1996 Fiscal Year Annual Research Report

半導体プロセス用低温高周波プラズマの理論体系の確立

Research Project

Project/Area Number	08044169
Research Institution	Keio University
Principal Investigator	真壁利明慶応義塾大学, 理工学部, 教授 (60095651)
Co-Investigator(Kenkyū-buntansha)	中野誠彦慶応大学, 理工学部, 助手 PETROVIC Zo Institute of Phys. Univ. of Belgrade, Research P NESS Kevin Physics Department, James Cook Univ., Reader ROBSON Robe Physics Department, James Cook Univ., Reader
Keywords	rf電子輸送論 / 電子rf異常拡散 / ボルツマン方程式 / ICPプラズマ / E×B電子輸送 / トモグラフィー診断 / ICPモデリング
Research Abstract	1)rf輸送理論の確率産業界で応用発展が急速に進んでいるHF (high frequency), VHF (very high frequency), VHF (ultra high frequency)高周波領域の非平衡プラズマ維持や制御に欠かせないrf電子輸送理論を完全な形で確立した。具体的には、rf場で電子の異常拡散現象が存在することをボルツマン方程式から理論的に導出し自己無憧着な輸送体系を初めて確立した。^<a)> a) K. Maeda, T. Makabe, Z. Lj. Petrovic et al : Phys. Rev. E (1997. 6月号) 2)E×B電子輸送理論の確立プラズマプロセス技術で、リアクターに磁場が印加される場合は多い。これは電子密度やその輸送の制御にほかならず、電・磁場内の電子輸送を各プロセスガスについて明らかとする必要がある。本国際共同研究ではオーストラリアJames Cook大学物理学科のNess博士を招聘しスパッタリングやエッチングで最も利用度の高いAr中のE×B電子輸送をボルツマン方程式から具体的に明らかとした。^<b)> b) K. E. Ness and T. Makabe : Phys. Rev. E (in preparation) 3)ICPリアクターのCT診断筆者の開発したロボット駆動CT装置を用いて、Petrovic教授の滞在中に誘導結合形プラズマ(ICP)の空間分布を観測し、非対称性を考察した。また、ICPの維持機構における電子のE×Bドリフト効果の寄与をはじめて実験的にとらえた。これは先の筆者のICPモデル理論の妥当性の一検証となろう。^<c, d) > c)M. Tadokoro, Z. Lj. Petrovic and T. Makabe et al : Jpn. J. Appl. Phys. d)M. Tadokoro, Z. Lj. Petrovic and T. Makabe et al : Phys. Rev. E (submitted)

Research Products

(12 results)

All Other

All Publications (12 results)

[Publications] M. Tadokoro, N. Nakano, Z. Petrovic and T. Makabe: "Space-and Time-Resolved 3D Profile of Inductively Coupled Plasma in O_2" 191th Meeting of ECS : Symposia, "Prosess control, diagnostics and modeling in semicomductor manufacturing II". (1997)
[Publications] K. Maeda and T. Makabe: "Study of RF electron searm transpor under density gradient by direct numerical procedure of the Boltzmann equation" Europhysics Conference Abstracts, ESCAMPIG 94. 18E. 151-152 (1996)
[Publications] T. Makabe: "Robot assisted optical emission tomography in a CCP and ICP and Related numerical results" Proc. of 18th SPIG. 248 (1996)
[Publications] N. Nakano and T. Makabe: "Modeling of narrow gap reactive ion etcher by the relaxation Continuum Model" Proc. of 18th SPIG. 249 (1996)
[Publications] A. Okigawa, N. Nakano, T. Makabe and Z. Petrovic: "Diagnostics of non-equilibrium inductively coupled plasamas in Ar" Proc. of 18th SPIG. 410-413 (1996)
[Publications] T. Kitajima, M. Izawa, N. Nakano and T. Makabe: "Comparison of net procuction rate between 100MHz and 13.56MHz in CCPin Ar by 2D optical emission spectroscopy" Proc. of 18th SPIG. 414-417 (1996)
[Publications] K. Maeda, T. Makabe, N. Nakano, S. Bzenic and Z. Lj. Petrovic: "Diffusion tensor in electron transport in gases in a radiofrequency field" Phys. Rev. E. 55・56A (in press). (1997)
[Publications] T. Kitajima, M. Izawa, N. Nakano and T. Makabe: "Time resolved 2D structure of a rf ccp" J. pPhys. D. (accepted for publication). (1997)
[Publications] M. Tadokoro, A. Okigawa, A. Itoh, N. Nakano, Z. Lj. Petrovic and T. Makabe: "Three Dimensional Potical Emission Tomography of an Inductively coupled Plasma" Jpn. J. Appl. Phys.(submitted).
[Publications] T. Tadokoro, H. Hirata, A. Okigawa, H. Nabeta, N. Nakano, Z. Petrovic and T. Makabe: "Time resolved Optical Emission Spectroscopy of an Inductively Coupled Plasma in Around O_2" Phys. Rev. E. (submitted).
[Publications] R. Hashido, M. Hasebe, Y. Hosokawa, N. Nakano, Y. Yamaguchi and T. Makabe: "A two dimentional transport of submicron particles in ccp reactor" Jpn. J. Appl. Phys.(submitted).
[Publications] K. F. Ness and T. Makabe: "Electron transport in Ar in crossed Electric and Magnetic Fields when Ionization is significant" Phys. Rev. E. (to submit, May 16. 1997).

