suzuki, A. Matsutani, J. Kato, T. Mukaihara and K. Iga: ""Active semiconductor power splitters with sub-micron wide input aperture"" Proc. of 10th International Conference on Integrated Optics and Optical Fibre Communication. ThD2-5. 106-107 (1995)

[Publications] T. Kato, J. R. Mizuno, T. Watanabe and K.Iga: ""Self-aligning optical interconnects using put-in microconnector-II,"" Proc.10th International Conference on Integrated Optics and Optical Fibre Communication. no. FA3-3. (1995)

[Publications] N. Ohnoki, T. Mukaihara, Y. Hayashi, N. Hatori, F. Koyama and K. Iga: ""Optical characteristics of Au/GaAs polarizer for controlling surface-emitting laser polarization"" CLEO/Pacific Rim. no. ThC3. (1995)

[Publications] F. Koyama, T. Mukaihara, Y. Hayashi, N. Ohnoki, N. Hatori and K. Iga: ""Low threshold multi-wavelength VCSEL arrays fabricated by nonplanar MOCVD"" Proc. of SPIE'95,. vol. 2399. 629-635 (1995)

[Publications] T. H. Loh, F. Koyama and K. Iga: ""A study on inelastic scattering effect in unstrained and strain-compensated GaInAs/GaInP multi-quantum barrier"" International Workshop on Mesoscopic Physics and Electronics (MPE'95). no. J4. (1995)

[Publications] Y. Hayashi, T. Mukaihara, N. Hatori, N. Ohnoki, A, Matsutani, F. Koyama and K. Iga: ""A record low threshold InGaAs/GaAlAs vertical-cavity surface-emitting laser"" Quantum Optoelectronics Conference. no. PDP2. (1995)

[Publications] T. H. Loh, T. Miyamoto Y. Kurita, F. Koyama, and K. Iga: ""Reduction of inelastic scattering effect by introducing strain-compensated superlattice into GaInAs/GaInP multi-quantum barriers,"" The 7th Int. Conf. on Indium Phosphide and Related Materials,. paper ThP1. (1995)

[Publications] F. Koyama and K. Iga: ""Design of Ultra-low power optical interconnects using low threshold vertical cavity surface emitting lasers"" OSA Annual Meeting. WO2. (1995)

[Publications] K. Iga: ""2-D parallel microoptics: wide applications in future"" 5th Microoptics Conf. (MOC'95). J3. (1995)

[Publications] E. Acosta, S. Rios, M. Oikawa and K. Iga: ""Chromatic variation of the refractive index profile of PML"" Proc. 5th Micro-Optics Conference. no. G-15. (1995)

[Publications] T. Kato, J. R. Mizuno and K. Iga: ""Excess loss estimation in a put-in microconnector"" Proc. 5th Micro-Optics Conference. no. D-4. (1995)

[Publications] T. Katayama, K. Nakagawa, Y. Munetaka and K. Iga: ""Some characteristics of an optical post-processor for parallel image recognition system using planar microlens array"" The Fifth Microoptics Conference. no. G12. (1995)

[Publications] F. Koyama, A. Matsutani and K. Iga: ""Etched facet semiconductor resonators fabricated by reactive ion beam etching for micro-photonic integrated circuits"" LEOS 1995 Annual Meeting Conference Proceedings. OMP5.3. 114-115 (1995)

[Publications] T. Sakaguchi, T. Honda, A. Katsube, F. Koyama and K. Iga: ""MgO/SiO_2 dielectric multilayer reflectors for GaN-based ultra-violet surface emitting lasers"" LEOS 1995 Annual Meeting Conference Proceedings. vol. 2. 102-103 (1995)

[Publications] A, Matsutani, F. Koyama and K. Iga: ""Suppression of side-etch and smoothing of micro-needle on etched surface by multistep RIBE"" LEOS 1995 Annual Meeting Conference Proceedings. vol. 2. 112-113 (1995)

[Publications] S. Mitsugi, F. Koyama, J. Kato, A. Matsutani, T. Mukaihara, and K. Iga: ""GaInAs/GaAs micro-arc ring semiconductor Laser"" Jpn. J. Appl. Phys.vol. 34,no. 2B. 1265-1269 (1995)

[Publications] T. Katayama, K. Nakagawa and K. Iga: ""Image recognition system using planar microlens array"" O plus E. no. 184. 89-93 (1995)

[Publications] S. Rios, E. Acosta, M. Oikawa and K. Iga: ""Refractive index profile of planar microlenses"" Trends in Optical Fibre Metrology and Standards. 773-780 (1995)

[Publications] T. Mukaihara, N. Hatori, N. Ohnoki,A. Mizutani, M. Abe, A. Matsutani, F. Koyama and K. Iga: ""Fabrication processes for low threshold InGaAs vertical-cavity surface-emitting lasers"" The Third International Symposium on New Phenomena in Mesoscopic Structures. no. P16. (1995)

[Publications] T. Baba and T. Matsuzaki: "Theoretical calculation of photonic gap in semiconductor 2-dimensional photonic band structures with various shapes of optical atoms" Japanese Journal of Applied Physics. 34. 4496-4498 (1995)

[Publications] T. Baba and T. Matsuzaki: "Polarization change in spontaneous emission from GaInAsP/InP 2-dimensional photonic crystals" Electronics Letters. 31. 1776-1778 (1995)

[Publications] T. Baba and T. Matsuzaki: "Polarization controlled spontaneous emission from GaInAsP/InP strained QW 2D photonic crystals" Proc. Int. Conf. Solid State Devices and Physics. 13. 800-802 (1995)

[Publications] T. Baba and T. Matsuzaki: "Gradient-index photonic crystals for the control of photonic band diagrams" Proc. Microoptic Conference. 5. 18-21 (1995)

