1996 Fiscal Year Annual Research Report

Si素子上への強誘電体超格子のヘテロ成長による超強誘電体極限材料の創成

Research Project

Project/Area Number	08238210
Research Institution	Osaka University
Principal Investigator	田畑仁大阪大学, 産業科学研究所, 助手 (00263319)
Co-Investigator(Kenkyū-buntansha)	川合知二大阪大学, 産業科学研究所, 教授 (20092546)
Keywords	レーザーMBE / 無機人工格子 / 原子層成長 / 酸化物結晶成長 / 強誘電体 / Si素子 / RHEED
Research Abstract	極限集積化知能デバイスを実現するため、(1)集積化知能システム極限材料の創製および(2)シリコン知能エレクトロニクスとの融合という2つのアプローチにより研究を遂行した。特に本年度は、以下の成果を挙げた。 (1)ビスマス系強誘電体人工格子において誘電物性とサイズ効果が直接議論できることが可能となった。具体的には、Bi_2O_2層部分と擬ペロブスカイト層部分を交互に積層成長させてBi系強誘電体人工格子を形成して結晶構造の次元性を制御することにより、低誘電率(ε=10)から高誘電率(150)まで制御可能であることを明らかにした。 (2)アブレーション光により形成した粒子が基板上に到達するタイミングに、第二レーザを同期して基板あるいは気相に照射し、光化学的に再励起する成膜手法を開発した。本手法(レーザー2重照射)によりSi-H上へ強誘電体が低温(室温)成長可能なこと。アモルファスSiO_2/Si上にはZnO中間層を利用することで、強誘電体が結晶成長可能であることを明らかにした。

Research Products
(14 results)

All Other

All Publications (14 results)

[Publications] H.Tabata: "Epitaxial Growth of Bi-Layered Structured Suprelattce by a Pulsed Laser Deposition and Their Dielectric Properties." invited paper on Mat.Res.Soc.Symp.401. 73-84 (1996)
[Publications] H.Tanaka: "Controlling foctors on the synthesis of Pb(Zr_xTi_<1-x>)O_3 films" Thin Solid Films. 289. 29-33 (1996)
[Publications] H.Tanaka: "Molecular dynamics simulation for the crystal structures of ferroelectric and dielectric materials of BaTiO_3-SrTiO_3-CaTiO_3" Phys.Rev.B. 53. 14112-14116 (1996)
[Publications] T.Kawai: "Novel Properties in Artificially Structured Di- and Ferro-electric Thin Films." J.Kor.Phys.Soc.29. S591-S593 (1996)
[Publications] T.Kawai: "Harmonic Integration of Functional Metal Oxide Artificial Lattices" Mat.Sci.& Eng.B41. 123-130 (1996)
[Publications] S.Honstu: "Giant Electric Field Effect on Al/BaTiO/(Y_<0.6>Pr_<0.4>)Ba_2Cu_3O_y structures" Jpn.J.Appl.Phys.6B. L184-L187 (1996)
[Publications] S.Honstu: "Pulsed Laser Deposiiton of Bioceramic Hydroxyapatite Thin Films on Polymer Materials" Jpn.J.Appl.Phys.35. L1208-L1210 (1996)
[Publications] S.Hayamizu: "Preparation of Crystallized Zinc Oxide(ZnO)Films on Amorphous Glass Substrates by a Laser Ablation Technique." J.Appl.Phys.80. 787-791 (1996)
[Publications] O.Nakagawara: "Electrical Properties of(Zr,Sn)TiO_4 Dielectric Thin Film by Pulsed LAser Deposition" J.Appl.Phys.80. 388-392 (1996)
[Publications] O.Nakagawara: "Preparation and electrical properties of(Zr,Sn)TiO_4 dielectric thin film by laser ablation." Mat.Res.Soc.Symp.Proc.401. 97-102 (1996)
[Publications] A.Kubo: "Bias dependence of the STM observation on the adsorbed Sr atoms over SrTlO3√5×√5 surfaces" Jpn.J.Appl.Phys.35. L1692-L1694 (1996)
[Publications] S.Honstu: "Electrical properties of hydroxyapatite thin films grown by laser deposition." accepted for Thin Solid Films.(1997)
[Publications] H.Tabata: "Dielectric Properties of Strained (Sr,Ca)TiO_3/(Ba,Sr)TiO_3 Artificial Lattices" Appl.Phys.Lett.70. 321-323 (1997)
[Publications] H.Tabata: "Novel Electric Properties on Ferroelectric/Ferromagnetic Heterostructures." accepted for 電子情報通信学会欧文誌. (1997)