1996 Fiscal Year Annual Research Report

半導体プロセス用低温高周波プラズマの理論体系の確立

Principal Investigator

真壁 利明 慶応義塾大学, 理工学部, 教授 (60095651)

Research Products

[Publications] M. Tadokoro, N. Nakano, Z. Petrovic and T. Makabe: "Space-and Time-Resolved 3D Profile of Inductively Coupled Plasma in O_2" 191th Meeting of ECS : Symposia, "Prosess control, diagnostics and modeling in semicomductor manufacturing II". (1997)

[Publications] K. Maeda and T. Makabe: "Study of RF electron searm transpor under density gradient by direct numerical procedure of the Boltzmann equation" Europhysics Conference Abstracts, ESCAMPIG 94. 18E. 151-152 (1996)

[Publications] T. Makabe: "Robot assisted optical emission tomography in a CCP and ICP and Related numerical results" Proc. of 18th SPIG. 248 (1996)

[Publications] N. Nakano and T. Makabe: "Modeling of narrow gap reactive ion etcher by the relaxation Continuum Model" Proc. of 18th SPIG. 249 (1996)

[Publications] A. Okigawa, N. Nakano, T. Makabe and Z. Petrovic: "Diagnostics of non-equilibrium inductively coupled plasamas in Ar" Proc. of 18th SPIG. 410-413 (1996)

[Publications] T. Kitajima, M. Izawa, N. Nakano and T. Makabe: "Comparison of net procuction rate between 100MHz and 13.56MHz in CCPin Ar by 2D optical emission spectroscopy" Proc. of 18th SPIG. 414-417 (1996)

[Publications] K. Maeda, T. Makabe, N. Nakano, S. Bzenic and Z. Lj. Petrovic: "Diffusion tensor in electron transport in gases in a radiofrequency field" Phys. Rev. E. 55・56A (in press). (1997)

[Publications] T. Kitajima, M. Izawa, N. Nakano and T. Makabe: "Time resolved 2D structure of a rf ccp" J. pPhys. D. (accepted for publication). (1997)

[Publications] M. Tadokoro, A. Okigawa, A. Itoh, N. Nakano, Z. Lj. Petrovic and T. Makabe: "Three Dimensional Potical Emission Tomography of an Inductively coupled Plasma" Jpn. J. Appl. Phys.(submitted).

[Publications] T. Tadokoro, H. Hirata, A. Okigawa, H. Nabeta, N. Nakano, Z. Petrovic and T. Makabe: "Time resolved Optical Emission Spectroscopy of an Inductively Coupled Plasma in Around O_2" Phys. Rev. E. (submitted).

[Publications] R. Hashido, M. Hasebe, Y. Hosokawa, N. Nakano, Y. Yamaguchi and T. Makabe: "A two dimentional transport of submicron particles in ccp reactor" Jpn. J. Appl. Phys.(submitted).

[Publications] K. F. Ness and T. Makabe: "Electron transport in Ar in crossed Electric and Magnetic Fields when Ionization is significant" Phys. Rev. E. (to submit, May 16. 1997).

真壁利明慶応義塾大学, 理工学部, 教授 (60095651)