超並列光エレクトロニクス

1999 Fiscal Year Annual Research Report

• Project/Area Number: 07CE2003
• Research Institution: Tokyo Institute of Technology
• Principal Investigator: 伊賀 健一 東京工業大学, 精密工学研究所, 教授 (10016785)
• Co-Investigator(Kenkyū-buntansha): 小山 二三夫 東京工業大学, 精密工学研究所, 助教授 (30178397) ; 下河辺 明 東京工業大学, 精密工学研究所, 教授 (40016796) ; 石原 宏 東京工業大学, フロンティア創造共同研究センター, 教授 (60016657) ; 中村 健太郎 東京工業大学, 精密工学研究所, 助教授 (20242315) ; 徳光 英輔 東京工業大学, 精密工学研究所, 助教授 (10197882)
• Keywords: 半導体レーザー / 光通信 / 微小光学 / 並列光情報処理 / 光インターコネクト / 光集積回路 / ニューロトランジスタ / マイクロマシン

Research Abstract

平成11年度は,超並列光エレクトロニクスのキイデバイスである面発光レーザの極限性能追求,近赤外から紫外・青色領域での広い波長領域で動作する面発光レーザのための新材料の開拓を推進するとともに,超並列光電子融合システムの実現のために,強誘電体材料をゲートとしたニューロトランジスタの試作と集積化を進めた.以下に主な成果をまとめる.
1.面発光レーザの極限性能追求
多モードファイバを用いた超高速光LANを可能とする980nm帯の高性能の完全単一モード面発光レーザを実現した.偏波面は,高指数面GaAs基板を用いて特定の結晶軸に制御し,横モードについては,新しい多層酸化膜構造による横モード制御機構を考案してその有効性を実証した.また,長波長帯面発光レーザに関しては,トンネル接合を選択的に破壊する新構造を見いだして抜本的な性能向上の可能性を示した.
2.広いスペクトル域で動作する面発光レーザのための新材料探求
有機金属気相成長法による青色発光ダイオードの試作や青色・紫外面発光レーザ構造の光励起による誘導放出を確認し,青色面発光レーザの基盤技術を確立した.また,GaAs基板上で高歪GaInAs/GaAs量子井戸構造の形成技術を確立し,発振波長をこの系では世界最長の1.25μmまで拡大し,世界最高レベルの温度特性(特性温度200K)を実現した.さらに,化学ビーム成長法によるGaInNAs/GaAs量子井戸レーザを実現し,世界最高性能の高温動作を達成し,GaAs基板上の高性能長波長帯面発光レーザの可能性を示した.
3.極限微小マイクロレーザと光回路
マイクロディスクレーザの超微小化と低しきい値化を進めるとともに,大規模並列光回路の構成法を提案するとともに,その動作を数値解析により明らかにした.誘導結合プラズマエッチングによりマイクロディスクの微小化,キャリア拡散の向上を実現した.その結果,長波長帯レーザの世界最小記録となるしきい値電流40μA,及び電流注入レーザとしては,最大値となる自然放出光係数0.1を達成した.
4.ニューロトランジスタとその集積化
強誘電体ゲートFETとCMOSシュミットトリガ発振回路を絶縁物上シリコン基板上に集積化し,適応学習機能を持つニューロン回路を実現した.さらに浮遊電極をもつ構造のFETを採用することにより記憶保持時間を大幅に改善することに成功した.また,強誘電体ゲートFETマトリクスを作製し,ニューロン回路で必要とされる重み付きの積和演算がハードウエアレベルで可能なことを示した.
5.超並列光システムの基礎構築
2次元光デバイスの新しい光軸無調整の実装方法を確立するとともに,面発光レーザの2次元アレーモジュールの試作や面発光レーザからの近接場光生成に成功し,超並列大容量光伝送や大容量光メモリのための基礎を構築した.また,並列音圧センサーや光デバイス用マイクロアクチュエータの開発に成功した.