1996 Fiscal Year Annual Research Report

Si素子上への強誘電体超格子のヘテロ成長による超強誘電体極限材料の創成

Principal Investigator

田畑 仁 大阪大学, 産業科学研究所, 助手 (00263319)

Research Products

[Publications] H.Tabata: "Epitaxial Growth of Bi-Layered Structured Suprelattce by a Pulsed Laser Deposition and Their Dielectric Properties." invited paper on Mat.Res.Soc.Symp.401. 73-84 (1996)

[Publications] H.Tanaka: "Controlling foctors on the synthesis of Pb(Zr_xTi_<1-x>)O_3 films" Thin Solid Films. 289. 29-33 (1996)

[Publications] H.Tanaka: "Molecular dynamics simulation for the crystal structures of ferroelectric and dielectric materials of BaTiO_3-SrTiO_3-CaTiO_3" Phys.Rev.B. 53. 14112-14116 (1996)

[Publications] T.Kawai: "Novel Properties in Artificially Structured Di- and Ferro-electric Thin Films." J.Kor.Phys.Soc.29. S591-S593 (1996)

[Publications] T.Kawai: "Harmonic Integration of Functional Metal Oxide Artificial Lattices" Mat.Sci.& Eng.B41. 123-130 (1996)

[Publications] S.Honstu: "Giant Electric Field Effect on Al/BaTiO/(Y_<0.6>Pr_<0.4>)Ba_2Cu_3O_y structures" Jpn.J.Appl.Phys.6B. L184-L187 (1996)

[Publications] S.Honstu: "Pulsed Laser Deposiiton of Bioceramic Hydroxyapatite Thin Films on Polymer Materials" Jpn.J.Appl.Phys.35. L1208-L1210 (1996)

[Publications] S.Hayamizu: "Preparation of Crystallized Zinc Oxide(ZnO)Films on Amorphous Glass Substrates by a Laser Ablation Technique." J.Appl.Phys.80. 787-791 (1996)

[Publications] O.Nakagawara: "Electrical Properties of(Zr,Sn)TiO_4 Dielectric Thin Film by Pulsed LAser Deposition" J.Appl.Phys.80. 388-392 (1996)

[Publications] O.Nakagawara: "Preparation and electrical properties of(Zr,Sn)TiO_4 dielectric thin film by laser ablation." Mat.Res.Soc.Symp.Proc.401. 97-102 (1996)

[Publications] A.Kubo: "Bias dependence of the STM observation on the adsorbed Sr atoms over SrTlO3√5×√5 surfaces" Jpn.J.Appl.Phys.35. L1692-L1694 (1996)

[Publications] S.Honstu: "Electrical properties of hydroxyapatite thin films grown by laser deposition." accepted for Thin Solid Films.(1997)

[Publications] H.Tabata: "Dielectric Properties of Strained (Sr,Ca)TiO_3/(Ba,Sr)TiO_3 Artificial Lattices" Appl.Phys.Lett.70. 321-323 (1997)

[Publications] H.Tabata: "Novel Electric Properties on Ferroelectric/Ferromagnetic Heterostructures." accepted for 電子情報通信学会欧文誌. (1997)

田畑仁大阪大学, 産業科学研究所, 助手 (00263319)