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1997 Fiscal Year Final Research Report Summary

Investigation of Measurement Condition to Detect Single Charge Using Atomic Force Microscope

Research Project

Project/Area Number 08405007
Research Category

Grant-in-Aid for Scientific Research (A)

Allocation TypeSingle-year Grants
Section一般
Research Field 表面界面物性
Research InstitutionOsaka University

Principal Investigator

MORITA Seizo  Osaka Univ., Faculty of Engineering, Professor, 工学部, 教授 (50091757)

Co-Investigator(Kenkyū-buntansha) NISHI Ryuji  Osaka Univ., Faculty of Engineering, Research Assistant., 工学部, 助手 (40243183)
Project Period (FY) 1996 – 1997
Keywordsatomic force microscope / atomic force / electrostatic force microscope / electrostatic force / well-defined surface / atomic resolution / semiconductor surface / charge
Research Abstract

The electrostatic force microscope (EFM) offered new opportunity to measure a variety of electrostatic properties on the surface on a sub-micron scale. For example, potentiometry, imaging of contact-electrified charge and its dissipation process on insulating surface and so on have been demonstrated. However, so far, the lateral resolution of the EFM has been insufficient. This is due to the following two main reasons : (i) It is much difficult to measure weak distance dependence of the electrostatic force with a good signal-to-noise (S/N) ratio. (ii) It is much difficult to separate the electrostatic force from the van der Waals force. Thus, the technical improvements have been required to increase the lateral resolution of the EFM.
In this project, we demonstrated a novel method to detect the van der Waals and the electroatatic force interactions simultaneously on atomic scale, which is based on frequency modulation (FM) detection method. In the noncontact AFM images measured on the GaAs (110) surface, the rectangular lattice and the atomicscale point defects can be clearly and reproducibly resolved. On the other hand, in the EFM images, point defect appeared as bright respect to the background at positive bias voltage, while it appeared dark contrast at negative bias voltage.Thus, the contrast of the EFM images depends on the sample bias voltage V.This means that the EFM images really resulted from the charge at the point defect on the GaAs (110) surface. Thus, for the first time, the atomic resolution imaging has been achieved for the electrostatic force measurement.

  • Research Products

    (22 results)

All Other

All Publications (22 results)

  • [Publications] Y.Sugawara et al.,: ""True atomic resolution imaging with noncontact atomic force microscopy"" Appl.Sur.Sci.Vol.113/114. 364-370 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Abe et al.: "Measurement of the Evanescent Field Using Noncontact Mode Atomic Force Microscope"" Opt.Rev.Vol.4,No1B. 232-235 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Uchihashi et al.: ""Charge Dissipation on Chemically Treated Thin Silicon Oxide in Air"" Jpn.J.Appl.Phys.Vol.36,No.6A. 3755-3758 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Uchihashi et al.: ""Development of ultrahigh vacuum atomic force microscopy with frequency modulation detection and its application to electrostatic force measurement"" J.Vac.Sci.Technol.B. Vol.15,No.4. 1543-1546 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Abe et al.: ""Detection mechanism of optical evanescent field using a noncontact mode Atomic force microscope with a frequency modulation detection method"" J.Vac.Sci.Technol.B. Vol.15,NO.4. 1512-1515 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] N.Sasaki et al.: ""Analysis of frictional-force image patrerns of a grapite surface"" J.Vac.Sci.Technol.B. Vol.15,NO.4. 1479-1482 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] J.Ohgami et al.: ""Growth of Two-Dimensional Nucleus on a Cleaved (010) Surface of (NH_2CH_2COOH)_3・H_2SO_4"" J.Phys.Soc.Jpn.Vol.66,No.9. 2747-2750 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] T.Uchihashi et al.: ""Role of a covalent bonding interaction in noncontact-mode atomic-force microscopy"" Phys.Rev.B. Vol.56,No.16. 9834-9840 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] R.Nishi et al.: ""Simulated Computed Tomography for Reconstruction of Vacancies from Atomic Force Microscope Image"" Jpn.J.Appl.Phys.Vol.36,No.10B. L1410-L1412 (1997)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] M.Abe et al.: ""Force Imaging of Optical Near-Field Using Noncontact Mode Atomic Force Microscopy"" Jpn.J.Appl.Phys.Vol.37,No.2A. L167-L169 (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] H.Ueyama et al.: ""Stable operation mode for dynamic noncontact atomic force microscopy"" Appl.Phys.A. Vol.66 (in press). (1998)