Research Products

• [Publications] Zhong Pan,Tomoyuki Miyamoto,Dietmar Schlenker,Shunichi Sato,Fumio Koyama,and Kenichi Iga: "Low temperature growth of GaInNAs/GaAs quantum wells by metalorganic chemical vapor deposition using tertiarybutylarsine "J.Appl.Phys. vol.84,no.11. 6409-6411 (1998)
• [Publications] Thoru Honda,Akira Inoue,Miyuki Mori,Tomoe Shirasawa,Noriaki Mochida,Koji Saotome,Takahiro Sakaguchi,Fumio Koyama,and Kenichi Iga: "GaN growth on ozonized sapphire (0001) substrates by MOVPE"J.Crystal Growth. vol.195. 319-322 (1998)
• [Publications] Tomoyuki Miyamoto,Shunichi Sato,,Zhong Pan,Dietmar Schlenker,Fumio Koyama,and Kenichi Iga: "GaNAs/GaInAs short-period superlattice quantum well structures grown by MOCVD using TBAs and DMHy"J.Crystal Growth. vol.195. 421-426, (1998)
• [Publications] Noriyuki Ohnoki,Gen Okazaki,Fumio Koyama,and Kenichi Iga: "Record high characteristic temperature (T_0=122K) of 1.55μm strain-compensated AlGaInAs/AlGaInAs MQW lasers with AlAs/AlInAs multiquantum barrier"Electron.Lett. vol.35,no.1. 51-52 (1999)
• [Publications] Takeo Katayama,Yuki Munetaka and Kenichi Iga: "Fundamental study on an optical pattern recognision system by using microlens array : Design and fabrication of the postprocessor"Kougaku. vol.28,no.1. 36-42 (1999)
• [Publications] Zhong Pan,Tomoyuki Miyamoto,Dietmar Schlenker,Fumio Koyama: "Quality improvement of GaInNAs/GaAs quantum well growth by metalorganic chemical vapor deposition using tertiarybutylarsine"Jpn.J.Appl.Phys. vol.38,no.2B. 1012-1014, (1999)
• [Publications] Takeo Katayama,Yuki Munetaka,and Kenichi Iga: "Improvement of electric-field-assisted ion exchange method for planar microlens array fabrication"Jpn.J.Appl.Phys. vol.38,no.2A. 775-776 (1999)
• [Publications] Yasuhiko Aoki,Toshio Kato,Rogerio Jun Mizuno,and Kenichi Iga: "Micro-optical bench for alignment-free optical coupling"Appl.Opt. vol.38,no.6. 963-965 (1999)
• [Publications] Takeo Kageyama,Tomoyuki Miyamoto,Shigeki Makino,Fumio Koyama,and Kenichi Iga: "Thermal annealing of GaInNAs/GaAs quantum wells grown by chemical beam epitaxy and its effect upon photoluminescence."Jpn.J.Appl.Phys. vol.38,no.3B. L298-L300 (1999)
• [Publications] Shigeaki Sekiguchi,Tadayoshi Kimura,Tomoyuki Miyamoto,Fumio Koyama,and Kenichi Iga: "Long wavelength GaInAsP lasers with n-n contacts using AlAs/InP hole injecting tunnel junction"Jpn.J.Appl Phys. vol.38,no.4B. L443-L445 (1999)
• [Publications] Nobuhiko Nishiyama,Akimasa Mizutani,Nobuaki Hatori,Masakazu Arai,Fumio Koyama,and Kenichi Iga.: "Lasing characteristics of InGaAs-GaAs polarization controlled vertical-cavity surface-emitting laser grown on GaAs (311)B substrate"IEEE J.Select.Top Quantum Electron. vol.5,no.3. 530-536 (1999)
• [Publications] Fumio Koyama,Dietmar Schlenker,Tomoyuki Miyamoto,Zhibiao Chen,Akihiro Matsutani,Takahiro Sakaguchi and Kenichi Iga: "1.2μm highly strained GaInAs/GaAs quantum well lasers for singlemode fibre datalink"Electron.Lett.,. vol.35,no.13. 1079-1081 (1999)