[Publications] T. Baba, T. Kondo, et. al.: "Finite element analysis of thermal characteristics in continuous wave long wavelength surface emitting lasers(II)" Optical Review. 2. 323-325 (1995)

[Publications] T. Baba, T. Kondo, et. al.: "Finite element analysis of thermal characteristics in GaInAsP/InP surface emitting lasers……dielectric and semiconductor cavities" Proc. Conf. Laser and Electro-Optics Pasific Rim. 1. 259-260 (1995)

[Publications] T. Baba, M. Hamasaki, et. al.: "A novel short cavity laser with deep grating DBRs" Proc. Int. Conf. Solid State Devices and Physics. 13. 989-991 (1995)

[Publications] T. Baba, M. Hamasaki, et. al.: "A novel short cavity laser with deep grating distributed Bragg reflectors" Japanese Journal of Applied Physics. 35. (1996)

[Publications] T. Baba and T. Matsuzaki: "Fabrication and photoluminescence studies of GaInAsP/InP 2-dimensional photonic crystals" Japanese Jounal of Applied Physics. 35. (1996)

[Publications] T. Baba, N. Kamizawa and M. Ikeda: "Nanofabrication process of GaInAsP/InP 2D photonic crystals by a methane-based reactive ion beam etching" Physica B. (1996)

[Publications] T. Baba, R. Watanabe, et. al.: "Theoretical and experimental estimations of photon recycling in light emitting devices with a metal mirror" Japanese Journal of Applied Physics. 35. 97-100 (1996)

[Publications] R. Morikawa, S. Ueha, K. Nakamura: "Error evaluation of the structural intensity measured with a scanning laser doppler vibrometer and a κ-space signal" J. Acoust. Soc. Am.99(To be published). (1996)

[Publications] T. Ishii, S. Ueha, K. Nakamura, K. Ohnishi: "Wear Properties and Life Prediction of Frictional Materials for Ultrasonic Motors" Jpn. J. Appl. Phys. Soc.34. 2765-2770 (1995)

[Publications] J. Satonobu, S. Ueha, K. Nakamura: "A Study of the Mechanism of a Scientific Toy "Girigiri-Garigari"" Jpn. J. Appl. Phys. Soc.34. 2745-2751 (1995)

[Publications] J. Hu, T. Yamazaki, K. Nakamura, S. Ueha: "Analysis of an Ultrasonic Motor Driving Fluid Directly" Jpn. J. Appl. Phys. Soc.34. 2702-2706 (1995)

[Publications] K. Nakamura, M. Maruyama, S. Ueha: "A New Ultrasonic Motor Using Electro-Rheological Fluid and Torsional Vibration" Ultrasonic International'95. (1995)

[Publications] K. Nakamura, S. Ueha: "Structural Intensity Mesurements by an optical Fiber Array Probe" Proc. 1995 International Congress on Noise Control Engineering. 641-646 (1995)

[Publications] R. Morikawa, K. Nakamura, S. Ueha: "Structural Intensity Derication using Normal and In-plane Vibration Displacements Measured by a Laser Doppler Vibrometer" Proc. 1995 International Congress on Noise Control Engineering. 637-640 (1995)

[Publications] S. Ueha, H. Akabori, K. Kitamura, N. Ohtomo, S. Kimura: "Using Ultrasonic Scattering" Proc. 15th international Congress on Acoustics. 451-454 (1995)

[Publications] Kaiji SATO, Akira SHIMOKOHBE, et al.: "Control and Elimination of Lead Screw Backlash for Ultra-precision Positioning" JSME International Journal Series C. 38【1】. 36-41 (1995)

[Publications] 佐藤海二,下河辺明ほか: "バックラッシを有する送りねじ機構の動的挙動" 日本機械学会論文集(C編). 61【584】. 1423-1430 (1995)

[Publications] 進士忠彦,佐藤海二,下河辺明ほか: "高精度磁気軸受の研究(第1報)-磁力による非接触位置決め方法の検討-" 精密工学会誌. 61【11】. 1624-1628 (1995)

[Publications] Kaiji SATO, Akira SHIMOKOHBE: "High Speed Driving and Ultra Precision Positioning by Lead Screw Mechanism" Proceedings of Ninth World Congress on the Theory of Machines and Mechanisms. 4. 3120-3124 (1995)

[Publications] Kaiji SATO, Akira SHIMOKOHBE: "Backlash Control of Lead Screw for High Speed and Ultra Precision Positioning by Piezoelectric Actuator" Proceedings of 4th Japan International SAMPE Symposium & Exhibition. 2. 1076-1081 (1995)

[Publications] Akira SHIMOKOHBE: "The State of the Art of Nano-meter Motion Control in Japan" Proceedings of Trends in Industrial Measurements & Automation-96. 2-8 (1996)

[Publications] Y. Higo, H. Kawabe, Y. Natsume, S. Nunomura: "Nondestructive Evaluation of Micromechanism of Deformation Process During Fatigue Testing on Polymer by ETFuM (Elastic-wave Transfer Function Method)" Nondestructive Characterization of Materials VI; Plenum,. 223-230 (1995)

[Publications] 六本木哲,肥後矢吉: "異種材料組み合わせ試験片の腐食特性に関する実験的研究" 生体材料. 13. 5-12 (1995)

[Publications] Shun-ichiro Ohmi, Eisuke Tokumitsu, Hiroshi Ishiwara: "Contactless Measurement of Electron Mobility in Ferroelectric Gate High-Electron-Mobility Transistor Structures" Jpn. J. Appl. Phys.34. L603-L605 (1995)

伊賀健一東京工業大学, 精密工学研究所, 教授 (10016785)