    • Description
      「研究成果報告書概要(和文)」より
  • [Publications] Y.Sugawara, H.Ueyama, T.Uchihashi, M,Ohta, S.Morita, M.Suzuki and S.Mishima: "True atomic resolution imaging with noncontact atomic force microscopy" Appl.Sur.Sci.Vol.223/114. 364-370 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Abe, T.Uchihashi, M.Ohta, H.Ueyama, Y.Sugawara and S.Morita: "Measurement of the Evanescent Field Using Noncontact Mode Atomic Force Microscope" Opt.Rev.Vol.4, No.1B. 232-235 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Uchihashi, A.Nakano, T.Ida, Y.Ando, R.Kaneko Y.Sugawara and S.Morita: "Charge Dissipation on Chemically Treated Thin Silicon Oxide in Air" Jpn.J.Appl.Phys.Vol.36, Part I,No.6A. 3755-3758 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Uchihashi, M.Ohta, Y.Sugawara, Y.Yanase, T.Shigematsu, M.Suzuki and S.Morita: "Development of ultrahigh vacuum atomic force microscopy with frequency modulation detection and its application to electrostatic force measurement" J.Vac.Sci.Technol.B. Vol.15, No.4. 1543-1546 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Abe, T.Uchihashi, M.Ohta, H.Ueyama, Y.Sugawara and S.Morita: "Detection mechanism of optical evanescent field using a noncontact mode Atomic force microscope with a frequency modulation detection method" J.Vac.Sci.Technol.B. Vol.15, No.4. 1512-1515 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] N.Sasaki, M.Tsukada, S.Fujisawa, Y.Sugawara, S.Morita and K.Kobayashi: "Analysis of frictional-force image Patterns of a graphite surface" J.Vac.Sci.Technol.B. Vol.15, No.4. 1479-1482 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] J.Ohgami, Y.Sugawara, S.Morita and T.Ozaki: "Growth of Two-Dimensional Nucleus on a Cleaved (010) Surface of (NH_2CH_2COOH)_3・H_2SO_4" J.Phys.Soc.Jpn.Vol.66, No.9. 2747-2750 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] T.Uchihashi, Y.Sugawara, T.Tsukamoto, M.Ohta and S.Morita: "Role of a covalent bonding interaction in noncontact-mode atomic-force microscopy" Phys.Rev.B. Vol.56, No.16. 9834-9840 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] R.Nishi, T.Ohta, Y.Sugawara, S.Morita and T.Okada: "Simulated Computed Tomography for Reconstruction of Vacancies from Atomic Force Microscope Image" Jpn.J.Appl.Phys.Vol.36, No.10B. L1410-L1412 (1997)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] M.Abe, Y.Sugawara, Y.Hata, K.Sawada and S.Morita: "Force Imaging of Optical Near-Field Using Noncontact Mode Atomic Force Microscopy" Jpn.J.Appl.Phys.Vol.37, No.2A. L167-L169 (1998)

    • Description
      「研究成果報告書概要(欧文)」より
  • [Publications] H.Ueyama, Y.Sugawara and S.Morita: "Stable operation mode for dynamic noncontact atomic force microscopy" Appl.Phys.A. Vol.66 (in press). (1998)

    • Description
      「研究成果報告書概要(欧文)」より

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Published: 1999-03-16  

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