• [Publications] Akihiro Matsutani,Hideo Ohtsuki,Fumio Koyama,and Kenichi Iga.: "Vertical and smooth etching of InP by Cl_2/Xe inductively coupled plasma"Jpn.J.Appl.Phys. vol.38,no.7A. 4260-4261 (1999)
• [Publications] Nobuhiko Nishiyama,Akimasa Mizutani,Nobuaki Hatori,Satoshi Shinada,Masakazu Arai,Fumio Koyama,and Kenichi Iga,: "Polarization characteristics of surface emitting laser grown on (311)B substrates under high speed modulation"Trans. IEICE,. vol.J82-C-I,no.7.. 421-427, (1999)
• [Publications] Dietmar Schlenker,Tomoyuki Miyamoto,Zhibiao Chen,Fumio Koyama and Kenichi Iga,: "1.17μm highly strained GaInAs-GaAs quantum-well laser"IEEE Photon.Technol.Lett.. vol.11,no.8. 946-948, (1999)
• [Publications] Dietmar Schlenker,Zhong Pan,Tomoyuki Miyamoto,Fumio Koyama,and Kenichi Iga,: "Effect of surface quality on overgrowth of highly strained GaInAs/GaAs quantum wells and improvement by a strained buffer layer"Jpn.J.Appl.Phys. vol.38,no.9A. 5023-5027 (1999)
• [Publications] Takeshi Yamatoya,Shota Mori,Fumio Koyama,and Kenichi Iga: "High power GaInAsP/InP strained quantum well superluminescent diode with tapered active region"Jpn.J.Appl.Phys.. vol.38,no.9A. 5121-5122 (1999)
• [Publications] Shigeaki Sekiguchi,Tomoyuki Miyamoto,Tadayoshi Kimura,Fumio Koyama,and Kenichi Iga: "Self-aligned current confinement structure using AlAs/InP tunnel junction in GaInAsP/InP semiconductor lasers"Appl.Phys.Lett. vol.75,no.11. 1512-1514 (1999)
• [Publications] Zhibiao Chen,Dietmar Schlenker,Tomoyuki Miyamoto,Takashi Kondo,Masao Kawaguchi,Fumio Koyama and Kenichi Iga: "High temperature characteristics of near 1.2μm InGaAs/AlGaAs lasers."Jpn.J.Appl.Phys. vol.38,no.10B. L1178-1179 (1999)
• [Publications] Toshihiko Baba,Kyoji Inoshita,Hiroko Tanaka,Jun Yonekura,Maiko Ariga,Akihiro Matsutani,Fumio Koyama,and Kenichi Iga: "Strong enhancement of light extraction efficiency in GaInAsP 2-D-arranged microcolumns"IEEE J.Lightwave Tech. vol.17,no.11. 2113-2120, (1999)
• [Publications] Satoshi Shinada,Fumio Koyama,Nobuhiko Nishiyama,Masakazu Arai,Kenya Goto,and Kenichi Iga: "Fabrication of miero-aperture surface emitting laser for near field optical data storage."Jpn.J.Appl.Phys. vol.38,no.11B. L1327-L1329 (1999)
• [Publications] Dietmar Schlenker,Tomoyuki Miyamoto,Zhong Pan,Fumio Koyama and Kenichi Iga: "Miscibility gap calculation for Ga_<1-x>In_xN_yAs_<1-y> including strain effects,"J.Crystal Growth. vol.196. 67-70 (1999)
• [Publications] Tomoyuki Miyamoto,Kanji Takeuchi,Takeo Kageyama,Fumio Koyama,and Kenichi Iga: "Chemical beam epitaxy of GaInNAs/GaAs quantum wells and its optical absorption property"J.Crystal Growth. vol.197. 67-72 (1999)
• [Publications] Tohru Honda,Hideo Kawanishi,Takahiro Sakaguchi,Fumio Koyama,and kenichi Iga: "Characteristic temperature estimation for GaN-Based lasers."MRS Internet J.Nitride Semicond.Res. vol.4S1,G6.2. (1999)
• [Publications] Satoshi Shinada,Fumio Koyama,Koichi Suzuki,Kenya Goto,and Kenichi Iga: "Near-field analysis of micro-aperture surface emitting laser for high density optical data storage"Optical Review. Vol 6,no.6. 28-30 (1999)
• [Publications] Nobuaki Hatori,Akimasa Mizuta,Nobuhiko Nishiyama,Fumichika Motoyama,Fumio Koyama,and Kenichi Iga: "P-type delta-doped InGaAs/GaAs quantum well vertical-cavity surface-emitting lasers"Electronics and Communications in Japan,. vol.82 Pt.2,no.4.. 54-60 (1999)
• [Publications] Kenichi Iga: "Surface emitting lasers"Electronics and Communications in Japan,. vol.82 Pt.2 no.10. 70-82, (1999)
• [Publications] Nobuhiko Nishiyama,Satoshi Shinada,Masakazu Arai,Fumio Koyama,and Kenichi Iga: "Threshold reduction of polarization controlled InGaAs/GaAs vertical-cavity surface emitting lasers on GaAs (311) B substrates"OSA Snowmass Meeting. 43-45 (1999)
• [Publications] Fumio Kuyama,Shunichi Sato,Tomoyuki Miyamoto,and Kenichi Iga: "Composition dependence of carrier lifetime and spontaneous emission of highly strained GaInNAs/GaAs QW lasers"11th Int.Conf.on Indium Phosphide and Related Materials. 565-568 (1999)
• [Publications] Dietmar Schlenker,Tomoyuki Miyamoto Zhibiao Chen,Fumio Koyama,and Kenichi Iga: "Long wavelength GaInAs/GaAs quantum well lasers"11th Int.Conf on Indium Phosphide and Related Materials. 499-502, (1999)
• [Publications] Shigeaki Sekiguchi,Tomoyuki Miyamoto,Tadayoshi Kimura,Fumio Koyama,and Kenichi Iga: "Selectively formed AlAs/InP current confining tunnel junction for GaInAsP/InP surface emitting lasers"11th Int.Conf.on Indium Phosphide and Related Materials. 211-214 (1999)
• [Publications] M.Fujita,Toshihiko Baba,Akihiro Matsutani,Fumio Koyama,and Kenichi Iga: "A novel GaInAsP microcylinder laser with AlInAs(O) claddings"11th Int.Conf.on Indium Phosphide and Related Materials. 215-217 (1999)
• [Publications] Dietmar Schlenker,Tomoyuki Miyamoto,Zhibiao Chen,Fumio Koyama,and Kenichi Iga: "Growth of highly strained 1.2μm GaInAs/GaAs quantum wells for long-wavelength lasers"9th biennial workshop on Organometallic Vapor Phase Epitaxy. (1999)
• [Publications] Kenichi Iga,Fumio Koyama,and Nobuhiko Nishiyama: "Polarization controlled vertical cavity surface emitting lasers"Conf.on Lasers and Electro-Optics. (1999)
• [Publications] Yasuhiko Aoki,Roherio Jun Mizuno,Yuji Shimada,and Kenichi Iga: "Parallel and bi-directional optical interconnect module using vertical cavity surface emitting lasers(VCSELs)and 3-D micro optical bench(MOB)"1999 IEEE/LEOS Summer Topical Meetings. (1999)
• [Publications] Fumio Koyama,Tomoyuki Miyamoto,Zhibiao Chen,Akihiro Matsutani,Takahiro Sakaguchi,and Kenichi Iga: "Highly strained GaInAs/GaAs QW for 1.2μm surface emitting lasers."1999 IEEE/LEOS Summer Topical Meetings. (1999)
• [Publications] Tomoyuki Miyamoto,Fumio Koyama,and Kenichi Iga: "CBE and MOCVD growth of GaInNAs."7th Int.Conf.on Chemical Beam Epitaxy and Related Growth Techniques. 97-98 (1999)
• [Publications] Takeo Kageyama,Tomoyuki Miyamoto Shigeki Makino,Fumio Koyama,And Kenichi Iga: "Optical quality of GaNAs and GaInNAs and GaInNAs and its dependence on RF cell condition in chemical beam epitaxy"7th Int.Conf.on Chemical Beam Epitaxy and Related Growth Techniques . 113-114 (1999)
• [Publications] Rogerio Jun Mizuno,Yasuhiko Aoki Yuji Shimada,and Kenichi Iga: "Bidirectional optical module based on stacked optical eircuit design "7th Microoptics Conf.. 30-33 (1999)
• [Publications] Noriyoshi Furukawa,Fumio Koyama,Nobuhiko Nishiyama,Masakazu Arai,Tomoyuki Miyamoto,and Kenichi Iga: "Micromachined tunable GaAlAs/GaAs DBR for temperature insensitive vertical cavity add/drop filter"7th Microoptics Conf.. 70-73 (1999)
• [Publications] Binquan Wang,Tomoyuki Miyamoto,and Kenichi Iga,: "Optical pattern recognition system based on optical correlator using planar microlens array."7th Microoptics Conf.. 240-243 (1999)
• [Publications] Yasuhiko Aoki,Yuji Shimada,Rogerio Jun Mizuno,and Kenichi Iga: "2-dimensional alignment-free optical interconnect using micro optical bench(MOB) scheme"7th Microoptics Conf.. 294-297 (1999)
• [Publications] Takanori Takahashi,Takeo Katayama,and Kenichi Iga,: "Parallel optical pattern recognition on walsh spatial frequency domain filtering (WSFDF) by using planar microlens array"7th Microoptics Conf.. 312-315 (1999)
• [Publications] Kenichi Iga: "Vertical cavity surface emitting lasers and parallel microoptics-Are they friends or rivals of POF?-."8th Int.POF Conf.. 181-186 (1999)
• [Publications] Kenichi Iga,and Fumio Koyama,: "Advances in vertical cavity surface emitting lasers"18th Int.Commission for Optics. 300-301 (1999)
• [Publications] Fumio Koyama,Dietmar Schlenker,Tomoyuki Miyamoto,Zhibiao Akihiro Matsutani,Takahiro Sakaguchi and Kenichi Iga: "2 Gbit/s single-mode fiber data transmission using 1.2μm heatsink-free GaInAs/GaAs laser for Gbit/s-LAN"25th European Conf.on Optical Communication . (1999)
• [Publications] Satoshi Shinada,Fumio Koyama,Nobuhiko Nishiyama,Masakazu Arai,Kenya Goto,and Kenichi Iga,: "Micro-aperture GaAs surface emitting laser for near field optical data storage"The 1999 Int.Conf.on Solid State Devices and Materials. 290-291 (1999)
• [Publications] Takeo Kageyama,Tomoyuki Miyamoto Shigeki Makino,Fumio Koyama,and Kenichi Iga,: "GaInNAs/GaAs quantum well laser grown by chemical beam epitaxy,"The 1999 Int.Conf.on Solid State Devices and Materials. 298-299, (1999)
• [Publications] Satoshi Mitsugi,Fumio Koyama,Akihiro Matsutai,and Kenichi Iga,: "Fabrication of InP vertical facets by reactive ion etching and sidewall roughness evaluation for semiconductor microveavities."The Pacific Rim Conf.on Lasers and Electro-Optics 1999. (1999)
• [Publications] Takeshi Yamatoya,Shota Mori,Fumio Koyama,and Kenichi Iga: "Design and fabrication of high power and broad-band GaInAsP/InP strained quantum well superluminescent diodes with tapered active region."The Pacific Rim Conf.on Lasers and Electro-Optics 1999. (1999)
• [Publications] Satoshi Shinada,Koichi Suzuki,Fumio Koyama,Nobuhiko Nishiyama,Kenichi Iga,and Kenya Goto: "Micro-aperture surface emitting laser for near field optical data storage"The Pacific Rim Conf.on Lasers and Electro-Optics 1999. (1999)
• [Publications] Zhibiao Chen,Dietmar Schlenker,Fumio Koyama,Tomoyuki Miyamoto,Akihiro Matsutani,and Kenichi Iga: "High temperature characteristics of highly strained 1.2μm InGaAs/GaAs quantum well lasers"5th Asia Pacific Conf.on Communications and 4th Optoelectronics and Communications Conf.. 1311-1314 (1999)
• [Publications] Takeru Amano,Fumio Koyama,Nortyoshi Furukawa,Nobuhiko Nishiyama,Masakazu Arai,and Kenichi Iga: "Micromachined GaAlAs/GaAs vertical cavity filter with adjustable temperature dependence"5th Asia Pacific Conf.on Communications and 4th Optoelectronics and Communica Conf.. (1999)
• [Publications] Kenichi Iga,Fumio Koyama,Tomoyuki Miyamoto,Dietmar Schlenker.and Zhibiao Chen: "High characteristic temperature (T_0>150K) 1.2μm GaInAs/GaAs lasers."IEEE Lasers and Electro-Optics Society 1999 Annual Meeting. (1999)
• [Publications] Fumio Koyama,Dietmar Schlenker,Tomoyuki Miyamoto,Zhibiao Chen,and Kenichi Iga,: "1.2μm GaInAs/GaAs lasers-Are they useful for high capacity single mode fiber datacom?-"SPIE Conf.on Photonics Technology. 290-296 (1999)
• [Publications] Fumio Koyama,Satoshi Shinada,Kenya Goto,and Kenichi Iga,: "Surface emitting lasers for optical near-field data storage,"SPIE Conf.on Photonics Technology. 344-350 (1999)
• [Publications] T.Baba,N.Fukaya and J.Yonekura: "Observation of light transmission in photonic erystal waveguides with bends"Electron.Lett. vol.27,no.8. 645-655 (1999)
• [Publications] M.Fujita,A.Sakai and T.Baba: "Ultra-small and ultra-low threshold microdisk injection laser - design, fabrication, lasing characteristics and and spontaneous emission factor"IEEE J.Selected Topics in Quantum Electron. vol.5,no.6. 63-681 (1999)
• [Publications] A.Sakai and T.Baba: "FDTD simulation of photonic devices and circuits based on circular and fan-shaped disks"IEEE/OSA J.Lightwave Technol. vol.17,no.8. 149-1499 (1999)
• [Publications] J.Yonekura,M.Ikeda and T.Baba: "Analysis of finite 2-D photonic crystals of columns and lightwave devices using the scattering matrix method"IEEE/OSA J.Lightwave Technol. vol.18,no.3. 1500-1508 (1999)
• [Publications] T.Baba,K.Inoshita,H.Tanaka,J.Yonekura,M.Ariga,A.Matsutani,T.Miyamoto,F.Koyama and K.Iga: "Strong enhancement of light extraction efficiency in GaInAsP 2-D photonic crystals of columns"IEEE/OSA J.Lightwave Technol. vol.17,no.11. 2113-2120 (1999)
• [Publications] 馬場俊彦,冨士田誠之,坂井篤,山田泰史,神原浩平: "GaInAsP電流注入型ディスクレーザの超微小化と応用技術"応用物理. vol.68,no.12. 1353-1358 (1999)
• [Publications] N.Fukaya,D.Ohsaki and T.Baba: "2-D photonic crystal waveguides with 60-degree-bends in a thin slab structure"Jpn.J.Appl.Phys. vol.39A. (2000)
• [Publications] M.Ariga,Y.Sekido,A.Sakai,T.Baba,A.Matsutani,F.Koyama and K.Iga,: "Low threshold GaInAsP lasers with semiconductor/air DBR fabricated by inductively coupled plasma etching"Jpn.J.Appl.Phys. vol.39A. (2000)
• [Publications] S.M.Yoon,E.Tokumitsu and H.Ishiwara: "Improvement of Memory Retention Characteristics in Ferroelectric Neuron Circuit Using a Pt/SrBi_2Ta_2O_9/Pt/Ti/SiO_2/Si Structure-Field Effect Transistor as a Synapse Device"Jpn.J.Appl.Phys.. Vol.39 4B(掲載予定). (2000)
• [Publications] E.Tokumitsu,G.Fujii and H.Ishiwara: "Electrical Properties of Metal-Ferroelectric-Insulator-Semiconduetor(MFIS)-And Metal-Ferroelectric-Metal-Insulator-Semiconductor(MFMIS)-FETs Using Ferroelectric SrBi_2Ta_2O_9 Film and SrTa_2O_9/SiON Buffer Layer"Jpn.J.Appl.Phys.. Vol.39 4B(掲載予定). (2000)
• [Publications] S.M.Yoon,E.Tokumitsu,and H.Ishiwara: "Adaptrive-Learning Neuron Integrated Circuits Using Metal-Ferroelectric(SrBi_2Ta_2O_9)-Semiconductor(MFS) FETs"IEEE Electron Device Letters. Vol.20,No.10. 526-528 (1999)
• [Publications] S.M.Yoon,E.Tokumitsu,and H.Ishiwara: "An Electrically Modifiable Synapse Array Composed of Metal-Ferroelectric-Semiconductor(MFS) FETs Using SrBi_2Ta_2O_9 Thin Films"IEEE Electron Device Letters. Vol.20,No.5. 229-231 (1999)
• [Publications] S.M.Yoon,E.Tokumitsu and H.Ishiwara: "Ferroelecric Neuron Integrated Circuits Using SrBi_2Ta_2O_9-Gate FETs and CMOS Schmitt-Trigger Oscillator"IEEE Trans. Electron Devices. (掲載予定). (2000)
• [Publications] E.Tokumitsu,G.Fujii and H.Ishiwara: "Nonvolatile ferroelectric-gate field-effect transistors Using SrBi_2Ta_2O_9/Pt/SrTa_2O_6/SiON/Si structures"Applied Physics Letters. Vol.75 No.4. 575-577 (1999)
• [Publications] S.M.Yoon,E.Tokumitsu,and H.Ishiwara: "Realization of Adaptive Learning Function in a Neuron Circuit Using Metal/Ferroelectric(SrBi_2Ta_2O_9)/Semiconductor Field Effect Transistor(MFSFET)"Jpn.J.Appl.Phys.. Vol 38,No.4B. 2289-2293 (1999)
• [Publications] T.Jimbo,H.Sano,Y.Takahashi,H.Funakubo,E.Tokumitsu,and H.Ishiwara: "Preperration of SrBi_2Ta_2O_9 Thin Films by Liquid-Delivery Metalorganic Chemical Vapor Deposition Using a Double Alcoholate Source"Jpn.J.Appl.Phys.. Vol 38,No.11. 6456-6461 (1999)
• [Publications] K.Nakamura and M.Uchiyama: "A Fiber Optic Vertical Coupler for the Matrix Tactile Senso"Trans.IEE f Japan (E) . 119-E.2. 113-114 (1999)
• [Publications] Y.Uno and K.Nakamura: "Pressure sensitivity of a fiber-optic microprobe for high frequency ultrasonic field "Jpn.J.Appl.Phys.,. 38-1.5B. 3120-3123, (1999)
• [Publications] Y.Uno and K.Nakamura: "Wavelength-division-multiplexing in fiber-optic micro-probe array for high frequency ultrasonic field measurements"Tf be published in IEICE Trans. fn Electrfnics. 83,3. (2000)
• [Publications] K.Nakamura and M.Uchiyama: "A stress sensfr vith a iber fptic ertical cf upler fr matrix-readf ut multi-pfint measurements"Prfc.13th Inter.Cfn.fn Optical Fiber Sensfrs. Tu2-5. 50-53 (1999)
• [Publications] 中村健太郎: "アレイ型ファイバーセンサーによる音環境の測定"MICROOPTICS NEWS. 17,2. 15-20 (1999)
• [Publications] 中村健太郎,岡田貴宏: "光ファイバを遅延線とした発振器の発振周波数測定によるセンシング"第23回光波センシング技術研究会講演論文集. 23. 177-184 (1999)
• [Publications] 中村健太郎,宇野泰斗,二村浩司: "高周波超音波音場測定のための光ファイバ小型プローブの特性"電気学会マイクロマシン研究会資料. 99-17. 23-28, (1999)
• [Publications] 土方泰斗,二村浩司,中村健太郎: "微小プローブの諸特性の検討-高周波超音波計測のための小型光ファイバプローブの試作-"平成11年秋季日音講論集. 2-10-10. 1061-1062 (1999)
• [Publications] 中村健太郎: "音・振動の分布を光で測る"光学. 29,1. 15-19 (2000)
• [Publications] M.Takakusaki,J.Satonobu,Y.Koike,K.Nakamura and S.Ueha: "Design of a radiation plate for load testing of the torsional transducers"J.Acoust.Soc.Jpn.(E). 20-2. 109-116 (1999)
• [Publications] T.Ishii,H.Takahashi,K.Nakamura and S.Ueha: "A low-wear methd of ultrasonic method"."Jpn.J.Appl.Phys.. 38-5B. 3338-3341 (1999)
• [Publications] 平泉啓,小池義和,中村健太郎,上羽貞行: "表面振動データと有限要素法を用いた肉厚構造物中の振動インテンシティ計測"振動・音響新技術シンポジウム講演論文集. 73-76 (1999)
• [Publications] 小池義和,平泉啓,堺淳,中村健太郎,上羽貞行: "表面振動データと有限要素法を用いた超音波振動工具のパワー・フロー計測"第20回超音波エレクトロニクスシンポジウム講演論文集. 213-214 (1999)
• [Publications] 松尾英一,小池義和,中村健太郎,上羽貞行,橋本芳樹: "浮揚物体と音源のサイズが保持力に与える影響-音波浮揚を用いた非接触物体搬送法に関する検討(20)-"平成11年日本音響学春季研究発表会講演論文集. 893-894 (1999)
• [Publications] 平泉啓,小池義和,中村健太郎,上羽貞行: "過渡的な振動現象への拡張-表面振動データと有限要素法による肉厚構造物中の振動インテンシティ計測(V)-"平成11年日本音響学会春季研究発表会講演論文集. 657-658 (1999)
• [Publications] 石井孝明,高橋久徳,中村健太郎,上羽貞行,大西一正: "負荷を考慮した超音波モータ用摩擦材料の摩耗評価法"平成11年日本音響学会春季研究発表会講演論文集. 983-984 (1999)
• [Publications] 澤田徹,小池俊之,小池義和,中村健太郎,上羽貞行: "トレーサーを用いたレーザー・ドップラ法による粒子速度測定の検討-レーザー光を用いた空間音場分布の高速可視化-"平成11年度日本音響学会秋季研究発表会講演論文集. 1183-1184 (1999)
• [Publications] 天野隆史,小池義和,中村健太郎,上羽貞行,橋本芳樹: "非接触搬送装置の大面積化-音波浮揚を用いた非接触物体搬送法に関する検討(21)-"平成11年日本音響学会秋季研究発表会講演論文集. 1077-1078 (1999)
• [Publications] S.Maekawa.K.Takashima.M.Shimojo.Y.Higo.S.Sugiura,B.Ptister.M.V..Swain: "Fatigue tests of Ni-P amorphous alloy microcantdever beams"Jpn.J.Appl.Phys. 38,12B. 7194-7198 (1999)
• [Publications] M.Shimojo,Y.Uchida,S.Turuoka.Y.Higo: "Fatigue striation formation in an Fe-3%Si alltoy-Effects of crystallographie orientation and neighboring grains."Fatigue Fract.Eng.Mater.Struct.. 22. 153-159 (1999)
• [Publications] Y.Uchida,M.Shimojo,Y.Higo: "Relationship between striation height and stress ratio"J.Mater.Sci.. 34. 2411-2419 (1999)
• [Publications] M.Shimojo.Y.Higo: "Effects of inert gas on fatigue crack growth in titanium"Proc.7th Int.Fatigue Congr.. 4. 2311-2316 (1999)
• [Publications] T.Inamura,R,Abe,T.H.Myenong,M.Shimojo.Y.Higo: "Fatigue life extension by nano-sized martensite partieles in steels"Proc.7th Int.Fatigue Congr.. 1. 633-638 (1999)
• [Publications] C.Ishiyama,T.Asai.M.Shimojo.Y.Higo: "The mechanisms of striation formation in poly (methyl methacrylate) (PMMA)"Proc.7th Int.Fatigue Congr.. 3. 1761-1766 (1999)
• [Publications] K.Takashima,T.Kimura.M.Shimojo,Y.Higo,S.Sugiura,M.V.Swain: "A new fatigue testing machine for micro-sized specimens"Proc.7th Int.Fatigue Congr.. 3. 1871-1876 (1999)
• [Publications] S.Maekawa,K.Takashima,M.Shimojo,Y.Higo,S.Sugiura,B.Ptister,M.V.Swain: "Fatigue tests of Ni-P amorphous alloy micro-cantilever beams"Proc.1999 Int.Microprocesses and Nanotechnology Conf.. 132-133 (1999)
• [Publications] T.Inamura,M.Shimojo,Y.Higo: "Non-destructive inspection of fatigue damage by measuring internal friction"Proc.2nd Japan-US symp.on advances in NDT. 3. 157-161 (1999)
• [Publications] 佐藤誠(分担): "バーチャルリアリティ-人工現実感と人間のかかわりを考える-"クバプロ. 180 (1999)